公开(公告)号：US06483584B1

公开(公告)日：2002-11-19

申请号：US09549738

申请日：2000-04-14

Applicant: Solomon J. H. Lee ,  Chih-Kung Lee ,  Shu-Sheng Lee ,  Yang Yun-Chang ,  Lin Chan-Ching ,  Shuen-Chen Shiue

Inventor： Solomon J. H. Lee ,  Chih-Kung Lee ,  Shu-Sheng Lee ,  Yang Yun-Chang ,  Lin Chan-Ching ,  Shuen-Chen Shiue

IPC: G01J400

CPC classification number: G01N21/21 ,  G01N21/41 ,  G01N21/8422

Abstract: An ellipsometer for measuring the complex refractive index of a sample and thin film thickness according to the invention. The ellipsometer includes a linear polarized light source, a reference analyzer, a polarization analyzer and a light direction controller. The linear polarized light source used to generate a measuring beam for detecting the sample. The phase modulator used to control the phase of the measuring beam thereby to generate a sampling beam. The reference analyzer used to generate a reference beam according to part of the sampling beam thereby to adjust the intensity of the sampling beam. The polarization analyzer used to analyze the phase, polarization and intensity of the sampling beam after the sampling beam is reflected by the sample. The light direction controller used to control the angle and direction of the sampling beam with respect to the sample, wherein the sampling beam is reflected by the sample to enter the light direction controller, and thereafter the sampling beam is reflected by the light direction controller and re-reflected by the sample to enter the polarization analyzer along an original optical path, but toward an opposite direction.

Abstract translation: 用于测量样品的复合折射率的椭偏仪和根据本发明的薄膜厚度。 椭偏仪包括线偏振光源，参考分析仪，偏振分析仪和光方向控制器。 用于产生用于检测样品的测量光束的线偏振光源。 相位调制器用于控制测量光束的相位，从而产生采样光束。 参考分析仪用于根据采样束的一部分产生参考光束，从而调整采样光束的强度。 用于分析采样光束后的采样光束的相位，极化和强度的偏振分析器被样品反射。 用于控制采样光束相对于样本的角度和方向的光方向控制器，其中采样光束被样本反射以进入光方向控制器，此后采样光束被光方向控制器反射， 由样品重新反射，沿着原始光路进入偏振分析器，但朝向相反的方向。