摘要:
A signal processing unit (C1, C2, C3) for processing a light reception signal from an imaging element (12) at different magnifications is provided in a light receiving unit (102) in a displacement sensor (1). This sensor (1) measures a displacement by using light receiving amount data generated by the signal processing unit (C1) for each detection processing by a light projecting unit (101) and the light receiving unit (102), and further adjusts sensitivity for next detection processing. In sensitivity adjustment processing, when a peak value in the light receiving amount data generated by the signal processing unit (C1) approximates to 0, a peak value extracted by the signal processing unit (C2) to which higher magnification is applied is employed. Alternatively, when a peak value in the light receiving amount data generated by the signal processing unit (C1) is saturated, a peak value extracted by the signal processing unit (C3) to which 1-fold magnification is applied is employed.
摘要:
A red-colored film in which when an elliptically polarized light is incident on the film in a direction 45° aslant from a normal line direction with respect to a surface of the film, a light transmitted through the film has an average amplitude transmittance ratio (av. tan Ψ) in a wavelength region of 575 to 635 nm, which satisfies the following equation (1): 0.960
摘要:
An image taken by an imaging device is displayed on a display unit. When a confirmation instruction is inputted through an input unit, image teaching is performed while the image displayed on the display unit is set to a setting object image. A measurement item which is of a candidate of a measurement process including specification of a reference position is displayed as the measurement process to accept selection. Specification of cutout area which constitutes one measurement target region is accepted, a measurement point including a local region or a feature point which is used for the measurement is automatically set in the measurement target region based on pieces of information on the set measurement process and reference position.
摘要:
A red-colored film in which when an elliptically polarized light is incident on the film in a direction 45° aslant from a normal line direction with respect to a surface of the film, a light transmitted through the film has an average amplitude transmittance ratio (av. tan Ψ) in a wavelength region of 575 to 635 nm, which satisfies the following equation (1): 0.960
摘要:
An extension unit provided adjacent to an amp unit comprises a measurement data accumulation memory, a measurement data acquiring part for acquiring measurement data coming through a transmission line and accumulating it in the above memory, a data analyzing part for analyzing an accumulated series of measurement data according to predetermined algorithm, a determining part for determining a data analyzed result, and an output part for outputting a control signal corresponding to a determined result to the outside. A plurality of process programs in which measurement algorithm is segmentalized are incorporated in the extension unit and a process program is selected according to a command from a personal computer and the selected process program is performed in a predetermined order.
摘要:
In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.
摘要:
Teaching processing using a model of a workpiece is performed by accepting at least one input of a target value for a response time and a tolerance value for a detection error as a parameter representing a condition for a displacement sensor to operate. A CPU during teaching processing determines a maximum exposure time while it causes repeated detection processing by a light projecting unit and a light receiving unit, calculates variation in measurement data of an amount of displacement, and derives the number of pieces of data of moving average calculation suitable for a value for the input parameter as a result of operation processing using the maximum exposure time and variation in measurement data. This number of pieces of data is registered in a memory and used for moving average calculation in a normal operation mode.
摘要:
In accordance with an embodiment, a pattern inspection method includes: applying a light generated from a light source to the same region of a substrate in which an inspection target pattern is formed; guiding, imaging and then detecting a reflected light from the substrate, and acquiring a detection signal for each of a plurality of different wavelengths; and adding the detection signals of the different wavelengths in association with an incident position of an imaging surface to generate added image data including information on a wavelength and signal intensity, judging, by the added image data, whether the inspection target pattern has any defect, and when judging that the inspection target pattern has a defect, detecting the position of the defect in a direction perpendicular to the substrate.
摘要:
An image processing technology for displaying a real object and a virtual object associated with each other is provided. An image analysis apparatus according to the present invention changes a motion pattern of the virtual object depending on the actual movement of the real object. The change detector 110 detects temporal state change in the motion pattern of the real object captured by an imaging apparatus and the display controller 120 reads a motion pattern from the motion pattern storage 122 based on the event generated by the state change of an image. The display pattern controller 122 controls display mode of the virtual object using the read motion pattern.
摘要:
An image processing apparatus that can determine an optimal registration color according to an acquired image is provided. An image processing unit 6 receives a sample image from an imaging unit 2 and acquires a hue with respect to each of pixels arranged two-dimensionally that constitute the sample image and calculates a hue histogram. A control unit 4 extracts a candidate color based on the hue at a maximum point in the hue histogram received from the image processing unit 6. At the same time, the control unit 4 determines a hue threshold value in order to define the range of the color regarded as the candidate color. Furthermore, the control unit 4 extracts all pixels that satisfy the hue threshold value of the candidate color and acquires the value and chroma of the extracted pixel and sets the maximum value and the minimum value in the acquired value and chroma to a value threshold value and a chroma threshold value. The control unit 4 stores the determined hue threshold value, value threshold value and chroma threshold value in a memory unit 6a.