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公开(公告)号：US09028704B2
公开(公告)日：2015-05-12
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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2.发明授权公开(公告)号：US09012046B2
公开(公告)日：2015-04-21
申请号：US13294130
申请日：2011-11-10
CPC分类号： G11B5/855 , G11B5/7325
摘要： According to one embodiment, a magnetic recording medium is formed by performing gas ion irradiation by using a magnetism deactivating gas on a stack including a perpendicular magnetic recording layer, an Ru nonmagnetic underlayer containing a magnetism deactivating element selected from chromium, titanium, and silicon, and a nonmagnetic substrate. Before gas ion irradiation, the perpendicular magnetic recording layer contains platinum and at least one of iron and cobalt. Gas ion irradiation is performed using nitrogen gas alone or a gas mixture of nitrogen gas and at least one gas selected from the group consisting of helium, hydrogen, and B2H6.
摘要翻译： 根据一个实施例，通过在包括垂直磁记录层，含有选自铬，钛和硅的磁性去活化元素的Ru非磁性底层的堆叠上使用磁性去活化气体进行气体离子照射来形成磁记录介质， 和非磁性基板。 在气体离子照射之前，垂直磁记录层含有铂和至少一种铁和钴。 使用单独的氮气或氮气和选自由氦，氢和B2H6组成的组中的至少一种气体的气体混合物进行气体离子照射。
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公开(公告)号：US08551348B2
公开(公告)日：2013-10-08
申请号：US12548374
申请日：2009-08-26
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： A magnetic recording medium has magnetic patterns formed of a patterned ferromagnetic layer, and a non-magnetic layer including a component of the ferromagnetic layer and separating the magnetic patterns, in which a thickness “a” of the non-magnetic layer and a thickness “b” of the magnetic patterns satisfy a relationship of: a
摘要翻译： 磁记录介质具有由图案化的铁磁层形成的磁图案和包含铁磁性层的成分的非磁性层，并分离磁性图案，其中非磁性层的厚度“a”和厚度“ 磁性图案的“b”满足以下关系：a
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4.发明申请公开(公告)号：US20130182351A1
公开(公告)日：2013-07-18
申请号：US13553692
申请日：2012-07-19
摘要： A perpendicular magnetic recording medium according to an embodiment includes a substrate and perpendicular magnetic recording layer. The perpendicular magnetic recording layer includes a recording portion and non-recording portion. The recording portion has patterns regularly arranged in the longitudinal direction, and includes magnetic layers containing Fe or Co and Pt as main components, and at least one additive component selected from Ti, Si, Al, and W. The non-recording portion includes oxide layers formed by oxidizing the side surfaces of the magnetic layers, and nonmagnetic layers formed between the oxide layers.
摘要翻译： 根据实施例的垂直磁记录介质包括基板和垂直磁记录层。 垂直磁记录层包括记录部分和非记录部分。 记录部分具有沿纵向方向规则排列的图案，并且包括含有Fe或Co和Pt作为主要成分的磁性层和至少一种选自Ti，Si，Al和W的添加剂组分。非记录部分包括氧化物 通过氧化磁性层的侧表面形成的层以及形成在氧化物层之间的非磁性层。
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公开(公告)号：US20130065083A1
公开(公告)日：2013-03-14
申请号：US13541359
申请日：2012-07-03
CPC分类号： G11B5/855 , G11B5/3163
摘要： According to at least one embodiment, a metal peelable layer and a mask layer are formed on a magnetic recording layer, then, a projections pattern is formed on the mask layer, the projections pattern is transferred to the metal peelable layer and the magnetic recording layer in this order, and then the metal peelable layer is dissolved and removed by a solvent. The metal peelable layer is constituted of any of aluminum and an aluminum compound. An alkali solution is used as the solvent.
摘要翻译： 根据至少一个实施例，在磁记录层上形成金属可剥离层和掩模层，然后在掩模层上形成突起图案，将突起图案转印到金属剥离层和磁记录层 然后将金属可剥离层溶解并通过溶剂除去。 金属剥离层由铝和铝化合物中的任一种构成。 使用碱溶液作为溶剂。
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6.发明授权Patterned media and method of manufacturing the same, and magnetic recording apparatus 有权图案化介质及其制造方法以及磁记录装置公开(公告)号：US08257560B2
公开(公告)日：2012-09-04
申请号：US12805471
申请日：2010-08-02
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度 交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系： 深度Da大于深度Db。
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7.发明申请公开(公告)号：US20120052328A1
公开(公告)日：2012-03-01
申请号：US13166718
申请日：2011-06-22
CPC分类号： B44C1/22 , G11B5/746 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a method of manufacturing a patterned medium includes forming an implantation depth-adjusting layer above a magnetic recording layer, the magnetic recording layer being made of a material that is deactivated when implanted with a chemical species, and the implantation depth-adjusting layer being made of a material that is etched when irradiated with an ion beam of the chemical species and irradiating the implantation depth-adjusting layer with the ion beam to implant the chemical species into a part of the magnetic recording layer through the implantation depth-adjusting layer while etching the implantation depth-adjusting layer by an action of the ion beam to decrease a thickness of the implantation depth-adjusting laver.
摘要翻译： 根据一个实施例，制造图案化介质的方法包括在磁记录层上形成注入深度调节层，所述磁记录层由在注入化学物质时失活的材料制成， 所述调整层由当被所述化学物质的离子束照射时被蚀刻的材料制成，并且用所述离子束照射所述注入深度调节层，以通过所述植入深度调制层将所述化学物质注入到所述磁记录层的一部分中， 同时通过离子束的作用蚀刻植入深度调节层，以减小植入深度调节紫菜的厚度。
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公开(公告)号：US08057689B2
公开(公告)日：2011-11-15
申请号：US12705490
申请日：2010-02-12
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂，将压模压印到抗蚀剂上，以将凹凸图案转印到抗蚀剂上， 通过第一蚀刻气体去除残留在图案化抗蚀剂的凹部中的残留物，利用第一蚀刻气体，使用图案化抗蚀剂作为掩模蚀刻第二硬掩模，以将图案转移到第二硬掩模，蚀刻第一 通过不同于使用第二硬掩模的第一蚀刻气体作为掩模的第二蚀刻气体将硬掩模转印到第一硬掩模，并且执行离子束蚀刻以使暴露在凹部中的磁记录层失活 并移除第二个硬掩模。
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9.发明授权公开(公告)号：US08017023B2
公开(公告)日：2011-09-13
申请号：US12882113
申请日：2010-09-14
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。
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10.发明申请METHOD OF MANUFACTURING DISCRETE TRACK RECORDING MEDIUM AND DISCRETE TRACK RECORDING MEDIUM 审中-公开分离轨迹记录介质和分离轨迹记录介质的制造方法公开(公告)号：US20110165438A1
公开(公告)日：2011-07-07
申请号：US13048017
申请日：2011-03-15
IPC分类号： G11B5/00
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.
摘要翻译： 根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或 更多次，使基板在其平面内以小于一转的角度旋转。
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