公开(公告)号：US06214129B1

公开(公告)日：2001-04-10

申请号：US09177114

申请日：1998-10-22

申请人： Yasuyuki Nakaoka ,  Setsuo Wake ,  Kazuyuki Kan ,  Muneyuki Ishimura

发明人： Yasuyuki Nakaoka ,  Setsuo Wake ,  Kazuyuki Kan ,  Muneyuki Ishimura

IPC分类号： C23G102

CPC分类号： H01L21/02052 ,  B08B3/10 ,  H01L21/67057 ,  Y10S134/902

摘要： A cleaning method to inhibit the adhesion of micro particles to a member to be cleaned by decreasing an amount of generation of bubbles. In a method for cleaning a member to be cleaned by dipping the member into a cleaning bath to which a hydrochloric acid-hydrogen peroxide mixture comprising hydrochloric acid, hydrogen peroxide and water is supplied through a filter and a supplying port; the improvement is that a temperature of the hydrochloric acid, hydrogen peroxide mixture is controlled within the range of 20°to 45° C.

摘要翻译： 一种清洁方法，通过减少气泡产生量来抑制微粒附着到要清洗的构件上。 在通过将构件浸渍到通过过滤器和供给口供给盐酸，过氧化氢和水的盐酸 - 过氧化氢混合物的清洗浴中来清洁要清洁的构件的方法中， 改进之处在于将盐酸，过氧化氢混合物的温度控制在20〜45℃的范围内。