公开(公告)号：US06653642B2

公开(公告)日：2003-11-25

申请号：US09779243

申请日：2001-02-08

申请人： Bjorn O. Pedersen ,  Peter E. Maciejowski ,  William G. Goodenough ,  Paul J. Murphy ,  Charles M. McKenna

发明人： Bjorn O. Pedersen ,  Peter E. Maciejowski ,  William G. Goodenough ,  Paul J. Murphy ,  Charles M. McKenna

IPC分类号： H01J37317

CPC分类号： H01J37/3171 ,  H01J2237/04735 ,  H05H5/06

摘要： Methods and apparatus are provided for efficiently operating an ion implanter which includes a charged particle accelerator in a high energy mode and in a low energy mode. The charged particle accelerator includes a high voltage power supply, an accelerator column coupled to the high voltage power supply and a switching assembly. The accelerator column includes a plurality of accelerator electrodes. The high voltage power supply is disabled from energizing the accelerator column in the low energy mode. The switching assembly includes switching elements for electrically connecting the accelerator electrodes to a reference potential in the low energy mode and for electrically isolating the accelerator electrodes from the reference potential in the high energy mode. The switching assembly prevents positive potentials on the accelerator electrodes and thus minimizes space charge expansion of the beam when transporting positive ion beams in the low energy mode.

摘要翻译： 提供了用于有效地操作离子注入机的方法和装置，其包括高能量模式和低能量模式的带电粒子加速器。 带电粒子加速器包括高压电源，耦合到高压电源的加速器柱和开关组件。 加速器柱包括多个加速器电极。 在低能量模式下，高压电源禁止加速器柱通电。 开关组件包括用于将加速器电极电连接到低能量模式中的参考电位并且用于将加速器电极与高​​能量模式中的参考电位电隔离的开关元件。 开关组件防止加速器电极上的正电位，从而当以低能量模式传输正离子束时，使光束的空间电荷膨胀最小化。

公开(公告)号：US07138768B2

公开(公告)日：2006-11-21

申请号：US10154232

申请日：2002-05-23

申请人： Peter E. Maciejowski ,  Joseph C. Olson ,  Shengwu Chang ,  Bjorn O. Pedersen ,  Leo V. Klos, Jr. ,  Daniel Distaso ,  Curt D. Bergeron

发明人： Peter E. Maciejowski ,  Joseph C. Olson ,  Shengwu Chang ,  Bjorn O. Pedersen ,  Leo V. Klos, Jr. ,  Daniel Distaso ,  Curt D. Bergeron

IPC分类号： H01J7/24

CPC分类号： H01J27/08 ,  H01J27/022 ,  H01J2237/08 ,  H01J2237/31701

摘要： An indirectly heated cathode ion source includes an arc chamber housing that defines an arc chamber, an indirectly heated cathode and a filament for heating the cathode. The cathode may include an emitting portion having a front surface, a rear surface and a periphery, a support rod attached to the rear surface of the emitting portion, and a skirt extending from the periphery of the emitting portion. A cathode assembly may include the cathode, a filament and a clamp assembly for mounting the cathode and the filament in a fixed spatial relationship and for conducting electrical energy to the cathode and the filament. The filament is positioned in a cavity defined by the emitting portion and the skirt of the cathode. The ion source may include a shield for inhibiting escape of electrons and plasma from a region outside the arc chamber in proximity to the filament and the cathode.