公开(公告)号：US08617644B2

公开(公告)日：2013-12-31

申请号：US13415808

申请日：2012-03-08

申请人： Matthew J. Carey ,  Shekar B Chandrashekariaih ,  Jeffrey R. Childress ,  Young-suk Choi ,  John Creighton Read

发明人： Matthew J. Carey ,  Shekar B Chandrashekariaih ,  Jeffrey R. Childress ,  Young-suk Choi ,  John Creighton Read

IPC分类号： G11B5/84

CPC分类号： G11B5/3163 ,  G01R33/093 ,  G11B5/3906 ,  H01F10/1936 ,  H01F10/3268 ,  H01F10/3295 ,  H01F41/303 ,  H01L43/08 ,  H01L43/12

摘要： A method for making a current-perpendicular-to the-plane giant magnetoresistance (CPP-GMR) sensor with a Heusler alloy pinned layer on the sensor's Mn-containing antiferromagnetic pinning layer uses two annealing steps. A layer of a crystalline non-Heusler alloy ferromagnetic material, like Co or CoFe, is deposited on the antiferromagnetic pinning layer and a layer of an amorphous X-containing ferromagnetic alloy, like a CoFeBTa layer, is deposited on the Co or CoFe crystalline layer. After a first in-situ annealing of the amorphous X-containing ferromagnetic alloy, the Heusler alloy pinned layer is deposited on the amorphous X-containing ferromagnetic layer and a second high-temperature annealing step is performed to improve the microstructure of the Heusler alloy pinned layer.

摘要翻译： 在传感器的含Mn反铁磁性钉扎层上制造具有Heusler合金钉扎层的电流垂直于平面的巨磁电阻（CPP-GMR）传感器的方法采用两个退火步骤。 一层结晶的非Heusler合金铁磁材料，如Co或CoFe，沉积在反铁磁性钉扎层上，并且含有非晶态的含铁铁磁性合金如CoFeBTa层沉积在Co或CoFe晶体层上 。 在非晶态含铁铁磁性合金的第一次原位退火之后，将Heusler合金钉扎层沉积在含非晶态的铁磁性层上，并执行第二个高温退火步骤，以改善Heusler合金被钉扎的微结构 层。

公开(公告)号：US08739391B2

公开(公告)日：2014-06-03

申请号：US13238838

申请日：2011-09-21

申请人： Jeffrey R. Childress ,  David Patrick Druist ,  John Creighton Read

发明人： Jeffrey R. Childress ,  David Patrick Druist ,  John Creighton Read

IPC分类号： B23P19/00 ,  G11C5/12

CPC分类号： G11B5/3166 ,  G11B5/3169 ,  G11B5/6082

摘要： An air-bearing slider used in a magnetic recording disk drive has a surface that supports a magnetoresistive (MR) read head or sensor and an electrical lapping guide (ELG) adjacent to the MR sensor. The ELG is formed of a different material than the MR sensor so as to have both a high electrical resistivity and a substantially higher etch rate. When the ELG and MR sensor are etched simultaneously to form their respective back edges, the ELG will have a sharp well-defined non-tapered wall at the back edge. The ELG has a film thickness close to but generally thinner than that of the MR sensor, and a sheet resistance to generally match the resistance measurement capability of the lapping tool. The preferred material for the ELG is an alloy comprising silver (Ag) and one or more of Sn, Ge and zinc Zn.

摘要翻译： 用于磁记录盘驱动器的空气滑动滑块具有支撑磁阻（MR）读头或传感器的表面，以及与MR传感器相邻的电研磨导轨（ELG）。 ELG由与MR传感器不同的材料形成，以具有高电阻率和显着更高的蚀刻速率。 当ELG和MR传感器被同时蚀刻以形成它们各自的后边缘时，ELG在后边缘处将具有锐利明确的非锥形壁。 ELG具有接近但通常比MR传感器更薄的膜厚度，并且薄层电阻通常与研磨工具的电阻测量能力相匹配。 用于ELG的优选材料是包含银（Ag）和Sn，Ge和锌Zn中的一种或多种的合金。

公开(公告)号：US20130070371A1

公开(公告)日：2013-03-21

申请号：US13238838

申请日：2011-09-21

申请人： Jeffrey R. Childress ,  David Patrick Druist ,  John Creighton Read

发明人： Jeffrey R. Childress ,  David Patrick Druist ,  John Creighton Read

IPC分类号： G11B5/60 ,  H05K7/02

CPC分类号： G11B5/3166 ,  G11B5/3169 ,  G11B5/6082

摘要： An electrical lapping guide (ELG) for the fabrication of an air-bearing slider used in a magnetic recording disk drive is formed of a different material than the magnetoresistive (MR) read head or sensor so as to have both a high electrical resistivity and a substantially higher etch rate. When the ELG and MR sensor are etched simultaneously to form their respective back edges, the ELG will have a sharp well-defined non-tapered wall at the back edge. The ELG has a film thickness close to but generally thinner than that of the MR sensor, and a sheet resistance to generally match the resistance measurement capability of the lapping tool. The preferred material for the ELG is an alloy comprising silver (Ag) and one or more of Sn, Ge and zinc Zn.

摘要翻译： 用于制造磁记录盘驱动器中使用的空气轴承滑块的电研磨导向器（ELG）由与磁阻（MR）读头或传感器不同的材料形成，以具有高电阻率和 显着更高的蚀刻速率。 当ELG和MR传感器被同时蚀刻以形成它们各自的后边缘时，ELG在后边缘处将具有锐利明确的非锥形壁。 ELG具有接近但通常比MR传感器更薄的膜厚度，并且薄层电阻通常与研磨工具的电阻测量能力相匹配。 用于ELG的优选材料是包含银（Ag）和Sn，Ge和锌Zn中的一种或多种的合金。

公开(公告)号：US20130236639A1

公开(公告)日：2013-09-12

申请号：US13415808

申请日：2012-03-08

申请人： Matthew J. Carey ,  Shekar B. Chandrashekariaih ,  Jeffrey R. Childress ,  Young-suk Choi ,  John Creighton Read

发明人： Matthew J. Carey ,  Shekar B. Chandrashekariaih ,  Jeffrey R. Childress ,  Young-suk Choi ,  John Creighton Read

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G01R33/093 ,  G11B5/3906 ,  H01F10/1936 ,  H01F10/3268 ,  H01F10/3295 ,  H01F41/303 ,  H01L43/08 ,  H01L43/12

摘要： A method for making a current-perpendicular-to the-plane giant magnetoresistance (CPP-GMR) sensor with a Heusler alloy pinned layer on the sensor's Mn-containing antiferromagnetic pinning layer uses two annealing steps. A layer of a crystalline non-Heusler alloy ferromagnetic material, like Co or CoFe, is deposited on the antiferromagnetic pinning layer and a layer of an amorphous X-containing ferromagnetic alloy, like a CoFeBTa layer, is deposited on the Co or CoFe crystalline layer. After a first in-situ annealing of the amorphous X-containing ferromagnetic alloy, the Heusler alloy pinned layer is deposited on the amorphous X-containing ferromagnetic layer and a second high-temperature annealing step is performed to improve the microstructure of the Heusler alloy pinned layer.

摘要翻译： 在传感器的含Mn反铁磁性钉扎层上制造具有Heusler合金钉扎层的电流垂直于平面的巨磁电阻（CPP-GMR）传感器的方法采用两个退火步骤。 一层结晶的非Heusler合金铁磁材料，如Co或CoFe，沉积在反铁磁性钉扎层上，并且含有非晶态的含铁铁磁性合金如CoFeBTa层沉积在Co或CoFe晶体层上 。 在非晶态含铁铁磁性合金的第一次原位退火之后，将Heusler合金钉扎层沉积在含非晶态的铁磁性层上，并执行第二个高温退火步骤，以改善Heusler合金被钉扎的微结构 层。