公开(公告)号：US08629020B2

公开(公告)日：2014-01-14

申请号：US13228479

申请日：2011-09-09

Applicant: Sang Gi Kim ,  Jin-Gun Koo ,  Seong Wook Yoo ,  Jong-Moon Park ,  Jin Ho Lee ,  Kyoung Il Na ,  Yil Suk Yang ,  Jongdae Kim

Inventor： Sang Gi Kim ,  Jin-Gun Koo ,  Seong Wook Yoo ,  Jong-Moon Park ,  Jin Ho Lee ,  Kyoung Il Na ,  Yil Suk Yang ,  Jongdae Kim

IPC: H01L21/336

CPC classification number: H01L29/7813 ,  H01L21/2255 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/1095 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7811

Abstract: Provided are a semiconductor device and a method of fabricating the same. The method includes: forming a trench in a semiconductor substrate of a first conductive type; forming a trench dopant containing layer including a dopant of a second conductive type on a sidewall and a bottom surface of the trench; forming a doping region by diffusing the dopant in the trench dopant containing layer into the semiconductor substrate; and removing the trench dopant containing layer.

Abstract translation: 提供半导体器件及其制造方法。 该方法包括：在第一导电类型的半导体衬底中形成沟槽; 在所述沟槽的侧壁和底表面上形成包含第二导电类型的掺杂剂的沟槽掺杂剂层; 通过将所述沟槽掺杂剂含量层中的掺杂剂扩散到所述半导体衬底中来形成掺杂区域; 并去除含沟槽掺杂剂层。

公开(公告)号：US20130175614A1

公开(公告)日：2013-07-11

申请号：US13609120

申请日：2012-09-10

Applicant: KYOUNG IL NA

Inventor： KYOUNG IL NA

IPC: H01L27/06 ,  H01L21/8238

CPC classification number: H01L21/84 ,  H01L27/1203

Abstract: Semiconductor devices and methods of fabricating the same are provided. The semiconductor device includes a substrate having a first region including a first element and a second region including a second element and including a lower substrate and an upper substrate bonded to each other, an epitaxial layer and an insulating layer disposed between the lower substrate and the upper substrate, the epitaxial layer disposed in the first region, and the insulating layer disposed in the second region, a device isolation pattern separating the first element from the second element, and a doped pattern disposed between the upper substrate and the insulating layer and between the upper substrate and the epitaxial layer. The first element is electrically connected to the lower substrate through the doped pattern and the epitaxial layer. The second element is electrically insulated from the lower substrate by the doped pattern and the insulating layer.

Abstract translation: 提供半导体器件及其制造方法。 半导体器件包括具有包括第一元件的第一区域和包括第二元素并且包括下基板和上基板彼此接合的第一区域的基板，设置在下基板和下基板之间的绝缘层 上基板，设置在第一区域中的外延层和设置在第二区域中的绝缘层，将第一元件与第二元件分离的器件隔离图案，以及设置在上基板和绝缘层之间以及介于 上基板和外延层。 第一元件通过掺杂图案和外延层电连接到下基板。 第二元件通过掺杂图案和绝缘层与下基板电绝缘。

公开(公告)号：US20120098057A1

公开(公告)日：2012-04-26

申请号：US13228479

申请日：2011-09-09

Applicant: Sang Gi KIM ,  Jin-Gun Koo ,  Seong Wook Yoo ,  Jong-Moon Park ,  Jin Ho Lee ,  Kyoung Il Na ,  Yil Suk Yang ,  Jongdae Kim

Inventor： Sang Gi KIM ,  Jin-Gun Koo ,  Seong Wook Yoo ,  Jong-Moon Park ,  Jin Ho Lee ,  Kyoung Il Na ,  Yil Suk Yang ,  Jongdae Kim

IPC: H01L29/78 ,  H01L21/336

CPC classification number: H01L29/7813 ,  H01L21/2255 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/1095 ,  H01L29/66727 ,  H01L29/66734 ,  H01L29/7811

Abstract: Provided are a semiconductor device and a method of fabricating the same. The method includes: forming a trench in a semiconductor substrate of a first conductive type; forming a trench dopant containing layer including a dopant of a second conductive type on a sidewall and a bottom surface of the trench; forming a doping region by diffusing the dopant in the trench dopant containing layer into the semiconductor substrate; and removing the trench dopant containing layer.

Abstract translation: 提供半导体器件及其制造方法。 该方法包括：在第一导电类型的半导体衬底中形成沟槽; 在所述沟槽的侧壁和底表面上形成包含第二导电类型的掺杂剂的沟槽掺杂剂层; 通过将所述沟槽掺杂剂含量层中的掺杂剂扩散到所述半导体衬底中来形成掺杂区域; 并去除含沟槽掺杂剂层。