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1.发明申请公开(公告)号：US20070278177A1
公开(公告)日：2007-12-06
申请号：US11809518
申请日：2007-06-01
申请人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
发明人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.
摘要翻译： 通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲 当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视 重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。 在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。
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公开(公告)号：US07442925B2
公开(公告)日：2008-10-28
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
IPC分类号： G01N13/16
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。
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公开(公告)号：US20060219901A1
公开(公告)日：2006-10-05
申请号：US11370006
申请日：2006-03-04
申请人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
发明人： Masatoshi Yasutake , Takuya Nakaue , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto , Naoya Watanabe , Yoshiteru Shikakura
CPC分类号： G01N23/225 , G01Q60/34
摘要： The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
摘要翻译： 本发明提供一种使用扫描探针的工作方法，其可以提高工作速度并延长探针的寿命。 本发明提供了使用扫描探针的工作方法，该扫描探针通过以预定扫描速度执行支撑在样品上的悬臂上的探针的相对扫描来对样品进行工作。 该工作方法可以在100至1000Hz的低频下，以与样品的工作表面正交或平行的方向强制地相对振动探针，从而对被加工物进行加工。
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4.发明申请Method of correcting opaque defect of photomask using atomic force microscope fine processing device 有权使用原子力显微镜精细加工装置校正光掩模不透明缺陷的方法公开(公告)号：US20070281222A1
公开(公告)日：2007-12-06
申请号：US11796996
申请日：2007-04-27
申请人： Toshio Doi , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto
发明人： Toshio Doi , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto
IPC分类号： G03F1/00
摘要： An opaque defect is processed by scanning with a high load or height fixed mode using a probe harder than a pattern material of a photomask at the time of going scanning, and is observed by scanning with a low load or intermittent contact mode at the time of returning scanning so as to detect an ending point of the opaque defect by the height information. When there is a portion reaching to a glass substrate as an ending point, this portion is not scanned by the high load or height fixed mode in the next processing, and only a portion not reaching to the ending point is scanned by the high load or height fixed mode.
摘要翻译： 通过使用在扫描时比光掩模的图案材料更硬的探针，以高负载或高度固定模式进行扫描来处理不透明缺陷，并且通过在低负载或间歇接触模式下扫描来观察不透明缺陷 返回扫描，以便通过高度信息检测不透明缺陷的终点。 当到达玻璃基板的部分为终点时，在下一个处理中该部分不被高负载或高度固定模式扫描，并且只有未达到终点的部分被高负载扫描 高度固定模式。
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5.发明授权Method of correcting opaque defect of photomask using atomic force microscope fine processing device 有权使用原子力显微镜精细加工装置校正光掩模不透明缺陷的方法公开(公告)号：US07571639B2
公开(公告)日：2009-08-11
申请号：US11796996
申请日：2007-04-27
申请人： Toshio Doi , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto
发明人： Toshio Doi , Kazutoshi Watanabe , Osamu Takaoka , Atsushi Uemoto
IPC分类号： H01J37/352
摘要： An opaque defect is processed by scanning with a high load or height fixed mode using a probe harder than a pattern material of a photomask at the time of going scanning, and is observed by scanning with a low load or intermittent contact mode at the time of returning scanning so as to detect an ending point of the opaque defect by the height information. When there is a portion reaching to a glass substrate as an ending point, this portion is not scanned by the high load or height fixed mode in the next processing, and only a portion not reaching to the ending point is scanned by the high load or height fixed mode.
摘要翻译： 通过使用在扫描时比光掩模的图案材料更硬的探针，以高负载或高度固定模式进行扫描来处理不透明缺陷，并且通过在低负载或间歇接触模式下扫描来观察不透明缺陷 返回扫描，以便通过高度信息检测不透明缺陷的终点。 当到达玻璃基板的部分为终点时，在下一个处理中该部分不被高负载或高度固定模式扫描，并且只有未到达终点的部分被高负载扫描 高度固定模式。
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公开(公告)号：US07997124B2
公开(公告)日：2011-08-16
申请号：US11879878
申请日：2007-07-19
IPC分类号： G01B5/28
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.
摘要翻译： 扫描探针显微镜具有悬臂安装以在样品的表面上经历振荡运动。 悬臂在其远端具有探针。 Z轴控制量计算机构计算用于保持悬臂的振荡量恒定的控制量。 Z轴驱动机构根据来自Z轴控制量计算机构的控制量沿Z方向驱动悬臂或样本。 驱动范围限制装置限制了Z轴驱动机构的驱动范围。 驱动范围设定装置可选地设定Z轴驱动机构的驱动范围。
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公开(公告)号：US20050199046A1
公开(公告)日：2005-09-15
申请号：US11076250
申请日：2005-03-09
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope is capable of not only avoiding contact between a sample and a probe but also capable of shortening the time from detection of the sample during scanning by the probe to raising the probe to the top surface of the sample. A Z-axis controlling amount calculating mechanism controls a displacement amount of a cantilever or an oscillation amount in oscillating the cantilever so as to be constant, and a Z-axis driving mechanism drives in a Z direction the cantilever or a sample based on the controlling signal from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism, and a driving range setting device optionally sets the driving range so that the probe is lowered to a set position even in an area with no sample.
摘要翻译： 扫描探针显微镜不仅可以避免样品和探针之间的接触，而且能够缩短探针扫描期间检测样品的时间，从而将探针升高到样品的顶部表面。 Z轴控制量计算机构控制悬臂的摆动量或使悬臂摆动的摆动量恒定，Z轴驱动机构在Z方向驱动基于控制的悬臂或样本 来自Z轴控制量计算机构的信号。 驱动范围限制装置限制Z轴驱动机构的驱动范围，并且驱动范围设定装置可选地设定驱动范围，使得即使在没有样品的区域中探针也降低到设定位置。
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公开(公告)号：US07284415B2
公开(公告)日：2007-10-23
申请号：US11076250
申请日：2005-03-09
CPC分类号： G01Q30/04 , G01Q10/065
摘要： A scanning probe microscope has a cantilever having a minute probe on a distal end thereof and a displacement detecting device for detecting displacement of the cantilever. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant a displacement amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or a sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. An XY scanning mechanism relatively moves the probe in a direction of an XY plane with respect to the sample to measure an uneven shape and/or a physical characteristic of the surface of the sample. A controlling range limiting device limits a driving range of the Z-axis driving mechanism. A controlling range setting device optionally sets the driving range of the Z-axis driving mechanism.
摘要翻译： 扫描探针显微镜具有在其远端具有微小探针的悬臂和用于检测悬臂的位移的位移检测装置。 Z轴控制量计算机构计算用于保持悬臂的位移量恒定的控制量。 Z轴驱动机构根据来自Z轴控制量计算机构的控制量沿Z方向驱动悬臂或样本。 XY扫描机构使探针相对于样品相对于XY平面的方向移动，以测量样品表面的不均匀形状和/或物理特性。 控制范围限制装置限制Z轴驱动机构的驱动范围。 控制范围设定装置可选地设定Z轴驱动机构的驱动范围。
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公开(公告)号：US06596992B2
公开(公告)日：2003-07-22
申请号：US10017123
申请日：2001-12-14
申请人： Kazunori Ando , Kazutoshi Watanabe , Yoshiteru Shikakura , Masaki Tsuchihashi , Takehiro Yamaoka
发明人： Kazunori Ando , Kazutoshi Watanabe , Yoshiteru Shikakura , Masaki Tsuchihashi , Takehiro Yamaoka
IPC分类号： G21K700
CPC分类号： G01Q60/32 , G01Q10/06 , G01Q20/02 , Y10S977/851
摘要： In the first operation, the cantilever is oscillated at a frequency which is at opposite sides of a frequency band having a half value of an oscillation frequency f and amplitude A on a dependent curve (Q-curve). The cantilever oscillating frequency is far from an oscillation frequency (near a resonance point) where the cantilever is slow to damp, which enables the cantilever to quickly damp in accordance with a variation of a transient oscillation frequency after the probe comes into contact with the specimen, and allows the probe to follow the uneven surface state of the specimen.
摘要翻译： 在第一操作中，悬臂以相对曲线（Q曲线）上具有振荡频率f的一半值和振幅A的频带的相反侧的频率振荡。 悬臂振荡频率远离振动频率（接近谐振点），其中悬臂缓慢减震，这使得悬臂能够在探头与试样接触后根据瞬态振荡频率的变化迅速衰减 ，并且允许探针跟随样本的不平坦表面状态。
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公开(公告)号：US6094972A
公开(公告)日：2000-08-01
申请号：US123146
申请日：1998-07-27
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/04 , G01Q60/32 , Y10S977/851
摘要： An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.
摘要翻译： xy扫描单元产生沿着x方向的扫描信号和沿着y方向的扫描信号，其由待监视的样本的轮廓，x方向的扫描时间和x方向的像素数确定 x方向，由CPU提供。 然后，xy扫描单元将这些扫描信号沿x方向和y方向输出到压电扫描装置。 另一方面，第二振荡器输出具有由x方向的扫描时间和x方向的像素数确定的频率的正弦波信号到第二压电板。 采样/保持电路在从第二振荡器的输出变为最大之后经过预选时间之后的这样的定时保持探测器的观测数据，然后将保持的观测数据输出到差分放大器和P.I控制系统。 P.I控制系统的输出信号Q被施加到压电扫描装置的z-微细电极上，并且还通过A / D转换器转换成数字信号。 该数字信号以采样方式存储到存储器中。
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