公开(公告)号：US20120040490A1

公开(公告)日：2012-02-16

申请号：US13133919

申请日：2009-10-02

申请人： Marco Gallazzo ,  Timothy W. Weidman ,  Andrea Baccini ,  Sunhom (Steve) Paak ,  Hongbin Fang ,  Zhenhua Zhang

发明人： Marco Gallazzo ,  Timothy W. Weidman ,  Andrea Baccini ,  Sunhom (Steve) Paak ,  Hongbin Fang ,  Zhenhua Zhang

IPC分类号： H01L31/18 ,  B05C11/00

CPC分类号： H01L31/022425 ,  H01L21/67253 ,  H01L31/0236 ,  H01L31/02363 ,  H01L31/0288 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： Embodiments of the invention also generally provide a solar cell formation process that includes the formation of metal contacts over heavly doped regions that are formed in a desired pattern on a surface of a substrate. Embodiments of the invention also provide an inspection system and supporting hardware that is used to reliably position a similarly shaped, or patterned, metal contact structure on the patterned heavily doped regions to allow an Ohmic contact to be made. The metal contact structure, such as fingers and busbars, are formed on the heavily doped regions so that a high quality electrical connection can be formed between these two regions.

摘要翻译： 本发明的实施例还通常提供一种太阳能电池形成方法，其包括在衬底表面上以所需图案形成的重掺杂区域上形成金属触点。 本发明的实施例还提供了一种检查系统和支撑硬件，其用于在图案化的重掺杂区域上可靠地定位类似形状或图案化的金属接触结构，以允许进行欧姆接触。 在重掺杂区域上形成诸如指状物和母线的金属接触结构，从而可以在这两个区域之间形成高质量的电连接。

公开(公告)号：US08673679B2

公开(公告)日：2014-03-18

申请号：US13133919

申请日：2009-10-02

申请人： Marco Gallazzo ,  Timothy W. Weidman ,  Andrea Baccini ,  Sunhom (Steve) Paak ,  Hongbin Fang ,  Zhenhua Zhang

发明人： Marco Gallazzo ,  Timothy W. Weidman ,  Andrea Baccini ,  Sunhom (Steve) Paak ,  Hongbin Fang ,  Zhenhua Zhang

IPC分类号： H01L21/00

CPC分类号： H01L31/022425 ,  H01L21/67253 ,  H01L31/0236 ,  H01L31/02363 ,  H01L31/0288 ,  H01L31/068 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： Embodiments of the invention also generally provide a solar cell formation process that includes the formation of metal contacts over heavily doped regions that are formed in a desired pattern on a surface of a substrate. Embodiments of the invention also provide an inspection system and supporting hardware that is used to reliably position a similarly shaped, or patterned, metal contact structure on the patterned heavily doped regions to allow an Ohmic contact to be made. The metal contact structure, such as fingers and busbars, are formed on the heavily doped regions so that a high quality electrical connection can be formed between these two regions.

摘要翻译： 本发明的实施例还通常提供一种太阳能电池形成工艺，其包括在基底表面上以所需图案形成的重掺杂区域上形成金属触点。 本发明的实施例还提供了一种检查系统和支撑硬件，其用于在图案化的重掺杂区域上可靠地定位类似形状或图案化的金属接触结构，以允许进行欧姆接触。 在重掺杂区域上形成诸如指状物和母线的金属接触结构，从而可以在这两个区域之间形成高质量的电连接。