公开(公告)号：US5421768A

公开(公告)日：1995-06-06

申请号：US266593

申请日：1994-06-28

申请人： Yukio Fujiwara ,  Keiichi Shirai ,  Fumio Inoue

发明人： Yukio Fujiwara ,  Keiichi Shirai ,  Fumio Inoue

IPC分类号： B24B53/007 ,  B24B53/017 ,  B24B53/10 ,  G11B7/26 ,  B24B5/00 ,  B24B29/00

CPC分类号： B24B53/017 ,  G11B7/26

摘要： An abrasive cloth dresser which can efficiently remove reaction products soaked into abrasive cloths for polishing semiconductor wafers etc. without scattering the reaction products. The abrasive cloth dresser includes a rotating hollow arm shaft 7, a high-pressure pure water jetting head 8 provided at a distal end of the hollow arm shaft, and a brush hood 11 provided at a distal end of the high-pressure pure water jetting head 8 and having a brush 16 planted thereto. The high-pressure pure water jetting head 8 includes a jet nozzle 83 through which high-pressure pure water is jetted for impacting reaction products soaked into a piece of abrasive cloth 3 to come out for removal. The brush 16 is elliptical in shape, and has a planted bristle density which is lower in a brush left-hand portion 161 near the high-pressure pure water injection center IC, but higher in a brush central portion 162 and a brush right-hand portion 163. Accordingly, the spent pure water and the reaction products are caused to reside in a pure water pool area WP, following which the pure water having lost energy and the reaction products are discharged through the brush left-hand portion 161 without scattering to the surroundings.

摘要翻译： 一种研磨布修整器，其可以有效地去除浸入研磨布中的反应产物，以抛光半导体晶片等而不散射反应产物。 研磨布修整器包括旋转的中空臂轴7，设置在中空臂轴的远端处的高压纯水喷射头8和设置在高压纯水喷射器的远端处的刷罩11 头部8并具有种植在其上的刷子16。 高压纯水喷射头8包括喷射喷嘴83，通过喷射喷嘴83喷射高压纯水以冲击浸入一块研磨布3中的反应产物，以便排出以除去。 刷子16的形状为椭圆形，并且在高压纯水注入中心IC附近的刷子左侧部分161中具有较低的种植刷毛密度，但是在刷子中心部分162和刷子右侧更高 部分163.因此，将废水和反应产物置于纯水池区域WP中，随后将失去能量的纯水和反应产物通过刷子左手部分161排出，而不会分散到 周围环境。

公开(公告)号：US5018379A

公开(公告)日：1991-05-28

申请号：US481201

申请日：1990-02-20

申请人： Keiichi Shirai ,  Akira Kawaguchi ,  Sunao Kitazima

发明人： Keiichi Shirai ,  Akira Kawaguchi ,  Sunao Kitazima

IPC分类号： B21D51/26

CPC分类号： B21D51/2638 ,  B21D51/2615 ,  Y10S72/715

摘要： There is disclosed a method for crimping an open end of a can body. A male die is inserted into the can body through the open end in such a manner as to be coaxial therewith. Then, the female die is caused to fit on the opening end, and the female die is kept moving along the outer peripheral surface of the male die while moving the male die, inserted into the can body, in a releasing direction from the can body. Thus, the opening end is crimped by the relative movement of the male and female dies. There is also disclosed a crimping apparatus which includes at least one crimping mechanism, a holder for holding the can body at a prescribed position, a complex cam and a drive mechanism. The crimping mechanism includes male and female dies, follower members connected to the male and female dies, respectively. The cam includes first and second cam faces with which the first and second follower members are respectively held in engagement. The drive mechanism is operable to move the first and second followers along the first and second cam faces to move the first and second follower members axially of the male and female dies in a prescribed manner.