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公开(公告)号：US06231923B1
公开(公告)日：2001-05-15
申请号：US09375734
申请日：1999-08-17
IPC分类号： C23C1644
CPC分类号： C23C16/4588 , C23C16/01 , C23C16/458
摘要： A method and apparatus for producing a coating or a near net shaped monolithic ceramic part by chemical vapor deposition, where the resultant coatings or parts consume less deposit material and require less machining. Mandrel substrates are closely designed for producing a specific, near net shaped final part, including negative relief features. Several of the mandrel substrates are mounted through centers in a spaced relationship on one or more rotable shafts as tooling for a chemical vapor deposition furnace. The tooling is installed in a chemical vapor deposition furnace so that the shafts are oriented perpendicular and the substrate planar surfaces are parallel to the flow pattern of reactant gases through the furnace. The shafts are rotated during the deposition process so that the mandrel substrates each receive a uniformly distributed ceramic deposit in the near net shape of the final part.
摘要翻译： 一种用于通过化学气相沉积制造涂层或近网状整体陶瓷部件的方法和装置，其中所得的涂层或部件消耗较少的沉积材料并且需要较少的加工。 心轴衬底被紧密地设计用于生产特定的近净形的最终部件，包括负的浮雕特征。 几个心轴基板通过中心以一个或多个可旋转的轴间隔开地安装，作为用于化学气相沉积炉的工具。 工具安装在化学气相沉积炉中，使得轴垂直取向，并且基板平面与通过炉的反应气体的流动图形平行。 轴在沉积过程中旋转，使得心轴基板各自接收最终部件的近净形状的均匀分布的陶瓷沉积物。
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2.发明授权Method of producing domes of ZNS and ZNSE via a chemical vapor deposition technique 失效通过化学气相沉积技术生产ZNS和ZNSE圆顶的方法
公开(公告)号：US5453233A
公开(公告)日：1995-09-26
申请号：US42942
申请日：1993-04-05
IPC分类号： C23C16/44 , C23C16/01 , C23C16/458 , C23C16/00
CPC分类号： C23C16/458 , C23C16/01
摘要： A method and device are provided for reducing the loss of CVD manufactured parts due to cracking caused by mechanical stresses resulting from the mismatch of the coefficient of thermal expansion between the chemical vapor deposed part and the mandrel plate. The method and device provide a removable mandrel support which is removed after the chemical vapor deposition but prior to the cooling of the CVD part and the mandrel plates. This permits the CVD part to contract upon cooling without mechanical restriction, thus reduce cracking caused by contraction of the CVD part against a mold which does not contract substantially.
摘要翻译： 提供了一种方法和装置，用于减少由于化学气相沉积部分和心轴板之间的热膨胀系数不匹配引起的机械应力引起的由于裂纹引起的CVD制造零件的损失。 该方法和装置提供了可移除的心轴支撑件，其在化学气相沉积之后但在CVD部件和心轴板的冷却之前被移除。 这允许CVD部件在没有机械限制的情况下在冷却时收缩，从而减少由CVD部件相对于基本不收缩的模具的收缩引起的开裂。
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公开(公告)号：US5746793A
公开(公告)日：1998-05-05
申请号：US586044
申请日：1996-01-16
IPC分类号： B01D39/20 , B60R21/26 , B60R21/264
CPC分类号： B60R21/2644 , B01D39/2031 , B01D39/2034 , B01D39/2075 , B01D39/2093
摘要： Reinforced ceramic unitary filters for air bags. The filters have a first layer having a high porosity, and a second layer having a low porosity. The first layer is preferably formed of low-cost ceramic grit sintered into a rigid mass, or a rigid reticulated ceramic. The second layer is formed of metal particles, and provides increased strength for the brittle ceramic. The metal particles may be formed onto the second layer and then sintered in place. Alternatively, the second layer may be formed separately and secured in position on the first layer. As a third alternative, the second layer may be applied by plasma arc deposition upon the first layer. The metal particles provide increased strength to the filter, as well as providing a fine filtering layer. The metal layer can also place the ceramic in compression to pre-load the ceramic layer for increased resistance to breakage.
摘要翻译： 用于气囊的强化陶瓷单一过滤器。 过滤器具有高孔隙率的第一层和具有低孔隙率的第二层。 第一层优选由烧结成刚性质量块或刚性网状陶瓷的低成本陶瓷砂粒形成。 第二层由金属颗粒形成，并为脆性陶瓷提供增强的强度。 金属颗粒可以形成在第二层上，然后在适当位置烧结。 或者，第二层可以单独形成并固定在第一层上的适当位置。 作为第三替代方案，第二层可以通过等离子体电弧沉积施加在第一层上。 金属颗粒为过滤器提供增强的强度，以及提供精细的过滤层。 金属层也可以将陶瓷压缩以预加载陶瓷层，以增加耐破坏性。
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公开(公告)号：US5354580A
公开(公告)日：1994-10-11
申请号：US073862
申请日：1993-06-08
摘要： A process and apparatus for the manufacture of chemical vapor deposited silicon carbide which comprises conveying the reaction gases to a triangular chemical vapor deposition cell where material is deposited by chemical vapor deposition. The triangular cell provides a large surface area for deposition while occupying a minimum amount of the furnace floor surface area. The triangular cell has the added benefit in that deposited silicon carbide is of negligible thickness at the edges thereby permitting easy separation of material with a minimum of post deposition machining.
摘要翻译： 用于制造化学气相沉积碳化硅的方法和装置，其包括将反应气体输送到三角化学气相沉积池，其中材料通过化学气相沉积沉积。 三角形电池提供大的表面积用于沉积，同时占据最小量的炉底面积。 三角形电池具有附加的益处，因为沉积的碳化硅在边缘处的厚度可忽略不计，从而允许以最小的后沉积加工容易地分离材料。
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5.发明授权
公开(公告)号：US5383969A
公开(公告)日：1995-01-24
申请号：US42933
申请日：1993-04-05
CPC分类号： C23C16/4481 , C23C16/306
摘要： A process and apparatus for the manufacture of chemical vapor deposition deposited structures which comprises supplying a solid zinc metal continuously to a heated retort at a controlled rate. The retort is a body of refractory material having a top and a bottom and a traverse cross section which decreases from the top to the bottom of the retort. The zinc is melted, vaporized, and conveyed to a chemical vapor deposition zone defined by a number of heated mandrel plates where it is reacted with either hydrogen sulfide or hydrogen selenide to form a chemical vapor deposited structure. The process and apparatus provide for improved control over the evaporation rate of zinc and a reduction in the furnace volume needed to melt and vaporize the zinc.
摘要翻译： 一种用于制造化学气相沉积沉积结构的方法和装置，其包括以固定速率将固体锌金属连续地供入加热蒸馏器。 蒸馏器是具有顶部和底部的耐火材料体，横截面从蒸馏器的顶部到底部减少。 锌被熔化，蒸发并输送到由许多加热的心轴板限定的化学气相沉积区，其中它与硫化氢或硒化氢反应形成化学气相沉积结构。 该方法和装置提供了对锌的蒸发速率的改进的控制以及熔化和蒸发锌所需的炉体积的降低。
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