公开(公告)号：US07138768B2

公开(公告)日：2006-11-21

申请号：US10154232

申请日：2002-05-23

申请人： Peter E. Maciejowski ,  Joseph C. Olson ,  Shengwu Chang ,  Bjorn O. Pedersen ,  Leo V. Klos, Jr. ,  Daniel Distaso ,  Curt D. Bergeron

发明人： Peter E. Maciejowski ,  Joseph C. Olson ,  Shengwu Chang ,  Bjorn O. Pedersen ,  Leo V. Klos, Jr. ,  Daniel Distaso ,  Curt D. Bergeron

IPC分类号： H01J7/24

CPC分类号： H01J27/08 ,  H01J27/022 ,  H01J2237/08 ,  H01J2237/31701

摘要： An indirectly heated cathode ion source includes an arc chamber housing that defines an arc chamber, an indirectly heated cathode and a filament for heating the cathode. The cathode may include an emitting portion having a front surface, a rear surface and a periphery, a support rod attached to the rear surface of the emitting portion, and a skirt extending from the periphery of the emitting portion. A cathode assembly may include the cathode, a filament and a clamp assembly for mounting the cathode and the filament in a fixed spatial relationship and for conducting electrical energy to the cathode and the filament. The filament is positioned in a cavity defined by the emitting portion and the skirt of the cathode. The ion source may include a shield for inhibiting escape of electrons and plasma from a region outside the arc chamber in proximity to the filament and the cathode.