Vacuum monitoring apparatus
    1.
    发明授权
    Vacuum monitoring apparatus 失效
    真空监测仪

    公开(公告)号:US4755669A

    公开(公告)日:1988-07-05

    申请号:US16014

    申请日:1987-02-18

    CPC分类号: G01L21/12 G01L21/00 G01L21/32

    摘要: The invention provides a wide range pressure gauge comprising a thermal-conductivity gauge and a high-vacuum total or partial pressure gauge such as a hot-cathode ionization gauge or a residual gas mass spectrometer, mounted from a common flange. In order to allow the use of a filament (3) shorter than those conventionally used in thermal conductivity pressure gauges, means (49-54) are provided to maintain the filament temperature substantially constant over its entire pressure range. Pressure is measured by means (51, 52, 56-58) adapted to measure the power dissipated in the filament (3).

    摘要翻译: 本发明提供了一种宽范围的压力计,其包括由公共凸缘安装的热导率计和高真空全压力计或分压计,例如热阴极电离计或残余气体质谱仪。 为了允许使用比传统压力计中常规使用的长丝短的长丝(3),提供装置(49-54)以在整个压力范围内保持灯丝温度基本上恒定。 通过适于测量灯丝(3)中耗散的功率的装置(51,52,56-58)来测量压力。

    Process for the manufacture of a multipolar elongate-electrode lens or
mass filter
    2.
    发明授权
    Process for the manufacture of a multipolar elongate-electrode lens or mass filter 失效
    用于制造多极细长电极透镜或质量过滤器的方法

    公开(公告)号:US5384461A

    公开(公告)日:1995-01-24

    申请号:US140195

    申请日:1994-02-03

    IPC分类号: H01J9/14 H01J3/18 H01J49/42

    摘要: The method includes the steps of assembling one or more blanks (1) in supporting means (2, 3) so that the or each blank occupies at least the space to be occupied by elongate electrodes and, without disturbing the position of the blanks relative to said supporting means, removing material from all said blanks to generate said electrodes in position in said supporting means. Preferably the material is removed by an electrode-discharge machining (EDM) process, e.g. diesinking. The method avoids time-consuming alignment of preformed electrodes in said supporting means.

    摘要翻译: PCT No.PCT / GB92 / 00835 Sec。 371日期:1994年2月3日 102(e)日期1994年2月3日PCT提交1992年5月8日PCT公布。 WO92 / 21141 PCT出版物 该方法包括以下步骤:将一个或多个坯件(1)组装在支撑装置(2,3)中,使得所述或每个坯件至少占据由细长电极占据的空间,并且不受干扰 坯件相对于所述支撑装置的位置,从所有所述坯料上去除材料,以在所述支撑装置中产生所述电极就位。 优选地,通过电极放电加工(EDM)工艺,例如, 沉没 该方法避免了所述支撑装置中预成型电极的耗时对准。