公开(公告)号：US06259960B1

公开(公告)日：2001-07-10

申请号：US08962585

申请日：1997-10-31

申请人： Masayuki Inokuchi

发明人： Masayuki Inokuchi

IPC分类号： G06F1900

CPC分类号： G01N21/9501

摘要： There is disclosed a part inspecting system that can be easily operated by a human operator. This system has an inspected part information database holding part search information, preliminary inspection information, and review information. The part search information contains information about the positions and sizes of defects present on inspected parts. The review information is obtained from a review apparatus that makes a detailed inspection of the inspected parts. Each inspected part is set on an inspected part-holding member. Apart kind discriminating means is provided to permit the user to enter the kind of the inspected part. A preliminary inspection reading fetches preliminary inspection information about the inspected part specified by the part kind discriminating from the inspected part information database. The user selects a desired one from defects contained in the fetched preliminary inspection information. The selected defect is reviewed, or undergone a detailed inspection. The resulting information is stored in the inspected part information database.

摘要翻译： 公开了能够容易地由人操作者操作的部件检查系统。 该系统具有检查部分信息数据库，保存部分搜索信息，初步检查信息和审查信息。 部件搜索信息包含有关检测部件上存在的缺陷的位置和大小的信息。 检查信息是从对检查部件进行详细检查的检查装置获得的。 每个被检查部件设置在被检查的部件保持部件上。 提供了种类识别装置，以允许用户输入被检查部分的种类。 初步检查读取从被检查部件信息数据库中识别的部件种类指定的被检查部件的初步检查信息。 用户从获取的初步检查信息中包含的缺陷中选择所需的一个。 对所选择的缺陷进行检查，或进行详细检查。 所得信息存储在被检查部件信息数据库中。

公开(公告)号：US07671332B2

公开(公告)日：2010-03-02

申请号：US12117819

申请日：2008-05-09

申请人： Masayuki Inokuchi

发明人： Masayuki Inokuchi

IPC分类号： H01J37/21

CPC分类号： H01J37/28 ,  H01J37/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/28

摘要： An autofocus method for bringing an electron beam into focus on a specimen. Characteristics of the brightness at plural kinds of focus values are found for sets of data. The characteristics are accumulated creating a focus function. The focus function is approximated by a quadratic curve. The focus value at the peak point is found from the quadratic curve. Based on the focus value, the focal condition of the beam is set.

摘要翻译： 一种用于使电子束聚焦在样本上的自动聚焦方法。 针对数据集找到多种聚焦值的亮度特性。 积累的特征积累了焦点功能。 焦点函数用二次曲线近似。 峰值点的焦点值是从二次曲线中求出的。 基于焦点值，设置光束的焦点状态。

公开(公告)号：US20080283766A1

公开(公告)日：2008-11-20

申请号：US12117819

申请日：2008-05-09

申请人： Masayuki Inokuchi

发明人： Masayuki Inokuchi

IPC分类号： G21K1/08

CPC分类号： H01J37/28 ,  H01J37/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/28

摘要： An autofocus method for bringing an electron beam into focus on a specimen. Characteristics of the brightness at plural kinds of focus values are found for sets of data. The characteristics are accumulated creating a focus function. The focus function is approximated by a quadratic curve. The focus value at the peak point is found from the quadratic curve. Based on the focus value, the focal condition of the beam is set.

摘要翻译： 一种用于使电子束聚焦在样本上的自动聚焦方法。 针对数据集找到多种聚焦值的亮度特性。 积累的特征积累了焦点功能。 焦点函数用二次曲线近似。 峰值点的焦点值是从二次曲线中求出的。 基于焦点值，设置光束的焦点状态。