公开(公告)号：US5383969A

公开(公告)日：1995-01-24

申请号：US42933

申请日：1993-04-05

申请人： Alexander Teverovsky ,  James C. MacDonald ,  Michael A. Pickering ,  Jeffery L. Kirsch

发明人： Alexander Teverovsky ,  James C. MacDonald ,  Michael A. Pickering ,  Jeffery L. Kirsch

IPC分类号： C23C14/24 ,  C23C16/30 ,  C23C16/44 ,  C23C16/448 ,  C23C16/00 ,  C23C14/00

CPC分类号： C23C16/4481 ,  C23C16/306

摘要： A process and apparatus for the manufacture of chemical vapor deposition deposited structures which comprises supplying a solid zinc metal continuously to a heated retort at a controlled rate. The retort is a body of refractory material having a top and a bottom and a traverse cross section which decreases from the top to the bottom of the retort. The zinc is melted, vaporized, and conveyed to a chemical vapor deposition zone defined by a number of heated mandrel plates where it is reacted with either hydrogen sulfide or hydrogen selenide to form a chemical vapor deposited structure. The process and apparatus provide for improved control over the evaporation rate of zinc and a reduction in the furnace volume needed to melt and vaporize the zinc.

摘要翻译： 一种用于制造化学气相沉积沉积结构的方法和装置，其包括以固定速率将固体锌金属连续地供入加热蒸馏器。 蒸馏器是具有顶部和底部的耐火材料体，横截面从蒸馏器的顶部到底部减少。 锌被熔化，蒸发并输送到由许多加热的心轴板限定的化学气相沉积区，其中它与硫化氢或硒化氢反应形成化学气相沉积结构。 该方法和装置提供了对锌的蒸发速率的改进的控制以及熔化和蒸发锌所需的炉体积的降低。

公开(公告)号：US4978577A

公开(公告)日：1990-12-18

申请号：US337026

申请日：1989-04-12

申请人： Parul V. Purohit ,  Jeffery L. Kirsch ,  James C. MacDonald

发明人： Parul V. Purohit ,  Jeffery L. Kirsch ,  James C. MacDonald

IPC分类号： C23C16/02 ,  C23C16/30 ,  C30B25/02 ,  G02B1/10

CPC分类号： G02B1/105 ,  C23C16/0218 ,  C23C16/306 ,  C30B25/02 ,  C30B29/48 ,  Y10S428/911 ,  Y10S428/913 ,  Y10S428/918 ,  Y10T428/31

摘要： An improved method of forming a ZnS layer on a ZnSe substrate by chemical vapor deposition of ZnS onto the ZnSe is disclosed in which the ZnS is contacted, prior to the chemical vapor deposition of the ZnS, with H.sub.2 S in the absence of zinc metal vapor to cause reaction of the H.sub.2 S and the surface of the ZnSe substrate.

摘要翻译： 公开了通过ZnS在ZnSe上的化学气相沉积在ZnSe衬底上形成ZnS层的改进方法，其中ZnS在化学气相沉积ZnS之前与不存在锌金属蒸气的H 2 S接触 引起H 2 S与ZnSe衬底表面的反应。