-
公开(公告)号:US6013414A
公开(公告)日:2000-01-11
申请号:US357789
申请日:1994-12-16
CPC分类号: G03F7/037 , G03F7/0387 , Y10S430/107
摘要: Photosensitive compositions containing a polyimide precursor and a complex cation of a polymerizable carboxylic acid functional compound with a tertiary amino functional group; and use thereof to provide a pattern.
-
公开(公告)号:US6010832A
公开(公告)日:2000-01-04
申请号:US441965
申请日:1995-05-16
CPC分类号: G03F7/037 , G03F7/0387 , Y10S430/107
摘要: Photosensitive compositions containing a polyimide precursor and a complex cation of a polymerizable carboxylic acid functional compound with a tertiary amino functional group; and use thereof to provide a pattern.
摘要翻译: 含有聚酰亚胺前体和具有叔氨基官能团的可聚合羧酸官能化合物的络合阳离子的光敏组合物; 并使用它来提供图案。
-