公开(公告)号：US4700132A

公开(公告)日：1987-10-13

申请号：US731194

申请日：1985-05-06

申请人： Thomas R. Yarbrough ,  Larry M. Beasley

发明人： Thomas R. Yarbrough ,  Larry M. Beasley

IPC分类号： G01R1/073 ,  G01R31/28 ,  G01R31/02

CPC分类号： G01R31/2886 ,  G01R1/073 ,  G01R1/07314 ,  G01R1/07364

摘要： An integrated circuit test site assembly for testing pin grid array (PGA) packaged integrated circuits having removable contact pins. The removable contact pins, which are preferably spring-loaded pogo pins, enable the test site assembly to be repaired quickly and easily with a minimum of down time. In addition, the test site need only be loaded with the number of pins required to make contact with the PGA lead pattern.

摘要翻译： 一种集成电路测试现场组件，用于测试具有可拆卸触点引脚的引脚格栅阵列（PGA）封装集成电路。 优选弹簧加载弹簧销的可拆卸接触销使得能够以最小的停机时间快速且容易地修复测试现场组件。 此外，测试站点只需要加载与PGA引线图形接触所需的引脚数量。

公开(公告)号：US5000682A

公开(公告)日：1991-03-19

申请号：US467937

申请日：1990-01-22

申请人： Donald W. Heidt ,  Steve Thompson ,  Worm Lund ,  Raymon F. Thompson ,  Larry M. Beasley

发明人： Donald W. Heidt ,  Steve Thompson ,  Worm Lund ,  Raymon F. Thompson ,  Larry M. Beasley

IPC分类号： F27D5/00

CPC分类号： F27D5/0037

摘要： Semiconductor wafers within a supporting vertical wafer tower are positioned within a vertical process chamber through a lower gate valve fixed to a supporting framework. The gate valve is sealed to a similar gate valve at the upper end of a movable load lock on the framework, within which the wafers are subjected to pre-treatment and post-treatment processes. Two load locks are alternately used in conjunction with the process chamber and a wafer loading station on the framework. In addition, a cleaning element is movably mounted on the framework for periodically maintaining the interior surfaces of the process tube within the process chamber.

摘要翻译： 支撑垂直晶片塔内的半导体晶片通过固定到支撑框架的下闸阀定位在垂直处理室内。 闸阀在框架上的可移动负载锁的上端处被密封到类似的闸阀，在其中晶片经过预处理和后处理过程。 两个负载锁与框架上的处理室和晶片加载站交替使用。 此外，清洁元件可移动地安装在框架上，用于周期性地将处理管的内表面保持在处理室内。