公开(公告)号：US20130094221A1

公开(公告)日：2013-04-18

申请号：US13806271

申请日：2011-05-24

申请人： Torsten Goletz ,  Joerg-Peter Schmidt ,  Jan Werschnik

发明人： Torsten Goletz ,  Joerg-Peter Schmidt ,  Jan Werschnik

IPC分类号： G02B27/09

CPC分类号： G02B27/0994 ,  G02B6/0096 ,  G03F7/70075

摘要： A light integrator having four parallelepipedal glass plates which have an identical width. Each plate has an inner side and an outer side with a length, as well as a first and a second longitudinal side and two end faces with a height, the plates are arranged relative to one another such that they enclose a parallelepipedal open cavity extending over the length, the glass plates being bonded to one another. The inner sides of the plates are subdivided into, in each case, a mirror-coated, optically active surface and an adhesive surface, and the inner side bearing with its adhesive surface of in each case one glass plate indirectly via adhesive against the first longitudinal side of another glass plate. The inner side of said glass plates have a groove running in a longitudinal direction and acting as an adhesive trap adjoining the optically active surface. The inner side with its adhesive surface of in each case one glass plate bearing indirectly via adhesive against the first longitudinal side of another glass plate.

摘要翻译： 具有四个平行六面体玻璃板的光积分器具有相同的宽度。 每个板具有内侧和外侧，其长度以及第一和第二纵向侧以及具有高度的两个端面，所述板相对于彼此布置，使得它们围绕延伸的平行六面体开口腔 长度，玻璃板彼此粘合。 板的内侧在每种情况下被细分为镜面涂覆的光学活性表面和粘合剂表面，并且内侧轴承的粘合剂表面在每种情况下间接地通过粘合剂抵靠第一纵向 另一块玻璃板的一面。 所述玻璃板的内侧具有在纵向上延伸的凹槽，并且用作与光学活性表面相邻的粘合剂阱。 其内侧的粘合剂表面在每种情况下是一个玻璃板轴承，间接通过粘合剂抵靠另一玻璃板的第一纵向侧面。

公开(公告)号：US09110380B2

公开(公告)日：2015-08-18

申请号：US13820399

申请日：2012-03-08

申请人： Jan Werschnik ,  Markus Augustin ,  Lutz Reichmann

发明人： Jan Werschnik ,  Markus Augustin ,  Lutz Reichmann

IPC分类号： G03F7/20 ,  G02B26/08 ,  G02B3/00 ,  H01L21/67

CPC分类号： G03F7/70208 ,  G02B3/0056 ,  G02B26/0841 ,  G03F7/7005 ,  G03F7/70291 ,  H01L21/67069

摘要： The invention relates to an exposure device (14) for the structured exposure of a wafer, having at least one exposure arrangement with which a beam that is separated into two sub-beams is modulated via two micromirror arrays in order to increase the throughput speed during the exposure of wafers.

摘要翻译： 本发明涉及一种用于晶片结构曝光的曝光装置（14），其具有至少一个曝光装置，通过两个微镜阵列调制分离成两个子光束的光束，以便增加在 晶圆的曝光。