公开(公告)号：US07508514B2

公开(公告)日：2009-03-24

申请号：US11473114

申请日：2006-06-23

申请人： Kevin J. Violette

发明人： Kevin J. Violette

IPC分类号： G01B11/00

CPC分类号： G03F7/70291 ,  G03F7/70141 ,  G03F7/70183 ,  G03F7/70258

摘要： A laser beam may be used to provide a virtual reference axis of travel for the in-axis direction of motion of lenses in a zoom assembly to be positioned during a zoom operation. The virtual reference axis is projected along the optical axis, parallel to existing mechanical lens slides. The virtual reference axis passes through an aperture on each of the lens assemblies, and is sampled by a set of optics and detectors on each of the lens assemblies. The optics and detectors are arranged such that any change in the position of a lens cell within a lens assembly relative to the virtual reference axis is sensed and corrected using a feedback signal to a positioning motor. Since the same virtual reference axis is used for each lens in the zoom assembly, each lens can be independently corrected for off-axis position errors to very high precision.

摘要翻译： 可以使用激光束来为变焦组件中的透镜的轴内运动方向提供虚拟参考轴线，以在变焦操作期间定位。 虚拟参考轴沿着光轴投影，平行于现有的机械透镜滑块。 虚拟参考轴通过每个透镜组件上的孔，并且由每组透镜组件上的一组光学元件和检测器采样。 光学和检测器被布置成使得使用反馈信号来检测和校正透镜单元相对于虚拟参考轴线的位置的任何变化。 由于对于变焦组件中的每个透镜使用相同的虚拟参考轴，因此可以将每个透镜独立地校正离轴位置误差到非常高的精度。

公开(公告)号：US07021119B2

公开(公告)日：2006-04-04

申请号：US10683271

申请日：2003-10-14

申请人： Kevin J. Violette

发明人： Kevin J. Violette

IPC分类号： G01B13/08

CPC分类号： G03F7/709 ,  G01B13/12 ,  G03F7/70341 ,  G03F7/7085 ,  G05D7/0186

摘要： An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant liquid flow and sensing a liquid mass flow rate within a bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a liquid mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.

公开(公告)号：US07472579B2

公开(公告)日：2009-01-06

申请号：US11360514

申请日：2006-02-24

申请人： Kevin J. Violette

发明人： Kevin J. Violette

IPC分类号： G01B13/08 ,  G01B13/22

CPC分类号： G03F7/70341 ,  G03F7/7085 ,  G03F7/709 ,  G05D7/0186

摘要： An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant liquid flow and sensing a liquid mass flow rate within a bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a liquid mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.

摘要翻译： 一种用于精确地检测测量探针和表面之间的非常小距离的装置和方法，更具体地涉及使用恒定液流并且感测桥内的液体质量流量以检测非常小的距离的接近传感器。 在该装置内，使用由多孔材料制成的限流器和/或缓冲器和/或液体质量流量控制器使得能够在纳米至亚纳米范围内检测非常小的距离。 另一实施例，其中接近传感器的测量通道连接到多个测量分支。

公开(公告)号：US07010958B2

公开(公告)日：2006-03-14

申请号：US10322768

申请日：2002-12-19

申请人： Boguslaw F. Gajdeczko ,  Kenneth M. Bogursky ,  Daniel N. Galburt ,  Willy M. Sander ,  Kevin J. Violette

发明人： Boguslaw F. Gajdeczko ,  Kenneth M. Bogursky ,  Daniel N. Galburt ,  Willy M. Sander ,  Kevin J. Violette

IPC分类号： G01B13/08

CPC分类号： G03F7/709 ,  G01B13/12 ,  G03F7/70341 ,  G03F7/7085 ,  G05D7/0186

摘要： An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor, and/or snubber made of porous material, and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.

摘要翻译： 一种用于精确检测测量探头和表面之间非常小距离的装置和方法，更具体地涉及使用恒定气流并感测气动桥中的质量流量以检测非常小的距离的接近传感器。 在该装置内，使用由多孔材料制成的限流器和/或缓冲器和/或质量流量控制器使得能够在纳米至亚纳米范围内检测非常小的距离。 另一实施例，其中接近传感器的测量通道连接到多个测量分支。

公开(公告)号：US07272976B2

公开(公告)日：2007-09-25

申请号：US10812098

申请日：2004-03-30

申请人： Boguslaw Gajdeczko ,  Kevin J. Violette

发明人： Boguslaw Gajdeczko ,  Kevin J. Violette

IPC分类号： G01L13/02

CPC分类号： G01L9/0072 ,  G01L9/0077

摘要： A pressure gauge includes a diaphragm having a substantially rigid outer portion and a displaceable inner portion that displaces in response to a pressure difference between first and second sides of the diaphragm. The pressure gauge further includes a sensor located proximate to the diaphragm and adapted to sense the displacement of the diaphragm inner portion. The pressure gauge further includes a monitor and control system coupled to the sensor (wired or wireless), and adapted to determine the pressure difference from the displacement of the diaphragm. The sensor and the monitor and control system can be implemented with one or more optical sensing designs, capacitive sensing designs, or other devices used to measure sub-micron displacements. For low pressure applications, such as lithography applications, the diaphragm is sensitive to pressure changes in a range of approximately 0.1 to 0.5 inches of water. The diaphragm and sensor have a relatively high bandwidth and can thus be implemented in relatively high speed applications. The invention can be implemented in, for example, lithography proximity sensing equipment and lithography topographical mapping equipment.

摘要翻译： 压力计包括具有基本上刚性的外部部分和可移动的内部部分的隔膜，该内部部分响应于隔膜的第一和第二侧之间的压差而移位。 压力计进一步包括位于隔膜附近并适于感测隔膜内部的位移的传感器。 压力计还包括耦合到传感器（有线或无线）的监视器和控制系统，并且适于确定与隔膜位移的压力差。 传感器和监视器和控制系统可以用一个或多个光学感测设计，电容式感测设计或用于测量亚微米位移的其他设备来实现。 对于低压应用，例如光刻应用，隔膜对大约0.1至0.5英寸水的范围内的压力变化敏感。 隔膜和传感器具有相对高的带宽，因此可以在相对高速的应用中实现。 本发明可以在例如光刻接近感测设备和光刻地形测绘设备中实现。

公开(公告)号：US07124624B2

公开(公告)日：2006-10-24

申请号：US11198278

申请日：2005-08-08

申请人： Boguslaw F. Gajdeczko ,  Kenneth M. Bogursky ,  Daniel N. Galburt ,  Willy M. Sander ,  Kevin J. Violette

发明人： Boguslaw F. Gajdeczko ,  Kenneth M. Bogursky ,  Daniel N. Galburt ,  Willy M. Sander ,  Kevin J. Violette

IPC分类号： G01B13/08 ,  G01B13/12

CPC分类号： G03F7/709 ,  G01B13/12 ,  G03F7/70341 ,  G03F7/7085 ,  G05D7/0186

摘要： An apparatus and method for precisely detecting very small distances between a measurement probe and a surface, and more particularly to a proximity sensor using a constant gas flow and sensing a mass flow rate within a pneumatic bridge to detect very small distances. Within the apparatus the use of a flow restrictor and/or snubber made of porous material and/or a mass flow rate controller enables detection of very small distances in the nanometer to sub-nanometer range. A further embodiment wherein a measurement channel of a proximity sensor is connected to multiple measurement branches.

摘要翻译： 一种用于精确检测测量探头和表面之间非常小距离的装置和方法，更具体地涉及使用恒定气流并感测气动桥中的质量流量以检测非常小的距离的接近传感器。 在该装置内，使用由多孔材料制成的限流器和/或缓冲器和/或质量流量控制器使得能够在纳米至亚纳米范围内检测非常小的距离。 另一实施例，其中接近传感器的测量通道连接到多个测量分支。