Focusing apparatus and method
    1.
    发明授权
    Focusing apparatus and method 有权
    聚焦设备和方法

    公开(公告)号:US08498048B2

    公开(公告)日:2013-07-30

    申请号:US13296975

    申请日:2011-11-15

    Abstract: A focusing apparatus for use with an optical system having a high NA objective lens includes an image forming and capturing mechanism for forming an image in an intermediate image zone and for capturing an image by receiving and refocusing light from a selected focal plane within the intermediate image zone, and a focus adjusting mechanism for adjusting the position of the selected focal plane within the intermediate image zone. The image forming and capturing mechanism includes at least one high NA lens. In use, spherical aberration introduced by the high NA objective lens is reduced.

    Abstract translation: 用于具有高NA物镜的光学系统的聚焦装置包括用于在中间图像区域中形成图像的图像形成和捕获机构,并且用于通过在中间图像内接收和重新聚焦来自所选焦平面的光来捕获图像 以及用于调整所述中间图像区域内的所选焦平面的位置的焦点调节机构。 图像形成和捕获机构包括至少一个高NA透镜。 在使用中,降低了由高NA物镜引入的球面像差。

    Wavefront sensing device
    2.
    发明授权
    Wavefront sensing device 失效
    波前感测装置

    公开(公告)号:US06570143B1

    公开(公告)日:2003-05-27

    申请号:US09787705

    申请日:2001-05-21

    CPC classification number: G01J9/00

    Abstract: The wavefront sensing device consists of a light source, a binary phase mask (10), a fixed focus lens (11) and at least two finite sized spatially separated detectors (12) positioned in the plane of focus of the wavefront sensing device. The binary phase mask (10) simultaneously applies a positive bias and a negative bias to the wavefront of the incident light such that a pair of spatially separated light points are generated in the plane of focus and detected by the detectors (12). The difference in intensity between the pair of light points is representative of the aberration of the wavefront of the incident light from the ideal.

    Abstract translation: 波前感测装置包括光源,二进制相位掩模(10),固定焦距透镜(11)和位于波前感测装置的焦平面中的至少两个有限大小的空间分离的检测器(12)。 二进制相位掩模(10)同时对入射光的波阵面施加正偏压和负偏压,使得在焦平面中产生一对空间分离的光点并由检测器(12)检测。 一对光点之间的强度差表示来自理想的入射光的波前像差。

    FOCUSING APPARATUS AND METHOD
    3.
    发明申请
    FOCUSING APPARATUS AND METHOD 有权
    聚焦装置和方法

    公开(公告)号:US20100053735A1

    公开(公告)日:2010-03-04

    申请号:US12519517

    申请日:2007-12-20

    Abstract: A focusing apparatus for use with an optical system having a high NA objective lens (20) includes an image forming and capturing means (26) for forming an image in an intermediate image zone (44), and for capturing an image by receiving and refocusing light from a selected focal plane within said intermediate image zone, and a focus adjusting means (28) for adjusting the position of the selected focal plane within the intermediate image zone. The image forming and capturing means (26) includes at least one high NA lens. In use, spherical aberration introduced by the high NA objective lens (20) is reduced.

    Abstract translation: 一种与具有高NA物镜(20)的光学系统一起使用的聚焦装置包括用于在中间图像区域(44)中形成图像的图像形成和捕获装置(26),并且用于通过接收和重新聚焦来捕获图像 来自所述中间图像区域内的所选焦平面的光;以及用于调整所述中间图像区域内的所选择的焦平面的位置的聚焦调整装置(28)。 图像形成和捕获装置(26)包括至少一个高NA透镜。 在使用中,降低了由高NA物镜(20)引入的球面像差。

    Focusing apparatus and method
    4.
    发明授权
    Focusing apparatus and method 有权
    聚焦设备和方法

    公开(公告)号:US08144395B2

    公开(公告)日:2012-03-27

    申请号:US12519517

    申请日:2007-12-20

    Abstract: A focusing apparatus for use with an optical system having a high NA objective lens includes an image forming and capturing apparatus for forming an image in an intermediate image zone, and for capturing an image by receiving and refocusing light from a selected focal plane within the intermediate image zone, and a focus adjusting apparatus for adjusting the position of the selected focal plane within the intermediate image zone. The image forming and capturing apparatus includes at least one high NA lens. In use, spherical aberration introduced by the high NA objective lens is reduced.

    Abstract translation: 用于具有高NA物镜的光学系统的聚焦装置包括用于在中间图像区域中形成图像的图像形成和捕获装置,并且用于通过在中间图像区域内接收和重新聚焦来自所选焦平面的光来捕获图像 图像区域,以及用于调整所述中间图像区域内的所选焦平面的位置的聚焦调节装置。 图像形成和捕获装置包括至少一个高NA透镜。 在使用中,降低了由高NA物镜引入的球面像差。

    FOCUSING APPARATUS AND METHOD
    5.
    发明申请
    FOCUSING APPARATUS AND METHOD 有权
    聚焦装置和方法

    公开(公告)号:US20120062986A1

    公开(公告)日:2012-03-15

    申请号:US13296975

    申请日:2011-11-15

    Abstract: A focusing apparatus for use with an optical system having a high NA objective lens includes an image forming and capturing mechanism for forming an image in an intermediate image zone and for capturing an image by receiving and refocusing light from a selected focal plane within the intermediate image zone, and a focus adjusting mechanism for adjusting the position of the selected focal plane within the intermediate image zone. The image forming and capturing mechanism includes at least one high NA lens. In use, spherical aberration introduced by the high NA objective lens is reduced.

    Abstract translation: 用于具有高NA物镜的光学系统的聚焦装置包括用于在中间图像区域中形成图像的图像形成和捕获机构,并且用于通过在中间图像内接收和重新聚焦来自所选焦平面的光来捕获图像 以及用于调整所述中间图像区域内的所选焦平面的位置的焦点调节机构。 图像形成和捕获机构包括至少一个高NA透镜。 在使用中,降低了由高NA物镜引入的球面像差。

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