Abstract:
The invention is directed to a process for the manufacture of a ceria based polishing composition, comprising (a) suspending an inorganic cerium salt or cerium hydroxide with a cerium content calculated as cerium oxide in the range of 50%-100% based on Total rare earth oxide (TREO) in an aqueous medium thereby obtaining an aqueous suspension, (b) treating said aqueous suspension with an acid or a salt of an acid selected from the group of HF, H3PO4 and H2SO4, thereby obtaining a solid suspended in said aqueous medium, (c) separating said solid from said aqueous medium, and (d) calcining the separated solid at a temperature between 750° C. and 1,200° C. and grinding the calcined solid to grain sizes in the range of 0.5 μm to 5.0 μm.
Abstract translation:本发明涉及一种制造二氧化铈基抛光组合物的方法,该方法包括:(a)以基于总稀土的50%-100%的范围,将计算为氧化铈的铈含量的无机铈盐或氢氧化铈悬浮 (TREO),由此获得水性悬浮液,(b)用酸或选自HF,H 3 PO 4和H 2 SO 4的酸的盐处理所述水性悬浮液,从而获得悬浮于所述水性溶液中的固体 介质,(c)从所述水性介质中分离所述固体,和(d)在750℃和1200℃之间的温度下煅烧分离的固体,并将煅烧后的固体研磨至0.5μm至5.0的范围内 μm。