公开(公告)号：US20130063721A1

公开(公告)日：2013-03-14

申请号：US13414945

申请日：2012-03-08

申请人： Takayoshi FUJII ,  Yusaku KONNO ,  Makoto KANEKO ,  Yuichiro YAMAZAKI ,  Mitsutoshi WATABIKI ,  Kiminori YOSHINO ,  Yusuke IIDA

发明人： Takayoshi FUJII ,  Yusaku KONNO ,  Makoto KANEKO ,  Yuichiro YAMAZAKI ,  Mitsutoshi WATABIKI ,  Kiminori YOSHINO ,  Yusuke IIDA

IPC分类号： G01J3/42

CPC分类号： G01J3/42 ,  G01J3/2803 ,  G01J5/0007 ,  G01N21/95607

摘要： In one embodiment, a pattern inspection apparatus includes a light source configured to generate light, and a condenser configured to shape the light into a line beam to illuminate a wafer with the line beam. The apparatus further includes a spectrometer configured to disperse the line beam reflected from the wafer. The apparatus further includes a two-dimensional detector configured to detect the line beam dispersed by the spectrometer, and output a signal including spectrum information of the line beam. The apparatus further includes a comparison unit configured to compare the spectrum information obtained from corresponding places of a repetitive pattern on the wafer with each other, and a determination unit configured to determine whether the wafer includes a defect, based on a comparison result of the spectrum information.

摘要翻译： 在一个实施例中，图案检查装置包括被配置为产生光的光源和被配置为将光线成形为线束以用线束照射晶片的聚光器。 该装置还包括配置成分散从晶片反射的线束的光谱仪。 该装置还包括二维检测器，被配置为检测由光谱仪分散的线束，并输出包括线束的光谱信息的信号。 该装置还包括：比较单元，被配置为将从晶片上的重复图案的相应位置获得的频谱信息彼此进行比较;以及确定单元，被配置为基于频谱的比较结果来确定晶片是否包括缺陷 信息。

公开(公告)号：US20100171947A1

公开(公告)日：2010-07-08

申请号：US12639348

申请日：2009-12-16

申请人： Kiminori YOSHINO

发明人： Kiminori YOSHINO

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/93 ,  G01N21/956

摘要： A pattern inspection device has a light irradiator configured to irradiate a light on an inspection area set in a pattern forming location on a semiconductor wafer and an adjustment area set different from the inspection area in association with the inspection area on the semiconductor wafer, an image pickup part for inspection configured to pick up a light which is irradiated by the light irradiator and reflected on the inspection area to generate an inspection image, a tester configured to conduct a pattern inspection of the semiconductor wafer based on the inspection image, an image pickup part for adjustment configured to pick up a light which is irradiated by the light irradiator and reflected on the adjustment area to generate an adjustment image, and a light amount adjuster configured to adjust an amount of the light irradiated on the inspection area by the light irradiator so as to reduce a fluctuation of a luminance of the inspection image due to a difference of a thickness of the pattern based on the adjustment image.

摘要翻译： 图案检查装置具有：光照射装置，被配置为对半导体晶片上的图案形成位置设置的检查区域和与检查区域不同的调整区域照射到半导体晶片上的检查区域，图像 用于检查的拾取部件，被配置为拾取由所述光照射器照射并在所述检查区域上被反射以产生检查图像的光;被配置为基于所述检查图像进行所述半导体晶片的图案检查的测试器， 调整部件，用于拾取由光照射器照射并在调节区域上反射以产生调节图像的光;以及光量调节器，被配置为通过光照射器调节在检查区域上照射的光量 以便减小由于厚度的差异引起的检查图像的亮度的波动 基于调整图像的图案。

公开(公告)号：US06764098B2

公开(公告)日：2004-07-20

申请号：US10107580

申请日：2002-03-28

申请人： Shin Matsumoto ,  Mayumi Kamoshita ,  Sadato Kita ,  Kiminori Yoshino ,  Hideo Kondo ,  Junichi Nakano ,  Hitoshi Araki ,  Shigeru Hoshino ,  Kenji Imamura

发明人： Shin Matsumoto ,  Mayumi Kamoshita ,  Sadato Kita ,  Kiminori Yoshino ,  Hideo Kondo ,  Junichi Nakano ,  Hitoshi Araki ,  Shigeru Hoshino ,  Kenji Imamura

IPC分类号： B62O111

CPC分类号： B62D1/195

摘要： A support mechanism of a steering system that supports a steering column to a part of a vehicle body includes an energy absorbing member mounted on the side of a steering column or the vehicle body, a support pin mounted on the side of the vehicle body or the steering column, that deforms the energy absorbing member when the steering column moves relative to the vehicle body, and an actuator mounted on the side of the steering column or the vehicle body, that changes deformation characteristics of the energy absorbing member.

摘要翻译： 将转向柱支撑在车身的一部分上的转向系统的支撑机构包括安装在转向柱或车体侧的能量吸收构件，安装在车体侧的支撑销或 转向柱，当转向柱相对于车体移动时使能量吸收构件变形，以及安装在转向柱或车身侧的致动器，其改变能量吸收构件的变形特性。

公开(公告)号：US07455320B2

公开(公告)日：2008-11-25

申请号：US10554024

申请日：2004-04-28

申请人： Kenji Imamura ,  Shigeru Hoshino ,  Kiminori Yoshino ,  Hideo Kondo ,  Junichi Nakano ,  Hiroaki Date ,  Hitoshi Nakanishi

发明人： Kenji Imamura ,  Shigeru Hoshino ,  Kiminori Yoshino ,  Hideo Kondo ,  Junichi Nakano ,  Hiroaki Date ,  Hitoshi Nakanishi

IPC分类号： B62D1/00

CPC分类号： B62D1/195

摘要： A shock absorbing steering apparatus for use in a vehicle, including a steering column to be fixed to a portion of a body of the vehicle such that the steering column is releasable from the body of the vehicle and movable in a forward direction of the vehicle in the event of a secondary collision of an occupant of the vehicle upon a collision of the vehicle, and wherein one of the steering column and the portion of the vehicle body includes a mounting portion, while the other of the steering column and the portion of the vehicle body includes a holding portion. The steering apparatus further includes an impact energy absorbing member to be mounted on the mounting portion. The impact energy absorbing portion includes an engaging portion engageable with the holding portion and is deformable as the steering column is moved in the forward direction while the engaging portion is held in engagement with the holding portion, whereby the impact energy absorbing member absorbs an impact energy generated by the secondary collision.

摘要翻译： 一种用于车辆的减震转向装置，包括转向柱，该转向柱固定在车体的一部分上，使得转向柱能够从车辆的车身上释放并可沿车辆的前方移动 在车辆碰撞时车辆的乘客二次碰撞的事件，并且其中转向柱和车体的一部分包括安装部分，而转向柱和另一部分转向柱 车体包括保持部。 转向装置还包括安装在安装部分上的冲击能量吸收构件。 冲击能量吸收部包括能够与保持部接合的卡合部，并且当卡合部与保持部保持接合时，转向柱向前方移动时可变形，由此冲击能量吸收部吸收冲击能 由二次碰撞产生。

公开(公告)号：US20060181070A1

公开(公告)日：2006-08-17

申请号：US10554024

申请日：2004-04-28

申请人： Kenji Imamura ,  Shigeru Hoshino ,  Kiminori Yoshino ,  Hideo Kondo ,  Junichi Nakano ,  Hiroaki Date ,  Hitoshi Nakanishi

发明人： Kenji Imamura ,  Shigeru Hoshino ,  Kiminori Yoshino ,  Hideo Kondo ,  Junichi Nakano ,  Hiroaki Date ,  Hitoshi Nakanishi

IPC分类号： B62D1/19 ,  B62D1/16

CPC分类号： B62D1/195

摘要： A shock absorbing steering apparatus for use in a vehicle, including a steering column to be fixed to a portion of a body of the vehicle such that the steering column is releasable from the body of the vehicle and movable in a forward direction of the vehicle in the event of a secondary collision of an occupant of the vehicle upon a collision of the vehicle, and wherein one of the steering column and the portion of the vehicle body includes a mounting portion, while the other of the steering column and the portion of the vehicle body includes a holding portion. The steering apparatus further includes an impact energy absorbing member to be mounted on the mounting portion. The impact energy absorbing portion includes an engaging portion engageable with the holding portion and is deformable as the steering column is moved in the forward direction while the engaging portion is held in engagement with the holding portion, whereby the impact energy absorbing member absorbs an impact energy generated by the secondary collision.

摘要翻译： 一种用于车辆的减震转向装置，包括转向柱，该转向柱固定在车体的一部分上，使得转向柱能够从车辆的车身上释放并可沿车辆的前方移动 在车辆碰撞时车辆的乘客二次碰撞的事件，并且其中转向柱和车体的一部分包括安装部分，而转向柱和另一部分转向柱 车体包括保持部。 转向装置还包括安装在安装部分上的冲击能量吸收构件。 冲击能量吸收部包括能够与保持部接合的卡合部，并且当卡合部与保持部保持接合时，转向柱向前方移动时可变形，由此冲击能量吸收部吸收冲击能 由二次碰撞产生。