Multi-function opto-electronic detection apparatus
    1.
    发明授权
    Multi-function opto-electronic detection apparatus 有权
    多功能光电检测仪

    公开(公告)号:US06844935B2

    公开(公告)日:2005-01-18

    申请号:US10761116

    申请日:2004-01-20

    CPC classification number: G01B11/00

    Abstract: A multi-function opto-electronic detection apparatus for detecting molecular characteristics of a test sample. The appratuses comprises functional mode subsystems including a detecting light source subsystem for generating sampling beams for illuminating the test sample; a manipulation optics subsystem for aligning the sampling beam onto the test sample; a target signal processing subsystem for analyzing target beams emerging from the test sample resulting from the illuminating of the sampling beam; and a sample fixation subsystem for holding the test sample. The detecting light source subsystem, manipulation optics subsystem and target signal processing subsystem are assembled into one of several possible optical sampling setups for the detection characteristics of the test sample. The functional mode setups include at least ellispometer, confocal image scanner, photon tunneling scanning microscope and interferometer.

    Abstract translation: 一种用于检测试样的分子特性的多功能光电检测装置。 该装置包括功能模式子系统,包括用于产生用于照亮测试样本的采样光束的检测光源子系统; 用于将采样光束对准到测试样品的操纵光学子系统; 目标信号处理子系统,用于分析从采样光束的照明产生的从测试样本出射的目标光束; 以及用于保持测试样本的样本固定子系统。 检测光源子系统,操作光学子系统和目标信号处理子系统被组合成用于测试样本的检测特性的几种可能的光学采样设置之一。 功能模式设置至少包括椭圆计,共焦图像扫描仪,光子隧道扫描显微镜和干涉仪。

    Optical mechanism for precisely controlling the angle of an incident light beam within a large incident angle range
    2.
    发明授权
    Optical mechanism for precisely controlling the angle of an incident light beam within a large incident angle range 有权
    用于在大的入射角度范围内精确地控制入射光束的角度的光学机构

    公开(公告)号:US06288841B1

    公开(公告)日:2001-09-11

    申请号:US09475001

    申请日:1999-12-30

    Abstract: An optical path overlapping type incident angle changeable optical mechanism according to the invention allows an incident light beam to be incident onto a measured range of a sample within a large incident angle range. The optical mechanism includes a reflecting prism reflecting the incident light beam to generate a reflected light beam having an angle of 90° with respect to the incident light beam; a concave parabolic cylindric mirror guiding the reflected light beam coming from the reflecting prism to a measured range of a detect-waiting sample to thereby be further reflected to generate a detect-waiting light beam; a concave cylindric mirror used to make the detect-waiting light beam incident onto/reflected by the reflecting prism so as to overlap with the incident light beam; and a light beam splitting means used to separate the detect-waiting light beam from the incident light beam.

    Abstract translation: 根据本发明的光路重叠型入射角可变光学机构允许入射光束入射到大的入射角范围内的样品的测量范围。 光学机构包括反射入射光束的反射棱镜,以产生相对于入射光束具有90°角的反射光束; 将来自反射棱镜的反射光束引导到检测等待样本的测量范围的凹面抛物线圆柱镜,从而进一步反射以产生检测等待光束; 用于使入射到反射棱镜/反射的检测等待光束与入射光束重叠的凹圆柱镜; 以及用于将检测等待光束与入射光束分离的光束分离装置。

    Method and an apparatus for measuring the flying height with sub-nanometer resolution
    3.
    发明授权
    Method and an apparatus for measuring the flying height with sub-nanometer resolution 有权
    用亚纳米分辨率测量飞行高度的方法和装置

    公开(公告)号:US06590667B1

    公开(公告)日:2003-07-08

    申请号:US09624685

    申请日:2000-07-24

    CPC classification number: G11B7/1387 G01B11/14 G11B5/6011 G11B7/122 G11B7/22

    Abstract: A method and apparatus is claimed for measuring the distance between a slider and a transparent disk with sub-nanometer resolution. The flying height is measured by applying ellipsometry. The measurement is done by: providing a sampling light beam with adjustable initial polarization state by phase modulation, and with variable incident angles relative to the air film and reflecting the sampling light off of the specimen at a detection site forming a reflected light beam that is then reflected at the detection site again and then guided to both detectors for detecting the intensity and phase change of the light beam to determine the gap's thickness as well as passing some light to a microscope used for observation of the detecting site on the specimen.

    Abstract translation: 要求的方法和装置用于测量滑块和具有亚纳米分辨率的透明盘之间的距离。 飞行高度通过应用椭偏仪测量。 测量是通过以下方式完成的:通过相位调制提供具有可调初始极化状态的采样光束,并且相对于空气膜具有可变的入射角,并在形成反射光束的检测位置处反射取样光, 然后再次在检测部位反射,然后引导到两个检测器,用于检测光束的强度和相位变化,以确定间隙的厚度,以及将一些光通过用于观察样品上检测部位的显微镜。

    Sensor system of surface plasmon resonance (SPR) and measuring method thereof
    4.
    发明授权
    Sensor system of surface plasmon resonance (SPR) and measuring method thereof 有权
    表面等离子体共振(SPR)传感器系统及其测量方法

    公开(公告)号:US06661520B1

    公开(公告)日:2003-12-09

    申请号:US10153459

    申请日:2002-05-22

    CPC classification number: G01N21/553

    Abstract: A sensor system of a surface plasmon resonance (SPR) for analyzing a characteristic of a substance and the measuring method thereof are provided. The system includes an optical device for generating a first light beam and a second light beam in sequence; a sensor device for respectively generating a first plasmon wave and a second plasmon wave in response to an optical characteristic change of the first light beam and the second light beam with respective to the substance, in which a resonance is generated from the first plasmon wave and the second plasmon wave respectively generating a first reflective signal and a second reflective signal; and a measuring device for measuring spectra of the first reflective signal and the second reflective signal and obtaining the measured value which is substituted into an operational formula to calculate a reference value used for analyzing the characteristic of the substance.

    Abstract translation: 提供了用于分析物质的特性的表面等离子体共振(SPR)的传感器系统及其测量方法。 该系统包括依次产生第一光束和第二光束的光学装置; 传感器装置,用于响应于所述第一光束和所述第二光束的光学特性变化分别产生第一等离子体激元波和第二等离子体波,所述第一等离子体波和所述第二等离子体波相对于从所述物质产生的所述物质的光学特性变化, 所述第二等离子体波分别产生第一反射信号和第二反射信号; 以及测量装置,用于测量第一反射信号和第二反射信号的光谱,并获得被代入操作公式的测量值,以计算用于分析物质特征的参考值。

    Device for measuring the complex refractive index and thin film thickness of a sample
    5.
    发明授权
    Device for measuring the complex refractive index and thin film thickness of a sample 有权
    用于测量样品的复折射率和薄膜厚度的装置

    公开(公告)号:US06483584B1

    公开(公告)日:2002-11-19

    申请号:US09549738

    申请日:2000-04-14

    CPC classification number: G01N21/21 G01N21/41 G01N21/8422

    Abstract: An ellipsometer for measuring the complex refractive index of a sample and thin film thickness according to the invention. The ellipsometer includes a linear polarized light source, a reference analyzer, a polarization analyzer and a light direction controller. The linear polarized light source used to generate a measuring beam for detecting the sample. The phase modulator used to control the phase of the measuring beam thereby to generate a sampling beam. The reference analyzer used to generate a reference beam according to part of the sampling beam thereby to adjust the intensity of the sampling beam. The polarization analyzer used to analyze the phase, polarization and intensity of the sampling beam after the sampling beam is reflected by the sample. The light direction controller used to control the angle and direction of the sampling beam with respect to the sample, wherein the sampling beam is reflected by the sample to enter the light direction controller, and thereafter the sampling beam is reflected by the light direction controller and re-reflected by the sample to enter the polarization analyzer along an original optical path, but toward an opposite direction.

    Abstract translation: 用于测量样品的复合折射率的椭偏仪和根据本发明的薄膜厚度。 椭偏仪包括线偏振光源,参考分析仪,偏振分析仪和光方向控制器。 用于产生用于检测样品的测量光束的线偏振光源。 相位调制器用于控制测量光束的相位,从而产生采样光束。 参考分析仪用于根据采样束的一部分产生参考光束,从而调整采样光束的强度。 用于分析采样光束后的采样光束的相位,极化和强度的偏振分析器被样品反射。 用于控制采样光束相对于样本的角度和方向的光方向控制器,其中采样光束被样本反射以进入光方向控制器,此后采样光束被光方向控制器反射, 由样品重新反射,沿着原始光路进入偏振分析器,但朝向相反的方向。

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