公开(公告)号：US08502966B2

公开(公告)日：2013-08-06

申请号：US13646066

申请日：2012-10-05

申请人： Kenichi Shitara ,  Hiroshi Nakajima

发明人： Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47

摘要： The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.

摘要翻译： 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中，包括用激光照射样品表面的照射装置，检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置， 反射光检测装置被配置为包括：散射光检测单元，其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。

公开(公告)号：US08294888B2

公开(公告)日：2012-10-23

申请号：US12855873

申请日：2010-08-13

申请人： Kenichi Shitara ,  Hiroshi Nakajima

发明人： Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47

摘要： The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.

摘要翻译： 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中，包括用激光照射样品表面的照射装置，检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置， 反射光检测装置被配置为包括：散射光检测单元，其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。

公开(公告)号：US08089714B2

公开(公告)日：2012-01-03

申请号：US12830008

申请日：2010-07-02

申请人： Kenichi Shitara ,  Takao Ishii

发明人： Kenichi Shitara ,  Takao Ishii

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/455 ,  G11B5/4555 ,  G11B2220/2516

摘要： An object of the present invention is to provide a deterioration detection method of a head and a magnetic disk inspection apparatus in which the number of times of exchanging the head due to deterioration is decreased to improve the throughput of an inspection. In the present invention, a resistance value detecting circuit that is directly coupled to both terminals of an MR head is provided to measure the resistance value of the MR head, and the measured value is compared with the initial value of the exchanged head, so that it is possible to recognize a deterioration state of each head irrespective of a magnetic disk as a measurement target.

摘要翻译： 本发明的目的是提供一种磁头和磁盘检查装置的劣化检测方法，其中由于劣化而使头部更换次数减少，以提高检查的生产量。 在本发明中，提供直接耦合到MR磁头的两端的电阻值检测电路，以测量MR磁头的电阻值，并将测量值与交换的磁头的初始值进行比较，使得 可以识别每个头的劣化状态，而不管作为测量对象的磁盘。

公开(公告)号：US20110188143A1

公开(公告)日：2011-08-04

申请号：US13012883

申请日：2011-01-25

申请人： Kenichi SHITARA ,  Ayumu ISHIHARA

发明人： Kenichi SHITARA ,  Ayumu ISHIHARA

IPC分类号： G11B19/04

CPC分类号： G11B19/04

摘要： In order to implement efficient read/write testing by firstly determining read/write test area-sampling positions based on position information relating to any defects detected during optical inspection, and then conducting read/write tests only upon areas neighboring the defects detected during the optical inspection, a magnetic disk to be inspected is retained on a spindle and moved under this state between an optical type of inspection apparatus and a read/write test apparatus, in which apparatus configuration the read/write test apparatus uses position information on any defects detected by the optical type of inspection apparatus and conducts read/write tests only upon neighboring areas of the defects detected by the optical type of inspection apparatus.

摘要翻译： 为了实现高效的读/写测试，首先根据与光学检测期间检测到的任何缺陷相关的位置信息确定读/写测试区域采样位置，然后仅在与光学期间检测到的缺陷相邻的区域进行读/写测试 检查中，要检查的磁盘被保持在主轴上并且在该状态下在光学类型的检查装置和读/写测试装置之间移动，其中读/写测试装置使用检测到的任何缺陷的位置信息 通过光学类型的检查装置，仅对由光学型检查装置检测到的缺陷的相邻区域进行读/写测试。

公开(公告)号：US07929232B2

公开(公告)日：2011-04-19

申请号：US12034011

申请日：2008-02-20

申请人： Kenichi Shitara ,  Haruyoshi Kato

发明人： Kenichi Shitara ,  Haruyoshi Kato

IPC分类号： G11B27/36

CPC分类号： G11B20/1816 ,  G11B20/182 ,  G11B27/36 ,  G11B2220/2516

摘要： A test burst signal is overwritten from a write end position over a connecting region determined by positional deviation between a read head and a write head and a peripheral speed of a disk. Since, therefore, the overwritten signal portion is overlapped on the test burst signal written at a write start point, it is possible to reduce a width of the connecting region to thereby reduce a test inhibit region.

摘要翻译： 测试突发信号从由读头和写头之间的位置偏差确定的连接区域上的写入终端位置和盘的圆周速度重写。 因此，由于写入写入起点的测试脉冲串信号重叠了重写的信号部分，所以可以减小连接区域的宽度，从而减少测试禁止区域。

公开(公告)号：US20110002060A1

公开(公告)日：2011-01-06

申请号：US12830008

申请日：2010-07-02

申请人： Kenichi SHITARA ,  Takao ISHII

发明人： Kenichi SHITARA ,  Takao ISHII

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/455 ,  G11B5/4555 ,  G11B2220/2516

摘要： An object of the present invention is to provide a deterioration detection method of a head and a magnetic disk inspection apparatus in which the number of times of exchanging the head due to deterioration is decreased to improve the throughput of an inspection. In the present invention, a resistance value detecting circuit that is directly coupled to both terminals of an MR head is provided to measure the resistance value of the MR head, and the measured value is compared with the initial value of the exchanged head, so that it is possible to recognize a deterioration state of each head irrespective of a magnetic disk as a measurement target.

摘要翻译： 本发明的目的是提供一种磁头和磁盘检查装置的劣化检测方法，其中由于劣化而使头部更换次数减少，以提高检查的生产量。 在本发明中，提供直接耦合到MR磁头的两端的电阻值检测电路，以测量MR磁头的电阻值，并将测量值与交换的磁头的初始值进行比较，使得 可以识别每个头的劣化状态，而不管作为测量对象的磁盘。

公开(公告)号：US20080198493A1

公开(公告)日：2008-08-21

申请号：US12034011

申请日：2008-02-20

申请人： Kenichi SHITARA ,  Haruyoshi Kato

发明人： Kenichi SHITARA ,  Haruyoshi Kato

IPC分类号： G11B27/36

CPC分类号： G11B20/1816 ,  G11B20/182 ,  G11B27/36 ,  G11B2220/2516

摘要： A test burst signal is overwritten from a write end position over a connecting region determined by positional deviation between a read head and a write head and a peripheral speed of a disk. Since, therefore, the overwritten signal portion is overlapped on the test burst signal written at a write start point, it is possible to reduce a width of the connecting region to thereby reduce a test inhibit region.

摘要翻译： 测试突发信号从由读头和写头之间的位置偏差确定的连接区域上的写入终端位置和盘的圆周速度重写。 因此，由于写入写入起点的测试脉冲串信号重叠了重写的信号部分，所以可以减小连接区域的宽度，从而减少测试禁止区域。

公开(公告)号：US20120026622A1

公开(公告)日：2012-02-02

申请号：US13188771

申请日：2011-07-22

申请人： Kenichi SHITARA ,  Takao ISHII

发明人： Kenichi SHITARA ,  Takao ISHII

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/84 ,  G11B2220/2516

摘要： In order to enable a highly-sensitive certifying test by detecting a signal with a high S/N ratio while controlling the glide height of a magnetic head to be optimized at the time of the certifying test, a method for inspecting a magnetic disk by conducting the certifying test for the magnetic disk using the magnetic head incorporating a heater includes: writing data into the magnetic disk using the magnetic head; and reading the data written into the magnetic disk using the magnetic head. Electric power applied to the heater incorporated in the magnetic head is switched between when writing the data and when reading the data.

摘要翻译： 为了通过在认证测试时控制磁头的滑动高度来控制磁头的滑动高度，通过检测具有高S / N比的信号来实现高灵敏度认证测试，通过导电来检查磁盘的方法 使用包含加热器的磁头的磁盘的认证测试包括：使用磁头将数据写入磁盘; 并使用磁头读取写入磁盘的数据。 施加到结合在磁头中的加热器的电力在写入数据和读取数据时之间切换。

公开(公告)号：US08031421B2

公开(公告)日：2011-10-04

申请号：US12788481

申请日：2010-05-27

申请人： Kenichi Shitara ,  Sumihiro Maeda

发明人： Kenichi Shitara ,  Sumihiro Maeda

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/09 ,  G11B5/455 ,  G11B5/5547

摘要： The present invention provides a method for measuring an optimum seeking time and an inspection apparatus using this method capable of measuring and setting an optimum seeking time for inspection of a magnetic disk or magnetic head. The method samples average level differences of sector-wise read signals in positive and negative domains for one round of track and detects a minimum value H and a minimum value L among these differences. The method recalculates the seeking time while changing the settling time. After writing and reading test data, calculates a deviation DEV of average levels DEV=(H−L)/(H+L). The method is adapted to obtain a minimum one of the values of settling time having measured when the deviation DEV of average levels is equal to or less than a predetermined value as an optimum settling time or an optimum seeking time.

摘要翻译： 本发明提供了一种用于测量最佳寻找时间的方法和使用该方法的检查装置，该方法能够测量和设置用于检查磁盘或磁头的最佳寻找时间。 该方法对一轮轨道的正域和负域中的扇区读信号的平均电平差进行采样，并检测这些差中的最小值H和最小值L. 该方法在改变建立时间的同时重新计算寻找时间。 在写入和读取测试数据之后，计算平均电平DEV =（H-L）/（H + L）的偏差DEV。 该方法适于获得当平均电平的偏差DEV等于或小于预定值作为最佳建立时间或最佳寻找时间时测量的建立时间值中的最小值。

公开(公告)号：US06552535B2

公开(公告)日：2003-04-22

申请号：US09962089

申请日：2001-09-26

申请人： Toshiharu Funaki ,  Shinji Honma ,  Kenichi Shitara ,  Hideki Mochiduki

发明人： Toshiharu Funaki ,  Shinji Honma ,  Kenichi Shitara ,  Hideki Mochiduki

IPC分类号： G01R3312

CPC分类号： G11B27/36 ,  G01R33/1207 ,  G11B5/012 ,  G11B20/182 ,  G11B2005/001 ,  G11B2220/20

摘要： A magnetic disk certifier includes a defect detector circuit comprising a low-pass filter for extracting a low frequency component of the read-out signal, the low frequency component containing a signal component of the error, a signal generator circuit for generating a signal having a predetermined frequency lower than the frequency of the read-out signal, a synthesizer circuit for synthesizing an output signal of the low-pass filter and the signal outputted from the signal generator circuit and a comparator for generating an error signal by comparing the synthesized signal from the synthesizer circuit with a predetermined reference level.

摘要翻译： 磁盘验证器包括缺陷检测器电路，其包括用于提取读出信号的低频分量的低通滤波器，包含误差的信号分量的低频分量，用于产生具有 预定频率低于读出信号的频率，用于合成低通滤波器的输出信号的合成器电路和从信号发生器电路输出的信号;以及比较器，用于通过比较来自 合成器电路具有预定的参考电平。