METAL PATTERN FORMING METHOD
    1.
    发明申请
    METAL PATTERN FORMING METHOD 失效
    金属图案形成方法

    公开(公告)号:US20070218695A1

    公开(公告)日:2007-09-20

    申请号:US11686834

    申请日:2007-03-15

    IPC分类号: H01L21/302 H01L21/461

    摘要: A method of forming a metal pattern comprising forming a metal film having a lower layer made of a metal and an upper layer made of a metal different from the metal of the lower layer, forming a resist film having a predetermined pattern on the upper layer, and patterning the metal film by etching the metal film using the resist film as a mask. Here, patterning the metal film comprises etching the upper layer, immersing the resist film and the upper layer in a pretreatment liquid containing a nonionic surfactant after the first etching process, and etching the lower layer after the immersing process.

    摘要翻译: 一种形成金属图案的方法,包括形成具有由金属制成的下层的金属膜和由与下层金属不同的金属制成的上层的金属膜,在上层形成具有预定图案的抗蚀剂膜, 并通过使用抗蚀剂膜作为掩模蚀刻金属膜来图案化金属膜。 这里,图案化金属膜包括蚀刻上层,在第一蚀刻工艺之后将抗蚀剂膜和上层浸入含有非离子表面活性剂的预处理液中,并在浸渍处理之后蚀刻下层。

    Metal pattern forming method
    2.
    发明授权
    Metal pattern forming method 失效
    金属图案形成方法

    公开(公告)号:US07524432B2

    公开(公告)日:2009-04-28

    申请号:US11686834

    申请日:2007-03-15

    IPC分类号: H01L21/302

    摘要: A method of forming a metal pattern comprising forming a metal film having a lower layer made of a metal and an upper layer made of a metal different from the metal of the lower layer, forming a resist film having a predetermined pattern on the upper layer, and patterning the metal film by etching the metal film using the resist film as a mask. Here, patterning the metal film comprises etching the upper layer, immersing the resist film and the upper layer in a pretreatment liquid containing a nonionic surfactant after the first etching process, and etching the lower layer after the immersing process.

    摘要翻译: 一种形成金属图案的方法,包括形成具有由金属制成的下层的金属膜和由与下层金属不同的金属制成的上层的金属膜,在上层形成具有预定图案的抗蚀剂膜, 并通过使用抗蚀剂膜作为掩模蚀刻金属膜来图案化金属膜。 这里,图案化金属膜包括蚀刻上层,在第一蚀刻工艺之后将抗蚀剂膜和上层浸入含有非离子表面活性剂的预处理液中,并在浸渍处理之后蚀刻下层。

    Punch for forging a liquid ejection head
    5.
    发明授权
    Punch for forging a liquid ejection head 失效
    冲压用于锻造液体喷头

    公开(公告)号:US07040134B2

    公开(公告)日:2006-05-09

    申请号:US10644898

    申请日:2003-08-21

    IPC分类号: B21D28/10

    摘要: A male die for forming a member incorporated in a liquid ejection head is disclosed. Each of a plurality of first forging punches is operable to form a first recess on a metal plate. The first forging punches are arranged at a fixed pitch to form a punch row in a first direction. Each of a plurality of second forging punches is operable to form a second recess on the metal plate. The second forging punches are arranged adjacently to first forging punches located at both ends of the punch row. The first recess is to be a first part of the member which is used to eject liquid from the liquid ejection head, and the second recess is to be a second part of the member which is not used to eject liquid.

    摘要翻译: 公开了用于形成结合在液体喷射头中的构件的阳模。 多个第一锻造冲头中的每一个可操作以在金属板上形成第一凹部。 第一锻造冲头以固定间距布置以​​在第一方向上形成冲头排。 多个第二锻造冲头中的每一个可操作以在金属板上形成第二凹部。 第二锻造冲头相邻于位于冲头排两端的第一锻造冲头。 第一凹槽是用于从液体喷射头喷射液体的构件的第一部分,第二凹部将是不用于喷射液体的构件的第二部分。

    Fine forging method, manufacturing method of liquid ejection head, and liquid ejection head
    7.
    发明申请
    Fine forging method, manufacturing method of liquid ejection head, and liquid ejection head 有权
    精细锻造方法,液体喷射头的制造方法和液体喷射头

    公开(公告)号:US20050188736A1

    公开(公告)日:2005-09-01

    申请号:US11031353

    申请日:2005-01-10

    摘要: An object is to provide a fine forging method for forming partitions of recesses precisely and forming recess shapes for pressure generation chambers etc. with high accuracy as well as a liquid ejection head that is produced by using the fine forming method. A fine forging method for forming groove-shaped recesses that are arranged at a prescribed pitch. After groove-shaped recesses are formed tentatively in a material plate by a first punch in which tentative forming punches are arranged, finish forming is performed on the tentatively formed groove-shaped recesses by using a second punch in which finish forming punches are arranged. An end portion of a projection strip is formed with slant faces or a slant face, whereby an end portion of each groove-shaped recess is formed precisely. A liquid ejection head produced by the above method exhibits stable liquid ejection characteristics and its manufacturing cost can be reduced by virtue of simplified working of forging.

    摘要翻译: 本发明的目的是提供一种用于精确地形成凹部的凹槽并且以高精度形成用于压力产生室等的凹部形状的精细锻造方法以及通过使用精细成形方法制造的液体喷射头。 一种精细的锻造方法,用于形成以规定间距排列的槽形凹部。 在通过布置有暂时形成冲头的第一冲头在材料板中暂时形成凹槽形凹部之后,通过使用布置有精加工冲头的第二冲头对临时形成的凹槽形凹槽进行精加工。 突起条的端部形成有斜面或倾斜面,由此精确地形成每个凹槽形凹部的端部。 通过上述方法制造的液体喷射头具有稳定的液体喷射特性,并且可以通过简化的锻造加工来降低制造成本。

    Forging punch, minute forging method using the same, and method of manufacturing liquid ejection head using the same
    10.
    发明申请
    Forging punch, minute forging method using the same, and method of manufacturing liquid ejection head using the same 失效
    使用其的锻造冲头,分钟锻造方法以及使用其的液体喷射头的制造方法

    公开(公告)号:US20060101887A1

    公开(公告)日:2006-05-18

    申请号:US11287422

    申请日:2005-11-28

    IPC分类号: B21D31/02

    摘要: There is disclosed a punch for forging a metallic plate member. A first die is adapted to be opposed to a first face of the plate member. A second die is adapted to be opposed to a second face of the plate member. A plurality of first projections are provided on the first die and arranged in a first direction with a fixed pitch. Each of the first projections is elongated in a second direction perpendicular to the first direction. A plurality of second projections are provided on the second die and arranged in the first direction with the fixed pitch. Each of the second projections is elongated in the second direction and provided with a concave portion extending in the second direction at a distal end portion thereof. The plate member is sandwiched between the first die and the second die so that the first projections and the second projections are cut into the plate member in a third direction orthogonal to the first direction and the second direction, to perform a first forging work.

    摘要翻译: 公开了一种用于锻造金属板构件的冲头。 第一模具适于与板构件的第一面相对。 第二模具适于与板构件的第二面相对。 多个第一突起设置在第一管芯上,并以固定间距沿第一方向布置。 每个第一突起在垂直于第一方向的第二方向上伸长。 多个第二突起设置在第二管芯上,并以固定间距沿第一方向布置。 每个第二突起在第二方向上是细长的,并且在其远端部分设置有在第二方向上延伸的凹部。 板构件被夹在第一模具和第二模具之间,使得第一突起和第二突起在与第一方向和第二方向正交的第三方向上被切割成板构件,以进行第一锻造。