公开(公告)号：US20110290639A1

公开(公告)日：2011-12-01

申请号：US12790684

申请日：2010-05-28

Applicant: Manuel Gamero-Castano ,  Mahesh Mahadevan ,  R. Mahadeva Sarma

Inventor： Manuel Gamero-Castano ,  Mahesh Mahadevan ,  R. Mahadeva Sarma

IPC: C23C14/34

CPC classification number: H01J37/08 ,  G01N23/2258 ,  H01J37/3053 ,  H01J49/0004 ,  H01J2237/0812 ,  H01J2237/31713 ,  H01J2237/31745

Abstract: A method for milling of a workpiece of inert material by nanodroplet beam sputtering includes the steps of providing a liquid; electrohydrodynamically atomizing the liquid to form charged nanodroplets; and directing the atomized charged nanodroplets onto the workpiece to selectively remove material. The method is used for broad-beam milling the workpiece of inert material, for precision micromachining and/or for three dimensionally profiling organic samples via secondary ion mass spectrometry. The liquid is electrosprayed in a cone-jet mode in a vacuum and average nanodroplet diameter, nanodroplet velocity, and molecular energy of the nanodroplets is adjusted by changing liquid flow rate and the acceleration voltage applied to the ionic liquid as it is atomized. Apparatus for performing the method are also included embodiments.

Abstract translation: 通过纳米质子束溅射法研磨惰性材料的工件的方法包括提供液体的步骤; 电液动力雾化液体以形成带电的纳米微滴; 并将雾化的带电纳米线引导到工件上以选择性地去除材料。 该方法用于通过二次离子质谱法对惰性材料的工件进行宽幅铣削，用于精密微加工和/或三维分析有机样品。 液体以真空中的锥形喷射模式电喷雾，并且通过改变液体流速和在其被雾化时施加到离子液体的加速电压来调节纳米滴的平均纳米滴定直径，纳米滴定速度和分子能量。 用于执行该方法的装置也包括实施例。

公开(公告)号：US20120286149A1

公开(公告)日：2012-11-15

申请号：US13561761

申请日：2012-07-30

Applicant: Manuel Gamero-Castano ,  Mahesh Mahadevan ,  R. Mahadeva Sarma

Inventor： Manuel Gamero-Castano ,  Mahesh Mahadevan ,  R. Mahadeva Sarma

IPC: H01J3/18 ,  H01J49/10

CPC classification number: H01J37/08 ,  G01N23/2258 ,  H01J37/3053 ,  H01J49/0004 ,  H01J2237/0812 ,  H01J2237/31713 ,  H01J2237/31745

Abstract: A method for milling of a workpiece of inert material by nanodroplet beam sputtering includes the steps of providing aliquid; electrohydrodynamically atomizing the liquid to form charged nanodroplets; and directing the atomized charged nanodroplets onto the workpiece to selectively remove material. The method is used for broad-beam milling the workpiece of inert material, for precision micromachining and/or for three dimensionally profiling organic samples via secondary ion mass spectrometry. The liquid is electrosprayed in a cone-jet mode in a vacuum and average nanodroplet diameter, nanodroplet velocity, and molecular energy of the nanodroplets is adjusted by changing liquid flow rate and the acceleration voltage applied to the ionic liquid as it is atomized. Apparatus for performing the method are also included embodiments.

Abstract translation: 通过纳米质子束溅射法研磨惰性材料的工件的方法包括提供液体的步骤; 电液动力雾化液体以形成带电的纳米微滴; 并将雾化的带电纳米线引导到工件上以选择性地去除材料。 该方法用于通过二次离子质谱法对惰性材料的工件进行宽幅铣削，用于精密微加工和/或三维分析有机样品。 液体以真空中的锥形喷射模式电喷雾，并且通过改变液体流速和在其被雾化时施加到离子液体的加速电压来调节纳米滴的平均纳米滴定直径，纳米滴定速度和分子能量。 用于执行该方法的装置也包括实施例。