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    PHASE MASK AND METHOD OF FABRICATION
    4.
    发明申请
    PHASE MASK AND METHOD OF FABRICATION 审中-公开
    相位掩模和制造方法

    公开(公告)号：US20110229806A1

    公开(公告)日：2011-09-22

    申请号：US13054363

    申请日：2009-07-16

    申请人： Yuankun Lin ,  Karen Lozano ,  Ahmad Harb ,  Daniel Rodriguez Ponce

    发明人： Yuankun Lin ,  Karen Lozano ,  Ahmad Harb ,  Daniel Rodriguez Ponce

    IPC分类号： G03F1/00

    CPC分类号： G03F7/70408 ,  B82Y20/00 ,  G02B6/1225 ,  G02B6/138 ,  G03F7/2032

    摘要： A method of fabricating a two-layer phase mask comprises subjecting a photoresist material to two overlapping laser beams that create light and dark fringes in the overlapping beam regions. The photoresist can comprise a liquid crystal and a photo-sensitive material, including, for example, a photo-sensitive monomer and/or polymer. The two laser beams can be first directed towards one side of the photoresist. In the areas subjected to lighter fringes, the polymer molecules can link together and force the liquid crystal into the areas subjected to the darker fringes. This can leave an alternating pattern of linear strips of polymer-rich and liquid crystal-rich regions. The exposure time can be limited so that the strips are formed only partially through the thickness of the photoresist. The photoresist can be then rotated 90 degrees and the overlapping laser beams directed towards the opposite side of the photoresist. Alternating strips of polymer-rich and liquid crystal-rich regions can be formed that extend partially through the photoresist. These strips can be arranged orthogonally to the strips formed on the opposite side of the photoresist. The material in liquid crystal-rich regions can be washed out when the photoresist is developed. A two-layer, integrated phase mask can therefore be produced. Exemplary methods eliminate the need for complicated alignment techniques.

    摘要翻译： 制造双层相位掩模的方法包括将光致抗蚀剂材料经受两个重叠的激光束，其在重叠光束区域中产生光和黑条纹。 光致抗蚀剂可以包括液晶和感光材料，包括例如光敏单体和/或聚合物。 两个激光束可以首先指向光致抗蚀剂的一侧。 在较浅条纹的区域中，聚合物分子可以连接在一起并将液晶强制到经受较暗条纹的区域中。 这可以留下富含聚合物和富含液晶的区域的线性条带的交替图案。 可以限制曝光时间，使得条仅部分地通过光致抗蚀剂的厚度形成。 然后光致抗蚀剂可以旋转90度，并且重叠的激光束指向光致抗蚀剂的相对侧。 可以形成富含聚合物和富含液晶的区域的交替条带，其部分地延伸穿过光致抗蚀剂。 这些条可以与形成在光致抗蚀剂的相反侧上的条带正交布置。 当光致抗蚀剂显影时，液晶丰富区域中的材料可以被洗掉。 因此可以制造两层集成的相位掩模。 示例性的方法消除了对复杂对准技术的需要。

    Oriented nanofibers embedded in polymer matrix
    7.
    发明申请
    Oriented nanofibers embedded in polymer matrix 审中-公开
    嵌入聚合物基质中的定向纳米纤维

    公开(公告)号：US20060047052A1

    公开(公告)日：2006-03-02

    申请号：US10149216

    申请日：2000-12-07

    申请人： Enrique Barrera ,  Fernando Rodriguez-Macias ,  Karen Lozano ,  Luis Chibante ,  David Stewart

    发明人： Enrique Barrera ,  Fernando Rodriguez-Macias ,  Karen Lozano ,  Luis Chibante ,  David Stewart

    IPC分类号： C08K3/04

    CPC分类号： D01F6/06 ,  B29C48/37 ,  B29C48/92 ,  B33Y70/00 ,  B82Y30/00 ,  C08K3/04 ,  C08K7/04 ,  C08K7/06 ,  C08K7/24 ,  C08K2201/011 ,  D01F1/10 ,  D01F6/04 ,  Y10T428/13 ,  Y10T428/249934 ,  Y10T428/249948 ,  Y10T428/249986 ,  Y10T428/2929 ,  Y10T428/31855 ,  Y10T442/30

    摘要： A method of forming a composite of embedded nanofibers in a polymer matrix is disclosed. The method includes incorporating nanofibers in a plastic matrix forming agglomerates, and uniformly distributing the nanofibers by exposing the agglomerates to hydrodynamic stresses. The hydrodynamic said stresses force the agglomerates to break apart. In combination or additionally elongational flow is used to achieve small diameters and alignment. A nanofiber reinforced polymer composite system is disclosed. The system includes a plurality of nanofibers that are embedded in polymer matrices in micron size fibers. A method for producing nanotube continuous fibers is disclosed. Nanofibers are fibrils with diameters 100 nm, multiwall nanotubes, single wall nanotubes and their various functionalized and derivatized forms. The method includes mixing a nanofiber in a polymer; and inducing an orientation of the nanofibers that enables the nanofibers to be used to enhance mechanical, thermal and electrical properties. Orientation is induced by high shear mixing and elongational flow, singly or in combination. The polymer may be removed from said nanofibers, leaving micron size fibers of aligned nanofibers.

    摘要翻译： 公开了一种在聚合物基体中形成嵌入的纳米纤维的复合材料的方法。 该方法包括将纳米纤维纳入形成团块的塑料基质中，并通过将附聚物暴露于流体动力学应力来均匀分布纳米纤维。 流体动力学的所述应力使附聚物分裂。 组合或附加伸长流用于实现小直径和对准。 公开了纳米纤维增强聚合物复合体系。 该系统包括嵌入在微米尺寸纤维中的聚合物基质中的多个纳米纤维。 公开了一种生产纳米管连续纤维的方法。 纳米纤维是直径为100nm的原纤维，多壁纳米管，单壁纳米管及其各种官能化和衍生形式。 该方法包括将纳米纤维混合在聚合物中; 并诱导使纳米纤维能够用于增强机械，热和电性质的纳米纤维的取向。 通过高剪切混合和伸长流，单独或组合诱导取向。 可以从所述纳米纤维中除去聚合物，留下对准的纳米纤维的微米尺寸的纤维。