Step-scanning sensing beam for imaging interferometer

    公开(公告)号:US20180238675A1

    公开(公告)日:2018-08-23

    申请号:US15871050

    申请日:2018-01-14

    Applicant: Xiaoke Wan

    Inventor: Xiaoke Wan

    CPC classification number: G01B9/0203 G01B9/02002 G01B9/02091 G01B11/14

    Abstract: In interferometer imaging signal acquisition using a movable optical beam to sample a target with specular or non specular reflecting surfaces or internal features, beam moving during interferometer signal acquisition can generate unwanted phase error due to shifting speckle field. Examples include coherent LIDAR, Interferometry Doppler sensing and optical coherence tomography. During an interferometer signal acquisition period, an interferometer sensing beam can be substantially stationary, and active step-scanning can be synchronized with interferometer signal acquisition cycles. For interferometers using repetitive chirping lasers, passive dispersive counter-scan mechanisms can be used to assist step-scanning operation.

    Measuring apparatus for measuring vibration or displacement and method for measuring vibration or displacement

    公开(公告)号:US10018501B2

    公开(公告)日:2018-07-10

    申请号:US15447681

    申请日:2017-03-02

    Inventor: Osamu Furukawa

    CPC classification number: G01H9/00 G01B9/02002 G01D5/35306

    Abstract: A measuring apparatus for contactlessly measuring vibration or displacement of a measurement target includes a light source configured to emit a continuous wave of light frequency-modulated to arrange a measurement site of the measurement target within a correlation peak, a divider configured to divide the continuous wave of light into first and second divided-waves of light, a light receiver configured to receive interfering light of the first divided-wave of light reflected by the measurement target and the second divided-wave of light, and a calculator configured to calculate the vibration or displacement of the measurement target using an electric signal output from the light receiver.

    Absolute distance laser interferometer

    公开(公告)号:US09829306B2

    公开(公告)日:2017-11-28

    申请号:US14284756

    申请日:2014-05-22

    Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.

    AN OVERLAPPED CHIRPED FIBER BRAGG GRATING SENSING FIBER AND METHODS AND APPARATUS FOR PARAMETER MEASUREMENT USING SAME
    7.
    发明申请
    AN OVERLAPPED CHIRPED FIBER BRAGG GRATING SENSING FIBER AND METHODS AND APPARATUS FOR PARAMETER MEASUREMENT USING SAME 有权
    一种重叠的纤维光纤光栅传感光纤和使用相同参数测量的方法和装置

    公开(公告)号:US20160123715A1

    公开(公告)日:2016-05-05

    申请号:US14897973

    申请日:2014-06-10

    Abstract: An optical sensor includes an optical fiber inscribed with a repeated refraction pattern such that light scattered from a location on the optical fiber is scattered at multiple frequencies in a range of frequencies. The inscribed patterns overlap at every measurement point along at least a portion of the length of the sensor. An optical sensing system including control circuitry coupled to the optical fiber detects measurement scatter data from the optical fiber over the range of frequencies, determines a change in the detected measurement scatter data over the range of frequencies, and extracts a parameter describing a state of the optical fiber from the determined change in the detected measurement scatter data. The sensor may be made by inscribing a first light refracting pattern on the optical fiber at every measurement point along at least a portion of the length of the sensor and inscribing a second light refracting pattern on the optical fiber that overlaps the first inscribed light refracting pattern at every measurement point along at least that portion of the length of the sensor.

    Abstract translation: 光学传感器包括内接有重复折射图案的光纤,使得从光纤上的位置散射的光在频率范围内以多个频率散射。 刻印图案沿着传感器长度的至少一部分在每个测量点处重叠。 包括耦合到光纤的控制电路的光学感测系统在频率范围内检测来自光纤的测量散射数据,确定在频率范围上检测到的测量散射数据的变化,并且提取描述 光纤从检测到的测量散射数据中确定的变化。 传感器可以通过沿着传感器的长度的至少一部分的每个测量点在光纤上刻上第一光折射图案并且在与第一内接光折射图案重叠的光纤上刻划第二光折射图案 在每个测量点沿传感器长度的至少那部分。

    INNER LAYER MEASUREMENT METHOD AND INNER LAYER MEASUREMENT DEVICE
    8.
    发明申请
    INNER LAYER MEASUREMENT METHOD AND INNER LAYER MEASUREMENT DEVICE 有权
    内层测量方法和内层测量装置

    公开(公告)号:US20160097921A1

    公开(公告)日:2016-04-07

    申请号:US14859208

    申请日:2015-09-18

    Abstract: In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

    Abstract translation: 在内层测定方法中,通过改变通过短路滤波器透射从灯发出的光的位置中的至少一个,形成具有比第一照射光长的峰值波长的第一照射光和第二照射光, 从灯发出的光透过长通滤光器的位置。 然后,通过用第一照射光照射第一XY截面来测量半透明体的第一XY截面。 通过用第二照射光照射第二XY截面来测量位于比第一XY截面更深的层的第二XY截面。 短路滤波器和长距离滤波器中的每一个可以透射光,并且具有根据发射光的位置改变截止波长的性质。

    Interferometric device with extrinsic optical fiber for measuring a physical parameter
    9.
    发明授权
    Interferometric device with extrinsic optical fiber for measuring a physical parameter 有权
    具有用于测量物理参数的外在光纤的干涉仪

    公开(公告)号:US09080847B2

    公开(公告)日:2015-07-14

    申请号:US13810453

    申请日:2011-07-27

    Abstract: An extrinsic optical fiber device for measuring a physical parameter, includes: a light source, of central wavelength λ, an optical fiber projecting, a unit for detecting an interferometric signal, the interferometric signal including the information about the physical parameter to be determined, elements for modulating a signal emitted by the light source, elements for calculating the physical parameter on the basis of the interferometric signal measured by the detection unit. The modulated signal from the light source includes an alternating component including a double frequency modulation generated by the modulation elements. The main application of this device is the measurement of the displacement of a target.

    Abstract translation: 用于测量物理参数的外在光纤装置包括:中心波长λ的光源,光纤投射,用于检测干涉信号的单元,干涉信号包括关于待确定的物理参数的信息,元素 用于调制由光源发射的信号,用于根据由检测单元测量的干涉信号来计算物理参数的元件。 来自光源的调制信号包括包括由调制元件产生的双频调制的交替分量。 该装置的主要应用是测量目标的位移。

    Multi-wavelength interferometer, measurement apparatus, and measurement method
    10.
    发明授权
    Multi-wavelength interferometer, measurement apparatus, and measurement method 有权
    多波长干涉仪,测量装置和测量方法

    公开(公告)号:US09062957B2

    公开(公告)日:2015-06-23

    申请号:US13657631

    申请日:2012-10-22

    Inventor: Akihiro Yamada

    Abstract: A multi-wavelength interferometer includes a beam splitter configured to split plural light fluxes into a reference beam and a measurement beam, a frequency shifter configured to shift a frequency of at least one of the reference beam and the measurement beam to make the frequencies of the reference beam and the measurement beam different from each other, an optical system configured to cause the measurement beam to be incident on a measurement surface and to cause the measurement beam reflected from the measurement surface to interfere with the reference beam to obtain interference light, a dividing unit configured to divide the interference light into a plurality of light beams, and a detection unit configured to detect the plurality of light beams divided by the dividing unit.

    Abstract translation: 多波长干涉仪包括:分束器,被配置为将多个光束分成参考光束和测量光束;频移器,被配置为移动参考光束和测量光束中的至少一个的频率, 参考光束和测量光束彼此不同;光学系统,被配置为使得测量光束入射到测量表面上并且使得从测量表面反射的测量光束干涉参考光束以获得干涉光, 被配置为将干涉光分成多个光束的分割单元和被配置为检测由分割单元划分的多个光束的检测单元。

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