Monitor for variation of critical dimensions (CDs) of reticles
    1.
    发明授权
    Monitor for variation of critical dimensions (CDs) of reticles 有权
    监测光栅的关键尺寸(CD)的变化

    公开(公告)号:US08198105B2

    公开(公告)日:2012-06-12

    申请号:US10630332

    申请日:2003-07-30

    CPC分类号: G03F1/78 G03F1/44 G03F1/68

    摘要: The present invention provides a reticle 100 for use in a lithographic process. The reticle, in one embodiment, includes a patterned layer 110 located over a reticle substrate. The reticle 100 may further include a test pattern 130 located over the reticle substrate, wherein a portion of the test pattern 130 is within a step-distance of a portion of the patterned layer. In this embodiment, a variance in the test pattern is indicative of a variance in the patterned layer.

    摘要翻译: 本发明提供一种用于光刻工艺的掩模版100。 在一个实施例中,掩模版包括位于掩模版基板上方的图案层110。 掩模版100还可以包括位于掩模版基板上方的测试图案130,其中测试图案130的一部分在图案层的一部分的步距内。 在该实施例中,测试图案中的方差表示图案层中的变化。

    Security and fire protection system

    公开(公告)号:US4641127A

    公开(公告)日:1987-02-03

    申请号:US696467

    申请日:1985-01-30

    摘要: A plurality of smoke (or heat) detector-transmitter units (17, 19) and/or a plurality of intrusion detector-transmitter units (21) are mounted at various positions throughout a premises to be protected (11a, 11b, 11c . . . ). The units are wireless and transmit a signal whose code relates to whether the unit is a smoke (or heat) detector-transmitter unit (17, 19) or an intrusion detector-transmitter unit (21). Also located on the protected premises (11a, 11b, 11c . . . ) is a receiver-alarm unit (23) that receives and decodes the signals produced by the smoke (or heat) detector-transmitter and intrusion detector-transmitter units (17, 19, 21). Upon receipt of a coded signal, the receiver-alarm unit (23) automatically seizes the telephone line (13a, 13b, 13c . . . ) running from the protected premises (11a, 11b, 11c . . . ) to a central location (15) and produces an "operator" dial signal. The receiver-alarm unit ( 23) also produces an alarm signal whose tone is related to whether the received coded signal was produced by a smoke (or heat) detector-transmitter unit (17, 19) or an intrusion detector-transmitter unit (21). When the central location (15) responds to the "operator" dial signal, the alarm tone is applied to the telephone line (13a, 13b, 13c . . . ). Thus, the operator hears the alarm, as well as sees the premises telephone number, which is produced at the operator's console (29) by the automatic number identification (ANI) circuitry of the central location (15). Thus, the operator has all of the information needed to respond in a suitable matter, i.e., call the fire or police department. The receiver-alarm unit (21) includes a manually operated delay switch (67) that can be used by a subscriber to delay the sending of a "fire" alarm tone to the central location (15) while a potential fire situation is being evaluated. The receiver-alarm unit (21) also includes a manually operable send immediate switch ( 69) that in combination with an activate switch (70) or a received fire alarm signal can be used to cause the telephone line to be seized and the fire alarm tone sent immediately.