公开(公告)号：US5629918A

公开(公告)日：1997-05-13

申请号：US377018

申请日：1995-01-20

申请人： Chih-Ming Ho ,  Denny K. Miu ,  Jeremy Tzong-Shyng Leu ,  Raanan Miller ,  Amish Desai ,  Chang Liu ,  Tom Tsao ,  Yu-Chong Tai

发明人： Chih-Ming Ho ,  Denny K. Miu ,  Jeremy Tzong-Shyng Leu ,  Raanan Miller ,  Amish Desai ,  Chang Liu ,  Tom Tsao ,  Yu-Chong Tai

IPC分类号： B44C1/22

CPC分类号： H02K99/00

摘要： A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

摘要翻译： 表面微加工微磁致动器设置有能够使用磁力作为致动力来实现高于100微米的大偏转的挡板。 翼片通过一个或多个梁耦合到基底并且在基底上悬臂。 坡度合金层或磁性线圈设置在翼片上，使得当翼片被放置在磁场中时，可以使其选择性地相互作用并旋转出磁致动器的平面。 通过蚀刻设置在翼片和基底之间的下面的牺牲层，将悬臂翼片从下面的基底释放。 蚀刻出来的和现在的悬臂翼片被磁力驱动，以保持其与基底不接触，同时刚刚蚀刻的装置被干燥以获得高的释放产率。