公开(公告)号：US5200745A

公开(公告)日：1993-04-06

申请号：US591515

申请日：1990-10-02

申请人： Hideo Takai ,  Hidetoshi Inagaki ,  Toru Futami

发明人： Hideo Takai ,  Hidetoshi Inagaki ,  Toru Futami

IPC分类号： G05B19/042

CPC分类号： G05B19/0421 ,  G05B2219/2231 ,  G05B2219/25156 ,  G05B2219/25158

摘要： A system and method for communicating data between a master station and a plurality of control units applicable to an automotive vehicle are disclosed in which if an echoback communication in response to a control command is not received by the master station from the selected control unit within a predetermined period of time upon issuance of a continue command or a diagnostic execution command, the controlled state of the electronic control unit is released. Furthermore, to effectively diagnose the control operation of one of the control units interactively with the operation of other control units, an interrupt command may be issued while the selected control unit continues the predetermined control operation, and the remaining control units are then initialized. A different control unit may then be selected and set to a controlled state. While the second selected control unit is in the controlled state an interrupt command may be issued, thus maintaining the second selected control unit in a controlled state. A resume command is then issued to resume communication with the first selected control unit which has been maintained in a controlled state, so that the control operation of a control unit which is affected by the operation of any one of the other control units can appropriately be diagnosed.

公开(公告)号：US20030182012A1

公开(公告)日：2003-09-25

申请号：US10297985

申请日：2002-12-12

发明人： Toru Yamauchi ,  Kiminori Okada ,  Tadahito Nezu

IPC分类号： G06F019/00 ,  H01L021/306

CPC分类号： H01L21/67276 ,  G05B19/0428 ,  G05B2219/2208 ,  G05B2219/24119 ,  G05B2219/25156 ,  G05B2219/25209 ,  G05B2219/45031 ,  H01L21/67253 ,  Y02P90/14 ,  Y02P90/18

摘要： An interlock system can discriminate a controller in which an abnormality occurs in a control system of a semiconductor manufacturing apparatus in which a plurality of controllers are connected through a network. A processing system contains at least one processing chamber which performs a semiconductor manufacturing process. A conveyance system takes an object to be processed in and out of the processing chamber. The control system includes at least one apparatus controller, which controls the processing system and the conveyance system, and an equipment controller, which manages the apparatus controller. The apparatus controller and the equipment controller are communicably connected through a network. The apparatus controller and the equipment controller are also connected via a hard wire so as to transmit a status signal of the apparatus controller and the equipment controller to the control system so that a presence of each apparatus controller and a status of connection between the controllers can be detected without using communication through the network.

摘要翻译： 互锁系统可以区分在多个控制器通过网络连接的半导体制造装置的控制系统中发生异常的控制器。 处理系统包含执行半导体制造过程的至少一个处理室。 输送系统将处理室内的物体进行处理。 控制系统包括控制处理系统和输送系统的至少一个装置控制器和管理装置控制器的设备控制器。 设备控制器和设备控制器通过网络可通信地连接。 设备控制器和设备控制器也通过硬线连接，以便将设备控制器和设备控制器的状态信号发送到控制系统，使得每个设备控制器的存在和控制器之间的连接状态可以 在不使用通过网络进行通信的情况下进行检测。

公开(公告)号：US06754554B2

公开(公告)日：2004-06-22

申请号：US10297985

申请日：2002-12-12

申请人： Toru Yamauchi ,  Kiminori Okada ,  Tadahito Nezu

发明人： Toru Yamauchi ,  Kiminori Okada ,  Tadahito Nezu

IPC分类号： G06F1900

CPC分类号： H01L21/67276 ,  G05B19/0428 ,  G05B2219/2208 ,  G05B2219/24119 ,  G05B2219/25156 ,  G05B2219/25209 ,  G05B2219/45031 ,  H01L21/67253 ,  Y02P90/14 ,  Y02P90/18

摘要： An interlock system can discriminate a controller in which an abnormality occurs in a control system of a semiconductor manufacturing apparatus in which a plurality of controllers are connected through a network. A processing system contains at least one processing chamber which performs a semiconductor manufacturing process. A conveyance system takes an object to be processed in and out of the processing chamber. The control system includes at least one apparatus controller, which controls the processing system and the conveyance system, and an equipment controller, which manages the apparatus controller. The apparatus controller and the equipment controller are communicably connected through a network. The apparatus controller and the equipment controller are also connected via a hard wire so as to transmit a status signal of the apparatus controller and the equipment controller to the control system so that a presence of each apparatus controller and a status of connection between the controllers can be detected without using communication through the network.

摘要翻译： 互锁系统可以区分在多个控制器通过网络连接的半导体制造装置的控制系统中发生异常的控制器。 处理系统包含执行半导体制造过程的至少一个处理室。 输送系统将处理室内的物体进行处理。 控制系统包括控制处理系统和输送系统的至少一个装置控制器和管理装置控制器的设备控制器。 设备控制器和设备控制器通过网络可通信地连接。 设备控制器和设备控制器也通过硬线连接，以将设备控制器和设备控制器的状态信号传送到控制系统，使得每个设备控制器的存在和控制器之间的连接状态可以 在不使用通过网络进行通信的情况下进行检测。

公开(公告)号：US4819149A

公开(公告)日：1989-04-04

申请号：US859151

申请日：1986-05-02

申请人： Paul S. Sanik ,  Dennis H. Shreve ,  Eugene C. Varrasso

发明人： Paul S. Sanik ,  Dennis H. Shreve ,  Eugene C. Varrasso

IPC分类号： G05B19/042 ,  G06F15/46 ,  G06F15/16

CPC分类号： G05B19/0421 ,  G05B2219/21047 ,  G05B2219/21077 ,  G05B2219/2208 ,  G05B2219/2234 ,  G05B2219/23041 ,  G05B2219/23043 ,  G05B2219/23138 ,  G05B2219/23149 ,  G05B2219/23322 ,  G05B2219/23364 ,  G05B2219/24025 ,  G05B2219/24072 ,  G05B2219/24102 ,  G05B2219/24122 ,  G05B2219/24137 ,  G05B2219/24198 ,  G05B2219/25069 ,  G05B2219/25072 ,  G05B2219/25156 ,  G05B2219/25157 ,  G05B2219/25158 ,  G05B2219/25216 ,  G05B2219/25428 ,  G05B2219/25437

摘要： A hierarchical distributive control system is disclosed. The lowest level of the system is a stand alone controller with hot plug in capability, which can accept either analog or digital signals, scale these signal with input subroutines, perform any one of a number of algorithms to produce control signals or can manually produce control signals and output these control signals as either analog or digital signals to field devices. A plurality of controllers communicates with an associated condenser over duel parallel digital communication buses with a full echo, verify communication routine. The condenser contains all records for all controllers under its supervision and can download control information into any replaced controller. A subhost is interconnected to a group of condensers and contains all records contained in all condensers under its supervision. All information can be uploaded from condensers to subhost or downloaded from subhost to condenser. In case of any failure in any subsystem, all lower level systems continue to operate. All controllers are interchangeable.

摘要翻译： 公开了一种分级分布式控制系统。 系统的最低级别是具有热插拔功能的独立控制器，可以接受模拟或数字信号，用输入子程序对这些信号进行缩放，执行多种算法中的任何一种来产生控制信号或者可以手动产生控制 信号并将这些控制信号作为模拟或数字信号输出到现场设备。 多个控制器通过具有完全回波的多个并行数字通信总线与相关联的冷凝器进行通信，从而验证通信程序。 冷凝器包含所有控制器在其监督下的所有记录，并可将控制信息下载到任何更换的控制器中。 子主机与一组电容器互连，并包含在其监督下的所有电容器中的所有记录。 所有信息可以从电容器上传到子主机或从子主机下载到冷凝器。 在任何子系统发生故障的情况下，所有较低级别的系统都将继续运行。 所有控制器都可互换。