公开(公告)号：US06754554B2

公开(公告)日：2004-06-22

申请号：US10297985

申请日：2002-12-12

申请人： Toru Yamauchi ,  Kiminori Okada ,  Tadahito Nezu

发明人： Toru Yamauchi ,  Kiminori Okada ,  Tadahito Nezu

IPC分类号： G06F1900

CPC分类号： H01L21/67276 ,  G05B19/0428 ,  G05B2219/2208 ,  G05B2219/24119 ,  G05B2219/25156 ,  G05B2219/25209 ,  G05B2219/45031 ,  H01L21/67253 ,  Y02P90/14 ,  Y02P90/18

摘要： An interlock system can discriminate a controller in which an abnormality occurs in a control system of a semiconductor manufacturing apparatus in which a plurality of controllers are connected through a network. A processing system contains at least one processing chamber which performs a semiconductor manufacturing process. A conveyance system takes an object to be processed in and out of the processing chamber. The control system includes at least one apparatus controller, which controls the processing system and the conveyance system, and an equipment controller, which manages the apparatus controller. The apparatus controller and the equipment controller are communicably connected through a network. The apparatus controller and the equipment controller are also connected via a hard wire so as to transmit a status signal of the apparatus controller and the equipment controller to the control system so that a presence of each apparatus controller and a status of connection between the controllers can be detected without using communication through the network.

摘要翻译： 互锁系统可以区分在多个控制器通过网络连接的半导体制造装置的控制系统中发生异常的控制器。 处理系统包含执行半导体制造过程的至少一个处理室。 输送系统将处理室内的物体进行处理。 控制系统包括控制处理系统和输送系统的至少一个装置控制器和管理装置控制器的设备控制器。 设备控制器和设备控制器通过网络可通信地连接。 设备控制器和设备控制器也通过硬线连接，以将设备控制器和设备控制器的状态信号传送到控制系统，使得每个设备控制器的存在和控制器之间的连接状态可以 在不使用通过网络进行通信的情况下进行检测。