公开(公告)号：US06030541A

公开(公告)日：2000-02-29

申请号：US100542

申请日：1998-06-19

Applicant: James W. Adkisson ,  Michael Caterer ,  James T. Marsh ,  Hung Ng ,  James M. Oberschmidt ,  Jed H. Rankin

Inventor： James W. Adkisson ,  Michael Caterer ,  James T. Marsh ,  Hung Ng ,  James M. Oberschmidt ,  Jed H. Rankin

IPC: H01L21/027 ,  H01L21/28 ,  H01L21/3213 ,  H01L21/033

CPC classification number: H01L21/0276 ,  H01L21/28123 ,  H01L21/32139

Abstract: A pattern in a surface is defined by providing on the surface a hard mask material; depositing an anti-reflective coating on the hard mask material; applying a photoresist layer on the anti-reflective coating; patterning the photoresist layer, anti-reflective layer and hard mask material; and removing the remaining portions of the photoresist layer and anti-reflective layer; and then patterning the substrate using the hard mask as the mask. Also provided is a structure for defining a pattern in a surface which comprises a surface having a hard mask material thereon; an anti-reflective coating located on the hard mask material; and a photoresist located on the anti-reflective coating. Also provided is an etchant composition for removing the hard mask material which comprises an aqueous composition of HF and chlorine.

Abstract translation: 通过在表面上提供硬掩模材料来限定表面中的图案; 在所述硬掩模材料上沉积抗反射涂层; 在抗反射涂层上施加光致抗蚀剂层; 图案化光致抗蚀剂层，抗反射层和硬掩模材料; 并除去光致抗蚀剂层和抗反射层的剩余部分; 然后使用硬掩模作为掩模来图案化衬底。 还提供了一种用于在表面上限定图案的结构，其包括其上具有硬掩模材料的表面; 位于硬掩模材料上的抗反射涂层; 以及位于抗反射涂层上的光致抗蚀剂。 还提供了用于除去硬掩模材料的蚀刻剂组合物，其包含HF和氯的水性组合物。

公开(公告)号：US5257084A

公开(公告)日：1993-10-26

申请号：US951187

申请日：1992-09-25

Applicant: James T. Marsh

Inventor： James T. Marsh

IPC: A63B69/36 ,  G01P3/68 ,  G01P3/36

CPC classification number: A63B69/3623 ,  G01P3/68 ,  A63B2071/0694 ,  A63B2210/50 ,  A63B2220/30 ,  A63B2220/805

Abstract: A technique for measuring golf swing tempo or clubhead speed for a golfer swinging a golf club through a tee area. Two parallel infrared (IR) transmitters transmit respective IR beams along predetermined lines toward the tee area. Respective IR sensors receive respective IR beams reflected from a reflector mounted to the shaft of the golf club, near the clubhead. Each IR sensors provides a respective output signal indicative of the passage of the golf club through a corresponding IR beam. Predetermined sequences of output signals from the IR sensors are detected and the differences in time between various output signals are measured to provide tempo and clubhead speed values for display on a LCD screen. The speed values can be compensated values as obtained from look-up tables.

Abstract translation: 用于测量高尔夫球手通过发球区域摆动高尔夫球杆的高尔夫挥杆速度或杆头速度的技术。 两个并联红外线（IR）发射机沿着预定线路朝向发球区域发送相应的红外光束。 相应的红外传感器接收从安装在高尔夫球杆的轴上的反射器反射的相应的红外光束，靠近球棒头。 每个IR传感器提供相应的输出信号，指示高尔夫球杆通过相应的IR光束的通过。 检测来自IR传感器的输出信号的预定序列，并且测量各种输出信号之间的时间差，以提供用于在LCD屏幕上显示的速度和球杆头速度值。 速度值可以是从查找表获得的补偿值。