公开(公告)号：US20060113473A1

公开(公告)日：2006-06-01

申请号：US11326399

申请日：2006-01-06

申请人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

发明人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

IPC分类号： G21K7/00

CPC分类号： H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。

公开(公告)号：US07022988B2

公开(公告)日：2006-04-04

申请号：US10467303

申请日：2001-02-28

申请人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

发明人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。

公开(公告)号：US07385198B2

公开(公告)日：2008-06-10

申请号：US11326399

申请日：2006-01-06

申请人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

发明人： Yoshifumi Taniguchi ,  Mikio Ichihashi ,  Masanari Kouguchi

IPC分类号： H01J37/26

CPC分类号： H01J37/28 ,  G01L1/241 ,  G01L5/0047 ,  G01N23/20 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/2955 ,  H01J2237/24585 ,  H01J2237/2544 ,  H01J2237/2813 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (23, 26), and the displacement of position of a diffraction spot (32, 33) is measured by a two-dimensional position-sensitive electron detector (13). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

摘要翻译： 用于测量微区物理特性的方法和装置以高分辨率和灵敏度实时测量应力/应变的二维分布以及高水平的测量位置匹配。 扫描样品并用精细聚焦的电子束（23,26）照射，并且通过二维位置敏感电子检测器（13）测量衍射光斑（32,33）的位置位移。 将位移量作为电压值输出，然后根据纳米衍射方法的原理将其转换为应力/应变的大小，并且与样本位置信号同步地显示幅度。