公开(公告)号：US20070278177A1

公开(公告)日：2007-12-06

申请号：US11809518

申请日：2007-06-01

申请人： Kazushige Kondo ,  Masatoshi Yasutake ,  Takuya Nakaue ,  Osamu Takaoka ,  Atsushi Uemoto ,  Kazutoshi Watanabe ,  Yoshiteru Shikakura

发明人： Kazushige Kondo ,  Masatoshi Yasutake ,  Takuya Nakaue ,  Osamu Takaoka ,  Atsushi Uemoto ,  Kazutoshi Watanabe ,  Yoshiteru Shikakura

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68

CPC分类号： C03C19/00 ,  B82Y10/00 ,  G01Q80/00

摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.

摘要翻译： 通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲 当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视 重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。 在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。

公开(公告)号：US20070015335A1

公开(公告)日：2007-01-18

申请号：US10546989

申请日：2004-02-16

申请人： Takayuki Hoshino ,  Shinji Matsui ,  Kazushige Kondo

发明人： Takayuki Hoshino ,  Shinji Matsui ,  Kazushige Kondo

IPC分类号： H01L21/20

CPC分类号： C23C16/047

摘要： It is provided a production method of a free-space-wiring and a production apparatus thereof, enabling to fabricate the free-space-wiring in the nm order. The free-space-wiring (3) is fabricated using a CVD process by irradiating a beam based on three-dimensional positional data as well as an irradiation position, an irradiation direction and irradiation time of the beam prestored in a computer-controlled drawing device (9) to utilize a beam excitation reaction.

摘要翻译： 提供了一种自由空间布线的制造方法及其制造装置，能够以nm级制造自由空间布线。 基于三维位置数据照射光束以及预先存储在计算机控制的绘图装置中的光束的照射位置，照射方向和照射时间，使用CVD工艺制造自由空间布线（3） （9）利用光束激发反应。

公开(公告)号：US20060292709A1

公开(公告)日：2006-12-28

申请号：US10546988

申请日：2004-02-16

申请人： Takayuki Hoshino ,  Shinji Matsui ,  Kazushige Kondo

发明人： Takayuki Hoshino ,  Shinji Matsui ,  Kazushige Kondo

IPC分类号： H01L21/66

CPC分类号： B81C99/00 ,  B33Y50/00 ,  B33Y50/02 ,  B81C99/0095 ,  C23C16/047 ,  C23C16/4418 ,  H01J37/3056 ,  H01J2237/30411

摘要： There are provided a fabrication method of a nanostructure by FIB-CVD which enables fabrication of a three-dimensional nanostructure, especially that without a support such as a terrace structure or a hollow structure, and a drawing system thereof. The three-dimensional nanostructure is fabricated by controlling a focused ion beam to determine a beam irradiation position or time based on discrete drawing data of a multilayer structure generated by calculating a cross-sectional shape divided in a vertical direction of a three-dimensional nanostructure model designed using an electronic microcomputer.

摘要翻译： 提供了一种通过FIB-CVD的纳米结构的制造方法，其能够制造三维纳米结构，特别是没有诸如露台结构或中空结构的支撑及其拉制系统。 基于通过计算在三维纳米结构模型的垂直方向上划分的横截面形状而生成的多层结构的离散绘图数据，通过控制聚焦离子束来控制聚焦离子束来确定光束照射位置或时间来制造三维纳米结构 使用电子微机设计。