CCD with improved charge transfer
    1.
    发明申请
    CCD with improved charge transfer 有权
    CCD具有改进的电荷转移

    公开(公告)号:US20070254413A1

    公开(公告)日:2007-11-01

    申请号:US11412034

    申请日:2006-04-26

    IPC分类号: H01L21/339 H01L21/338

    摘要: A method of forming a charge-coupled device including the steps of forming well or substrate of a first conductivity type; a buried channel of a second conductivity type; a plurality of first gate electrodes; partially coating the first gate electrodes with a mask substantially aligned to an edge of the first gate electrodes; implanting ions of the first conductivity type of sufficient energy to penetrate the first gates and into the buried channel; and a plurality of second gate electrodes covering regions each over the buried channel between the first gate electrodes.

    摘要翻译: 一种形成电荷耦合器件的方法,包括形成第一导电类型的阱或衬底的步骤; 第二导电类型的埋置通道; 多个第一栅电极; 用基本上与第一栅电极的边缘对齐的掩模部分地涂覆第一栅电极; 注入第一导电类型的足够能量的离子以穿透第一栅极并进入掩埋沟道; 以及多个第二栅电极,覆盖在第一栅电极之间的掩埋沟道上的各个区域。