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12 条记录 (耗时 0.021 秒)

    Wafer for magnetic head and method for manufacturing the same
    1.
    发明授权
    Wafer for magnetic head and method for manufacturing the same 有权
    磁头用晶片及其制造方法

    公开(公告)号：US08570685B1

    公开(公告)日：2013-10-29

    申请号：US13448782

    申请日：2012-04-17

    申请人： Katsuya Kanakubo ,  Kenji Senga

    发明人： Katsuya Kanakubo ,  Kenji Senga

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3173 ,  G11B5/1278 ,  G11B5/3116

    摘要： A wafer for a magnetic head includes a magnetic pole which has a design capable of avoiding pole missing due to processing with an improved resistance to the processing during a magnetic pole forming process. Each magnetic head element provided in the wafer has a recording magnetic pole film. The magnetic pole film has a large width part, a small width part and a support part. The small width part projects continuously from the large width part and extends with a constant width W1, while the support part is continuous with an end of the small width part and has a width W2. The width W1 and the width W2 satisfy the relationship of 1

    摘要翻译： 用于磁头的晶片包括磁极，该磁极具有能够避免由于在磁极形成处理期间具有改进的对加工的抵抗力的处理而引起的极点缺失的设计。 设置在晶片中的每个磁头元件具有记录磁极膜。 磁极膜具有宽的宽度部分，宽度小的部分和支撑部分。 小宽度部分从大宽度部分连续突出并以一定宽度W1延伸，而支撑部分与小宽度部分的端部连续并具有宽度W2。 宽度W1和宽度W2满足1

    Magnetoresistive effect thin-film magnetic head and manufacturing method of magnetoresistive effect thin-film magnetic head
    2.
    发明授权
    Magnetoresistive effect thin-film magnetic head and manufacturing method of magnetoresistive effect thin-film magnetic head 失效
    磁阻效应薄膜磁头及磁阻效应薄膜磁头的制造方法

    公开(公告)号：US07141508B2

    公开(公告)日：2006-11-28

    申请号：US10212744

    申请日：2002-08-07

    申请人： Katsuya Kanakubo ,  Yoshimitsu Wada ,  Kazuhiro Hattori

    发明人： Katsuya Kanakubo ,  Yoshimitsu Wada ,  Kazuhiro Hattori

    IPC分类号： H01L21/302

    CPC分类号： G11B5/39

    摘要： A manufacturing method of an MR thin-film magnetic head with an MR film and lead conductors overlapping each other, includes a step of depositing a conductor layer on at least the magnetoresistive effect film, a step of forming a cap layer patterned on the deposited conductor layer, and a step of dry-etching the deposited conductor layer through a mask of the patterned cap layer using an Ar gas and an O2 gas, an O2 gas or a N2 gas so as to pattern the deposited conductor film to form the lead conductors.

    摘要翻译： 具有MR膜和引线导体彼此重叠的MR薄膜磁头的制造方法包括在至少磁阻效应膜上沉积导体层的步骤，在沉积导体上形成图案化的盖层的步骤 层，以及使用Ar气和O 2气体，O 2气体或通过图案化的盖层的掩模使沉积的导体层干蚀刻沉积的导电层的步骤 N 2气体，以便对沉积的导体膜进行图案化以形成引线导体。

    Method of manufacturing thin film magnetic head
    4.
    发明授权
    Method of manufacturing thin film magnetic head 有权
    制造薄膜磁头的方法

    公开(公告)号：US06329211B1

    公开(公告)日：2001-12-11

    申请号：US09405005

    申请日：1999-09-27

    申请人： Koichi Terunuma ,  Tetsuya Mino ,  Katsuya Kanakubo ,  Osamu Matsuda

    发明人： Koichi Terunuma ,  Tetsuya Mino ,  Katsuya Kanakubo ,  Osamu Matsuda

    IPC分类号： G11B531

    CPC分类号： G11B5/3967 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  Y10T29/49046

    摘要： A first magnetic film to constitute a first yoke part and a first pole part is formed in a given pattern on a substrate, and a write gap film is formed on the part corresponding to the first pole portion of the first magnetic film. Then, a second magnetic film having a second pole portion and a second yoke part is formed on the write gap film by a photolithography so that the second pole portion can have a width of 1.5-2.5 &mgr;m. Thereafter, the sides of the second pole portion are etched by an ion beam etching method to narrow its width, and the write gap film is removed by using, as a mask, the second pole portion to expose the first magnetic film. Subsequently, the exposed first magnetic film is partially removed to form the first pole portion and thereby a thin film magnetic head having a pole portion with a track width of not more than 1 &mgr;m beyond the limit of the photolithography is produced.

    摘要翻译： 构成第一磁轭部的第一磁性膜和第一磁极部以给定的图案形成在基板上，并且在与第一磁性膜的第一极部相对应的部分上形成写入间隙膜。 然后，通过光刻法在写间隙膜上形成具有第二极部分和第二磁轭部分的第二磁性膜，使得第二极部分可以具有1.5-2.5μm的宽度。 此后，通过离子束蚀刻方法蚀刻第二极部分的侧面以使其宽度变窄，并且通过使用第二极部来暴露第一磁性膜来去除写入间隙膜作为掩模。 随后，暴露的第一磁性膜被部分去除以形成第一极部，由此产生具有超过光刻极限的磁道宽度不超过1μm的磁极部分的薄膜磁头。

    WAFER FOR MAGNETIC HEAD AND METHOD FOR MANUFACTURING THE SAME
    5.
    发明申请
    WAFER FOR MAGNETIC HEAD AND METHOD FOR MANUFACTURING THE SAME 有权
    用于制造磁头的方法及其制造方法

    公开(公告)号：US20130271872A1

    公开(公告)日：2013-10-17

    申请号：US13448782

    申请日：2012-04-17

    申请人： Katsuya KANAKUBO ,  Kenji Senga

    发明人： Katsuya KANAKUBO ,  Kenji Senga

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3173 ,  G11B5/1278 ,  G11B5/3116

    摘要： A wafer for a magnetic head includes a magnetic pole which has a design capable of avoiding pole missing due to processing with an improved resistance to the processing during a magnetic pole forming process. Each magnetic head element provided in the wafer has a recording magnetic pole film. The magnetic pole film has a large width part, a small width part and a support part. The small width part projects continuously from the large width part and extends with a constant width W1, while the support part is continuous with an end of the small width part and has a width W2. The width W1 and the width W2 satisfy the relationship of 1

    摘要翻译： 用于磁头的晶片包括磁极，该磁极具有能够避免由于在磁极形成处理期间具有改进的对加工的抵抗力的处理而引起的极点缺失的设计。 设置在晶片中的每个磁头元件具有记录磁极膜。 磁极膜具有宽的宽度部分，宽度小的部分和支撑部分。 小宽度部分从大宽度部分连续突出并以一定宽度W1延伸，而支撑部分与小宽度部分的端部连续并具有宽度W2。 宽度W1和宽度W2满足1

    Method of manufacturing thin film magnetic head
    7.
    发明授权
    Method of manufacturing thin film magnetic head 失效

    公开(公告)号：US07067066B2

    公开(公告)日：2006-06-27

    申请号：US10678312

    申请日：2003-10-06

    申请人： Yoshitaka Sasaki ,  Atsushi Iijima ,  Seiji Yari ,  Katsuya Kanakubo

    发明人： Yoshitaka Sasaki ,  Atsushi Iijima ,  Seiji Yari ,  Katsuya Kanakubo

    IPC分类号： B44C1/22 ,  G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49052

    摘要： A method of manufacturing a thin-film magnetic head allowing dimension control of the width of the magnetic pole and reduction of the time required for formation is provided. A layer of iron nitride formed by sputtering is selectively etched with the RIE to form a top pole tip. In this etching process with RIE, chlorine-type gas is selected as a gas seed for etching, and the process temperature is in a range of 50° C. to 300° C. Subsequently, using part of a first mask and a tip portion of the top pole tip as a mask, part of both the write gap layer and the second bottom pole are etched with the RIE similarly to the above process, to thereby form a magnetic pole. The etching conditions are optimized by performing the process with the RIE under the above conditions, so that both of the top pole tip and the magnetic pole can be formed with high precision, and that the time required for forming both of these elements can be significantly reduced.

    Thin film magnetic head including a first pole portion having a depressed portion for receiving a coil
    8.
    发明授权
    Thin film magnetic head including a first pole portion having a depressed portion for receiving a coil 失效
    薄膜磁头包括具有用于接收线圈的凹陷部分的第一极部分

    公开(公告)号：US06466415B1

    公开(公告)日：2002-10-15

    申请号：US09604794

    申请日：2000-06-28

    申请人： Koichi Terunuma ,  Tetsuya Mino ,  Katsuya Kanakubo ,  Noriyuki Ito

    发明人： Koichi Terunuma ,  Tetsuya Mino ,  Katsuya Kanakubo ,  Noriyuki Ito

    IPC分类号： G11B523

    CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3909 ,  G11B5/3967

    摘要： The invention provides a thin film magnetic head including a first pole portion having depressed portion that is formed therein. The depressed portion descends, backward within the first pole portion, at a first inclination angle &thgr;1 from a first inclination starting point P1. Then, an insulating film is filled up in the depressed portion so that it can be located up to the upper side of the surface of the first pole and have an inclined surface in the side of a medium opposing surface. Additionally, a first magnetic film of a second pole portion can have a larger saturated magnetic flux density than a second magnetic film of the second pole portion, and can include an inclined portion with a second inclination angle &thgr;2 from a second inclination starting point P2.

    摘要翻译： 本发明提供一种薄膜磁头，其包括形成有凹部的第一极部。 凹陷部分在第一极部分内以与第一倾斜起始点P1成第一倾斜角θ1下降。 然后，在凹部中填充绝缘膜，使得其可以位于第一极的表面的上侧，并且在介质相对表面的侧面具有倾斜表面。 此外，第二极部的第一磁性膜可以具有比第二极部的第二磁性膜更大的饱和磁通密度，并且可以包括从第二倾斜起点P2起的第二倾斜角θ2的倾斜部。