Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like
    1.
    发明授权
    Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like 有权
    包括用于扫描电子显微镜的弹性体隔膜的隔振耦合器等

    公开(公告)号:US06936826B2

    公开(公告)日:2005-08-30

    申请号:US10007484

    申请日:2001-11-07

    摘要: A coupling in a metrology system for placement between a floating inspection chamber and a fixed transfer chamber. The coupling prevents transfer of vibrations between the chambers and seals a passage between the chambers. The coupling includes a first flange attached to the inspection chamber, a second flange not in contact with the first flange and attached to the transfer chamber, and a looped diaphragm having an outer peripheral edge region secured to the first flange and an inner peripheral edge region secured to the second flange to thereby couple the flanges together and close a space between the flanges. Clamps are provided for securing the outer and inner peripheral edge regions of the diaphragm to the first and second flanges, respectively.

    摘要翻译: 用于放置在浮动检查室和固定传送室之间的计量系统中的联接器。 联接器防止腔室之间的振动传递并密封腔室之间的通道。 联接器包括附接到检查室的第一凸缘,不与第一凸缘接触并附接到传送室的第二凸缘,以及环形隔膜,其具有固定到第一凸缘的外周边缘区域和内周边缘区域 固定到第二凸缘,从而将凸缘连接在一起并且封闭凸缘之间的空间。 提供夹具以分别将隔膜的外周边缘区域和内周缘区域固定到第一和第二法兰。

    Mode discrimination apparatus
    3.
    发明授权
    Mode discrimination apparatus 失效
    模式识别装置

    公开(公告)号:US4627732A

    公开(公告)日:1986-12-09

    申请号:US714402

    申请日:1985-09-06

    CPC分类号: G01C19/667 G01P3/366

    摘要: In an optical system such as a ring laser gyroscope cavity, oscillations occur in many transverse modes. The desired modes are allowed to exist by suppressing undesired modes utilizing a light stop apparatus. One light stop is made by treating a dielectric mirror with an electron beam causing a phase change to occur to the undesired reflected waves. An alternative light stop is made by depositing an absorptive material on a dielectric mirror for absorbing some of the energy of the undesired modes. Both light stop embodiments are adjustable with respect to a laser wave in a resonant cavity.

    摘要翻译: 在诸如环形激光陀螺仪腔的光学系统中,在许多横向模式中发生振荡。 通过利用光停止装置抑制不期望的模式,允许存在所需的模式。 通过用电子束处理电介质反射镜来产生一个光停止,导致不期望的反射波发生相变。 通过在电介质镜上沉积吸收材料来吸收一些不期望的模式的能量来制造替代的光停止。 两个光停止实施例相对于谐振腔中的激光波形是可调节的。