APPARATUS FOR MEASURING TRANSMISSIVITY OF PATTERNED GLASS SUBSTRATE
    2.
    发明申请
    APPARATUS FOR MEASURING TRANSMISSIVITY OF PATTERNED GLASS SUBSTRATE 有权
    用于测量图案玻璃基板传输的装置

    公开(公告)号:US20120170040A1

    公开(公告)日:2012-07-05

    申请号:US13334845

    申请日:2011-12-22

    IPC分类号: G01N21/59 G01N21/00

    CPC分类号: G01N21/958 G01N21/59

    摘要: An apparatus for measuring transmissivity of a patterned glass substrate. A beam radiator radiates a laser beam. A collimation lens collimates the laser beam radiated from the laser beam radiator. A beam expander expands a size of the laser beam collimated by the collimation lens. A detector has a light-receiving section, which receives the laser beam that has passed through the patterned glass substrate after having been expanded by the beam expander. A measuring section measures a transmissivity of the patterned glass substrate using the laser beam received by the detector.

    摘要翻译: 一种用于测量图案化玻璃基板的透射率的装置。 光束辐射器辐射激光束。 准直透镜准直从激光束辐射器辐射的激光束。 光束扩展器扩大由准直透镜准直的激光束的尺寸。 检测器具有光接收部分,该光接收部分在通过光束扩展器扩展之后接收已经通过图案化玻璃基板的激光束。 测量部分使用由检测器接收的激光束来测量图案化玻璃基板的透射率。

    Apparatus for measuring transmissivity of patterned glass substrate
    5.
    发明授权
    Apparatus for measuring transmissivity of patterned glass substrate 有权
    用于测量图案化玻璃基板的透射率的装置

    公开(公告)号:US09030664B2

    公开(公告)日:2015-05-12

    申请号:US13334845

    申请日:2011-12-22

    CPC分类号: G01N21/958 G01N21/59

    摘要: An apparatus for measuring transmissivity of a patterned glass substrate. A beam radiator radiates a laser beam. A collimation lens collimates the laser beam radiated from the laser beam radiator. A beam expander expands a size of the laser beam collimated by the collimation lens. A detector has a light-receiving section, which receives the laser beam that has passed through the patterned glass substrate after having been expanded by the beam expander. A measuring instrument measures a transmissivity of the patterned glass substrate using the laser beam received by the detector.

    摘要翻译: 一种用于测量图案化玻璃基板的透射率的装置。 光束辐射器辐射激光束。 准直透镜准直从激光束辐射器辐射的激光束。 光束扩展器扩大由准直透镜准直的激光束的尺寸。 检测器具有光接收部分,该光接收部分在通过光束扩展器扩展之后接收已经通过图案化玻璃基板的激光束。 测量仪器使用由检测器接收的激光束测量图案化玻璃基板的透射率。