Developing solution and development processing method of photosensitive resin composition

    公开(公告)号:US09891527B2

    公开(公告)日:2018-02-13

    申请号:US14168305

    申请日:2014-01-30

    摘要: A developing solution for a polyimide precursor containing N,N,N′,N′-tetramethylurea and a lower alcohol having 1 to 5 carbon atoms. The developing solution increases a development margin and results in little or no decrease of the film thickness of a polyimide-based resin film. A development processing method of a photosensitive polyimide resin composition including developing a photosensitive polyimide precursor resin composition, at least a part of which is exposed, with the developing solution; and a pattern formation method including forming a coating film or molding including a photosensitive polyimide precursor resin composition, selectively exposing the coating film or molding, and developing the exposed coating film or molding by the development processing method.

    Energy-sensitive resin composition
    9.
    发明授权
    Energy-sensitive resin composition 有权
    能量敏感树脂组合物

    公开(公告)号:US09529258B2

    公开(公告)日:2016-12-27

    申请号:US14758199

    申请日:2013-12-25

    摘要: The present invention provides an energy-sensitive resin composition, a method of manufacturing a polyimide film or a polyimide molded product in which said composition is used, and a method of forming a pattern in which said composition is used. The composition supplies a polyimide resin exhibiting exceptional thermal resistance and low permittivity even by a heat treatment at a low temperature. The composition contains polyamic acid obtained by reacting tetracarboxylic dianhydride and diamine, a solvent, and a compound (A) decomposing by the action of light and/or heat and generating a base and/or an acid. The method of manufacturing a polyimide film or a polyimide molded product includes forming a coating film or molded product comprising the composition and decomposing the compound (A) in the film or product through exposure or heating. The method of forming a pattern sequentially includes forming, selectively exposing, developing and heating the film or product.

    摘要翻译: 本发明提供一种能量敏感性树脂组合物,其中使用所述组合物的聚酰亚胺薄膜或聚酰亚胺模塑制品的制造方法以及形成所述组合物的图案的方法。 该组合物即使通过在低温下进行热处理也提供具有优异的耐热性和低介电常数的聚酰亚胺树脂。 该组合物含有通过使四羧酸二酐和二胺,溶剂和通过光和/或热的作用分解并产生碱和/或酸的化合物(A)反应而获得的聚酰胺酸。 制造聚酰亚胺膜或聚酰亚胺模塑制品的方法包括形成包含该组合物的涂膜或模制品,并通过曝光或加热分解膜或产品中的化合物(A)。 顺序形成图案的方法包括成膜,选择性地曝光,显影和加热薄膜或产品。