公开(公告)号：US06787745B2

公开(公告)日：2004-09-07

申请号：US10042947

申请日：2002-01-08

Applicant: Roger A. Hajjar ,  Frank Whitehead

Inventor： Roger A. Hajjar ,  Frank Whitehead

IPC: G01J120

CPC classification number: G02B6/35 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3562 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3592 ,  G02B6/3598

Abstract: Switchable two-fiber systems to provide a backup fiber link to a signal detector where the backup signal is switched to the signal detector when the primary signal fails.

Abstract translation: 可切换的双光纤系统提供备用光纤链路到信号检测器，当主信号出现故障时，备用信号切换到信号检测器。

公开(公告)号：US06747256B1

公开(公告)日：2004-06-08

申请号：US10108731

申请日：2002-03-27

Applicant: John Anthony Tejada ,  Joseph F. Borchard ,  Erwin Cooper

Inventor： John Anthony Tejada ,  Joseph F. Borchard ,  Erwin Cooper

IPC: G01J120

CPC classification number: F41G3/326 ,  G01J1/58 ,  G01J3/0289

Abstract: A system and method for optical alignment of a color imaging system includes illuminating a target plate with a laser beam. Photo-luminescent energy from the target plate is emitted in response to the laser beam. A color imaging system is aligned based on the photo-luminescent energy emitted at the target plate.

Abstract translation: 用于彩色成像系统的光学对准的系统和方法包括用激光束照射目标板。 响应于激光束发射来自靶板的光致发光能量。 基于在靶板处发射的光致发光能量，对彩色成像系统进行对准。

公开(公告)号：US06723974B1

公开(公告)日：2004-04-20

申请号：US09246004

申请日：1999-02-10

Applicant: Gunther Sepp

Inventor： Gunther Sepp

IPC: G01J120

CPC classification number: F41H13/0056

Abstract: A process for the adaptive beam control of medium-energy laser weapons for fighting electro-optical sensors and windows, wherein the behavior of the laser power reflected from a bright spot of the target and measured by a thermal image apparatus during increasing irradiation intensity is analyzed during a phase of measurement. The laser power to be emitted that will lead to the desired laser beam diameter or to the highest possible laser intensity at the target during the subsequent phase of fighting is then derived by calculation from this as well as other parameters influencing the thermal beam expansion. It is thus made possible that the laser does not always have to be operated with the maximum power, but only with the currently needed power during the phase of fighting, so that a saving is achieved in the consumption of primary laser energy. One example is explained.

Abstract translation: 一种用于对电光传感器和窗户进行打击的中等能量激光武器的自适应光束控制的过程，其中分析了在增加辐射强度期间从目标的亮点反射并由热像仪设备测量的激光功率的行为 在测量阶段。 随后的战斗阶段，将产生将导致所需激光束直径或达到目标的最高可能激光强度的待发射的激光功率，然后通过计算以及影响热束扩展的其他参数得到。 因此，激光器并不总是必须以最大功率运行，而是仅在战斗阶段期间具有当前需要的功率，从而在初级激光能量的消耗中实现节省。 一个例子被解释。

公开(公告)号：US06495812B1

公开(公告)日：2002-12-17

申请号：US09631190

申请日：2000-08-02

Applicant: John Henry Wurm ,  Donald Thomas Lamb

Inventor： John Henry Wurm ,  Donald Thomas Lamb

IPC: G01J120

CPC classification number: G02B7/28

Abstract: The preferred embodiments described herein provide an apparatus and method for intersecting a light beam and a focal point of a detector at an object of interest. In one preferred embodiment, an apparatus is provided comprising a first support element and a first member carrying a light source and a detector. The first member is pivotable between first and second positions, and when the first member is in the first position, a light beam generated by the light source and a focal point of the detector intersect at an object of interest carried by the first support element. When the first member is in the second position, the light beam and the focal point of the detector intersect at an object of interest carried by a second support element disposed on the first support element.

Abstract translation: 这里描述的优选实施例提供了一种用于在感兴趣的对象处将光束和检测器的焦点相交的装置和方法。 在一个优选实施例中，提供了包括第一支撑元件和承载光源和检测器的第一元件的装置。 第一构件可在第一和第二位置之间枢转，并且当第一构件处于第一位置时，由光源产生的光束和检测器的焦点在由第一支撑元件承载的关注对象物处相交。 当第一构件处于第二位置时，检测器的光束和焦点在由设置在第一支撑元件上的第二支撑元件承载的感兴趣物体处相交。

公开(公告)号：US06483091B1

公开(公告)日：2002-11-19

申请号：US09427967

申请日：1999-10-27

Applicant: John W. Sadler ,  Kenneth L. Staton

Inventor： John W. Sadler ,  Kenneth L. Staton

IPC: G01J120

CPC classification number: G02B7/28

Abstract: An inner control loop controls the relative position of a surface to be scanned with respect to a focal plane. An outer control loop responds to the location of the surface to be scanned with respect to a focal plane of the scan lens to generate a setpoint for the inner control loop. A sample-and-hold element disposed between the inner and outer control loops is switched by an edge or defect detector. It is preferred that the outer control loop has a time constant in the range of three to ten times longer than that of the inner control loop. The sample-and-hold element provides a gradual state transition upon the occurrence of an edge or a surface defect.

Abstract translation: 内部控制环控制相对于焦平面的待扫描表面的相对位置。 外部控制环路相对于扫描透镜的焦平面响应待扫描表面的位置，以产生用于内部控制回路的设定点。 设置在内外控制回路之间的采样保持元件由边缘或缺陷检测器切换。 优选的是，外部控制回路的时间常数在内部控制回路的3〜10倍的范围内。 采样和保持元件在发生边缘或表面缺陷时提供逐渐状态转换。

公开(公告)号：US06362480B1

公开(公告)日：2002-03-26

申请号：US09391537

申请日：1999-09-08

Applicant: Fritz Peter ,  Claus Pohan

Inventor： Fritz Peter ,  Claus Pohan

IPC: G01J120

CPC classification number: G01T1/2018 ,  G01T1/1612

Abstract: A radiation detector, particularly for a computed tomography apparatus, has a scintillator as well as a photodiode array allocated thereto, these being connected to measuring electronics via an electrical connection. A transparent film with interconnects is arranged between the scintillator and the photodiode array.

Abstract translation: 特别是用于计算机断层摄影装置的放射线检测器具有闪烁体以及分配给其的光电二极管阵列，它们通过电连接连接到测量电子器件。 具有互连的透明膜布置在闪烁体和光电二极管阵列之间。

公开(公告)号：US06825454B2

公开(公告)日：2004-11-30

申请号：US10473830

申请日：2004-02-19

Applicant: Norbert Czarnetzki ,  Thomas Scheruebl ,  Stefan Mack ,  Toshiro Kurosawa ,  Eckard Hagemann

Inventor： Norbert Czarnetzki ,  Thomas Scheruebl ,  Stefan Mack ,  Toshiro Kurosawa ,  Eckard Hagemann

IPC: G01J120

CPC classification number: G02B21/0024 ,  G02B7/34 ,  G02B21/004 ,  G02B21/006 ,  G02B21/245

Abstract: The invention is directed to an arrangement for autofocusing onto a measuring location on an object moving in a direction which is at least approximately vertical to the optical axis of the imaging optics. According to the invention, a diaphragm device is to be provided the diaphragm opening of which extends in a direction aligned with the direction of movement of the measuring location; a receiving device for the measuring light has receiving areas arranged in a row beside each other and is inclined relative to the optical axis so that the image from the diaphragm device is incident on the receiving areas at an inclination of an angle &agr;; wherein the receiving device and the diaphragm opening are positioned relative to each other in such a way that characteristic measuring values are measured on the receiving areas when the measuring location is in or near the focus position. An evaluating device compares the measured values read sequentially from the receiving areas with stored desired values and from them generates signals, for example, for a microscope arrangement and/or—if deviations have been determined—for correcting signals for a relocation device by means of which the relocation of the direction of movement into the focal plane of the imaging optics is effected.

Abstract translation: 本发明涉及一种用于自动聚焦到在至少大致垂直于成像光学器件的光轴的方向移动的物体上的测量位置上的装置。 根据本发明，隔膜装置的隔膜装置将沿着与测量位置的移动方向一致的方向延伸; 用于测量光的接收装置具有彼此相邻布置的接收区域，并且相对于光轴倾斜，使得来自隔膜装置的图像以角度α的倾斜入射到接收区域; 其中所述接收装置和所述光阑开口相对于彼此定位，使得当所述测量位置在聚焦位置中或附近时，在所述接收区域上测量特征测量值。 评估装置将从接收区域顺序读取的测量值与存储的期望值进行比较，并且从它们生成例如用于显微镜装置的信号和/或如果已经确定了偏差，则用于通过以下方式来校正重新定位装置的信号： 其中运动方向的重新定位进入成像光学器件的焦平面。

公开(公告)号：US06707020B1

公开(公告)日：2004-03-16

申请号：US09753321

申请日：2000-12-28

Applicant: Robert W. Praus, II ,  Daniel Eastman

Inventor： Robert W. Praus, II ,  Daniel Eastman

IPC: G01J120

CPC classification number: G01J9/00

Abstract: An adaptive dynamic wavefront sensor and corresponding method comprising a spatial light modulator and a lenslet array. A subarray of pixels of the spatial light modulator controls illumination of a lenslet of the lenslet array. The sub-array can operate as a shutter for the corresponding lenslet or to control intensity of a focus of the lenslet.

Abstract translation: 一种自适应动态波前传感器和包括空间光调制器和小透镜阵列的相应方法。 空间光调制器的像素的子阵列控制小透镜阵列的小透镜的照明。 子阵列可以作为相应小透镜的快门来操作或者控制小透镜的焦点的强度。

公开(公告)号：US06683290B2

公开(公告)日：2004-01-27

申请号：US10033332

申请日：2001-12-28

Applicant: Donald B. Doherty

Inventor： Donald B. Doherty

IPC: G01J120

CPC classification number: H04N9/3179 ,  G09G3/34 ,  G09G3/3406 ,  G09G3/346 ,  G09G3/3607 ,  G09G2310/0235 ,  H04N5/7416

Abstract: A method and system of detecting whether the intensity of light incident a spatial light modulator varies periodically. One embodiment provides a method of operating a spatial light modulator, the method comprising: determining a peak level of light incident the modulator over a period of time; setting a threshold level equal to a fraction of the peak level; monitoring a current level of light incident the modulator; comparing the current level of light and the threshold level; and disabling the modulator based on the comparison. Another embodiment provides a modulator array. The modulator comprises: a photosensitive circuit for outputting a light intensity signal representative of a level of light incident the photosensitive circuit; a threshold detection circuit 400 receiving the light intensity signal 402 and outputting an under threshold signal 408 indicative of whether the intensity signal is less than a threshold level; and a duty cycle detection circuit 410 for monitoring the under threshold signal 408 and outputting a disable signal 418 indicative of the duty cycle of the under threshold signal 408. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. §1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

Abstract translation: 检测入射到空间光调制器的光的强度是否周期性变化的方法和系统。 一个实施例提供了一种操作空间光调制器的方法，所述方法包括：确定在一段时间内入射到调制器的光的峰值电平; 设置等于峰值电平的一小部分的阈值电平; 监测当前调制器入射光的水平; 比较目前的光照水平和阈值水平; 并根据比较禁用调制器。 另一个实施例提供一种调制器阵列。 调制器包括：用于输出表示入射到光敏电路的光的电平的光强度信号的光敏电路; 阈值检测电路400接收光强度信号402并输出指示强度信号是否小于阈值电平的阈值信号408; 以及占空比检测电路410，用于监视欠阈值信号408并输出指示低于阈值信号408的占空比的禁用信号418.前面的摘要被提交，理解是它仅用于协助确定 从粗略检查，37 CFR中描述的技术披露的性质和要点 §1.72（b）。 在任何情况下，本摘要不得用于解释任何专利权利要求的范围。

公开(公告)号：US06633050B1

公开(公告)日：2003-10-14

申请号：US09638902

申请日：2000-08-15

Applicant: Joseph H. Lyons

Inventor： Joseph H. Lyons

IPC: G01J120

CPC classification number: H01L21/681 ,  G03F9/7003 ,  G03F9/7026 ,  G03F9/7034

Abstract: A virtual gauging system for use in a lithographic process is described that includes means for gauging a region at a surface of a wafer when the region is located away from an axis of illumination producing wafer surface data, while other portions of the wafer are being illuminated. The system also includes means for converting the wafer surface data into wafer correction data and means for adjusting a separation distance between an exposure lens and the region at the surface of the wafer based on the correction data when the region is located at the axis of illumination. The means for gauging includes at least two wafer surface gauges located on opposite sides of an illumination slot. The means for converting the wafer surface data into wafer correction data includes means for determining a direction of travel of the wafer, and the wafer correction data is based on data produced by one of the two wafer surface gauges located on the side of the illumination slot that corresponds to the direction of travel of the wafer. The means for converting the wafer surface data into wafer correction data includes a finite-impulse-response filter, and the finite-impulse-response filter is triggered by a spatial interrupt and has a width that can be modified in response to the velocity of travel of the wafer.

Abstract translation: 描述了一种在光刻工艺中使用的虚拟测量系统，其包括当该区域远离产生晶片表面数据的照明轴线时测量晶片表面上的区域的装置，同时晶片的其它部分被照亮 。 该系统还包括用于将晶片表面数据转换成晶片校正数据的装置，以及用于当区域位于照明轴处时基于校正数据调整曝光透镜与晶片表面之间的间隔距离的装置 。 用于测量的装置包括位于照明槽的相对侧上的至少两个晶片表面量规。 用于将晶片表面数据转换成晶片校正数据的装置包括用于确定晶片的行进方向的装置，并且晶片校正数据基于由位于照明槽侧面的两个晶片表面测量仪之一产生的数据 其对应于晶片的行进方向。 用于将晶片表面数据转换成晶片校正数据的装置包括有限脉冲响应滤波器，并且有限脉冲响应滤波器由空间中断触发并且具有响应于行进速度而被修改的宽度 的晶圆。