公开(公告)号：US20100134801A1

公开(公告)日：2010-06-03

申请号：US12701535

申请日：2010-02-06

Applicant: JAMES E. MILLERD ,  MICHAEL NORTH-MORRIS

Inventor： JAMES E. MILLERD ,  MICHAEL NORTH-MORRIS

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

公开(公告)号：US20080062428A1

公开(公告)日：2008-03-13

申请号：US11899883

申请日：2007-09-07

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

公开(公告)号：US20050025198A1

公开(公告)日：2005-02-03

申请号：US10630430

申请日：2003-07-29

Applicant: Michael North-Morris ,  Anthony Lee

Inventor： Michael North-Morris ,  Anthony Lee

IPC: G01M11/00 ,  H01S3/10

CPC classification number: G01M11/331 ,  G01M11/31 ,  G01M11/3127

Abstract: A tracking stage has an optical filter with a free spectral range greater than the maximum mode hop of a tunable laser. The free spectral range is sufficient to determine the wavelength of the laser output after the mode hop. The output is dithered or a quadrature signal is used to determine whether the mode hop is forwards or backwards. In a further embodiment, a second tracking stage with a shorter free spectral range is coupled to the tunable laser to provide enhanced wavelength resolution. Alternatively, the second tracking stage is omitted and the signal of the tracking stage is amplified to enhance wavelength resolution.

Abstract translation: 跟踪阶段具有光学范围大于可调谐激光器的最大模式跳跃的光学滤波器。 自由光谱范围足以确定模式跳后激光输出的波长。 输出被抖动，或者使用正交信号来确定模式跳跃是向前还是向后。 在另一实施例中，具有较短自由光谱范围的第二跟踪级耦合到可调谐激光器以提供增强的波长分辨率。 或者，省略第二跟踪级，并且放大跟踪级的信号以增强波长分辨率。

公开(公告)号：US08345258B2

公开(公告)日：2013-01-01

申请号：US12701535

申请日：2010-02-06

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

公开(公告)号：US07675628B2

公开(公告)日：2010-03-09

申请号：US11899883

申请日：2007-09-07

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。