公开(公告)号：US20050055122A1

公开(公告)日：2005-03-10

申请号：US10656757

申请日：2003-09-06

申请人： To-Nien Lin ,  Kuan-Luan Cheng ,  Kun-Pi Cheng ,  Hsin-Yuan Chen

发明人： To-Nien Lin ,  Kuan-Luan Cheng ,  Kun-Pi Cheng ,  Hsin-Yuan Chen

IPC分类号： G03F7/20 ,  G06F7/00 ,  G06F19/00 ,  H01L21/00

CPC分类号： H01L21/67253 ,  G03F7/70508 ,  G03F7/70633

摘要： A method for fabricating a microelectronic product and a system for fabricating the microelectronic product each employ an in-line automatic photolithographic processing and overlay registration measurement for a pair of pilot lots of a new product order, prior to in-line automatic processing of an additional new product order lot within a photolithographic process tool. The method and the system provide for efficient production of new product order lots, absent need for an independent pilot lot qualification method or system.

公开(公告)号：US06978191B2

公开(公告)日：2005-12-20

申请号：US10656757

申请日：2003-09-06

申请人： Yo-Nien Lin ,  Kuan-Luan Cheng ,  Kun-Pi Cheng ,  Hsin-Yuan Chen

发明人： Yo-Nien Lin ,  Kuan-Luan Cheng ,  Kun-Pi Cheng ,  Hsin-Yuan Chen

IPC分类号： G03F7/20 ,  G06F7/00 ,  G06F19/00 ,  H01L21/00

CPC分类号： H01L21/67253 ,  G03F7/70508 ,  G03F7/70633

摘要： A method for fabricating a microelectronic product and a system for fabricating the microelectronic product each employ an in-line automatic photolithographic processing and overlay registration measurement for a pair of pilot lots of a new product order, prior to in-line automatic processing of an additional new product order lot within a photolithographic process tool. The method and the system provide for efficient production of new product order lots, absent need for an independent pilot lot qualification method or system.

摘要翻译： 用于制造微电子产品的方法和用于制造微电子产品的系统各自在一个新的产品订单的一对先导批次之前采用在线自动光刻处理和重叠配准测量，在一个额外的在线自动处理之前 新产品订单在光刻工艺工具中。 该方法和系统提供了新产品订单批量的高效生产，不需要独立的试点批次认证方法或系统。