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213 条记录 (耗时 0.038 秒)

    Electromagnetically actuated micromachined flap
    1.
    发明授权
    Electromagnetically actuated micromachined flap 失效
    电磁致动微机械瓣

    公开(公告)号：US5629918A

    公开(公告)日：1997-05-13

    申请号：US377018

    申请日：1995-01-20

    申请人： Chih-Ming Ho ,  Denny K. Miu ,  Jeremy Tzong-Shyng Leu ,  Raanan Miller ,  Amish Desai ,  Chang Liu ,  Tom Tsao ,  Yu-Chong Tai

    发明人： Chih-Ming Ho ,  Denny K. Miu ,  Jeremy Tzong-Shyng Leu ,  Raanan Miller ,  Amish Desai ,  Chang Liu ,  Tom Tsao ,  Yu-Chong Tai

    IPC分类号： B44C1/22

    CPC分类号： H02K99/00

    摘要： A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

    摘要翻译： 表面微加工微磁致动器设置有能够使用磁力作为致动力来实现高于100微米的大偏转的挡板。 翼片通过一个或多个梁耦合到基底并且在基底上悬臂。 坡度合金层或磁性线圈设置在翼片上，使得当翼片被放置在磁场中时，可以使其选择性地相互作用并旋转出磁致动器的平面。 通过蚀刻设置在翼片和基底之间的下面的牺牲层，将悬臂翼片从下面的基底释放。 蚀刻出来的和现在的悬臂翼片被磁力驱动，以保持其与基底不接触，同时刚刚蚀刻的装置被干燥以获得高的释放产率。

    Micromachined hot-wire shear stress sensor
    2.
    发明授权
    Micromachined hot-wire shear stress sensor 失效
    微加工热丝剪切应力传感器

    公开(公告)号：US5883310A

    公开(公告)日：1999-03-16

    申请号：US428334

    申请日：1995-04-25

    申请人： Chih-Ming Ho ,  Yu-Chong Tai ,  Fukang Jiang ,  Chang Liu ,  Jin-Biao Huang

    发明人： Chih-Ming Ho ,  Yu-Chong Tai ,  Fukang Jiang ,  Chang Liu ,  Jin-Biao Huang

    IPC分类号： G01F1/684 ,  G01P5/12 ,  G01B7/16

    CPC分类号： G01P5/12 ,  G01F1/6845

    摘要： A micromachined hot-wire anemometer having fast response times and higher sensitivities than conventional hot-wire anemometers is provided by micromachining doped polysilicon wires carried on silicon supports cantilevered from a substrate including one or more insulating layers disposed between said substrate and supports. The micromachined polysilicon hot-wire anemometer is fabricated using surface micromachining techniques.A shear stress sensor is micromachined to define a thin diaphragm over a cavity defined in a substrate underlying the diaphragm. The cavity is evacuated, sealed, and a thermistor disposed over the diaphragm. The thermistor is thus thermally insulated from the substrate and provides a low profile shear stress sensor for measuring flow rates in boundary layers above a flow surface.

    摘要翻译： 具有比常规热线风速计更快的响应时间和更高灵敏度的微加工热线风速计通过微机械加工在从包括设置在所述衬底和支撑件之间的一个或多个绝缘层悬垂的硅衬底上的掺杂多晶硅线提供。 使用表面微加工技术制造微加工多晶硅热丝风速计。 剪切应力传感器被微加工以在限定在隔膜下方的基板中的空腔上限定薄膜。 空腔被抽真空，密封，并且设置在隔膜上方的热敏电阻。 因此，热敏电阻与基板热绝缘，并提供用于测量流动表面上方边界层中的流速的低剖面剪切应力传感器。

    Electrostatic particle transportation
    8.
    发明授权
    Electrostatic particle transportation 失效
    静电颗粒运输

    公开(公告)号：US06185084B2

    公开(公告)日：2001-02-06

    申请号：US09167407

    申请日：1998-10-06

    申请人： Yu-Chong Tai ,  Sang Wook Lee ,  Amish Desai

    发明人： Yu-Chong Tai ,  Sang Wook Lee ,  Amish Desai

    IPC分类号： H01T2300

    CPC分类号： H02N1/004 ,  B03C3/885 ,  B03C5/028 ,  B65G54/02

    摘要： Methods and apparatus implementing a technique for electrostatically transporting a particle through a medium. In general, one implementation includes a substrate; a first insulation layer formed on the substrate; a plurality of electrodes arranged in a sequence on the insulation layer, where the electrodes are divided into a plurality of groups and the electrodes are arranged by group; a second insulation layer over at least one of the electrodes; and a phase shift circuit connected to the electrodes which supplies a voltage wave-form to each group of electrodes, where each voltage wave-form for each group is phase-shifted relative to the other phase-shifted wave-forms.

    摘要翻译： 实施用于通过介质静电输送颗粒的技术的方法和装置。 通常，一个实施方案包括基底; 形成在所述基板上的第一绝缘层; 在所述绝缘层上依次排列的多个电极，其中所述电极被分成多组，所述电极按组排列; 在所述电极中的至少一个上方的第二绝缘层; 以及连接到电极的相移电路，其向每组电极提供电压波形，其中每组的每个电压波形相对于另一个相移波形相移。