Method of manufacturing semiconductor device having a planarized surface
    2.
    发明授权
    Method of manufacturing semiconductor device having a planarized surface 失效
    具有平坦化表面的半导体器件的制造方法

    公开(公告)号:US5491113A

    公开(公告)日:1996-02-13

    申请号:US401063

    申请日:1995-03-08

    申请人: Masayuki Murota

    发明人: Masayuki Murota

    摘要: In a method of manufacturing a semiconductor device, an interlayer insulating film is formed along a surface of a semiconductor substrate having a stepped surface. A stopper surface is formed at least at a recess in the interlayer insulating film. The interlayer insulating film and the stopper film are polished until the interlayer insulating film and the stopper film are exposed on the same plane. The stopper film remaining after the polishing is etched and removed. The interlayer insulating film is polished and flattened.

    摘要翻译: 在制造半导体器件的方法中,沿着具有台阶表面的半导体衬底的表面形成层间绝缘膜。 至少在层间绝缘膜的凹部处形成止动面。 研磨层间绝缘膜和阻挡膜,直到层间绝缘膜和止挡膜在同一平面上露出。 蚀刻除去残留在抛光后的阻挡膜。 层间绝缘膜被抛光和平坦化。

    INPUT DEVICE AND ELECTRONIC DEVICE USING THE SAME
    3.
    发明申请
    INPUT DEVICE AND ELECTRONIC DEVICE USING THE SAME 审中-公开
    输入装置和使用该装置的电子装置

    公开(公告)号:US20110261520A1

    公开(公告)日:2011-10-27

    申请号:US12674450

    申请日:2008-12-18

    IPC分类号: G06F1/16

    摘要: An input device includes a print substrate having a plurality of electrostatic electrodes arranged on an upper surface at a periphery of a fit-in hole and a rotation operating body turnably assembled by being fitted to the fit-in hole of the print substrate. A rotation plate of the rotation operating body elastically deforms in a plate thickness direction when the rotation plate is pushed, and returns when pushing is released.

    摘要翻译: 输入装置包括具有布置在装配孔周边的上表面上的多个静电电极的印刷基板和通过装配到印刷基板的嵌合孔而可转动地组装的旋转操作体。 旋转操作体的旋转板在旋转板被推压时在板厚方向弹性变形,并且在推动被释放时返回。

    Semiconductor device having structure suitable for CMP process
    4.
    发明授权
    Semiconductor device having structure suitable for CMP process 失效
    半导体器件具有适用于CMP工艺的结构

    公开(公告)号:US6091130A

    公开(公告)日:2000-07-18

    申请号:US996402

    申请日:1997-12-22

    CPC分类号: H01L29/0657 H01L21/31053

    摘要: A convex portion is formed along the edge of a semiconductor substrate to surround a chip region on the main surface side of the semiconductor substrate. For example, the convex portion is formed part of the semiconductor substrate. The height of the convex portion is set to approximately the same height as the surface of an insulating film attained after the end of the CMP (chemical mechanical polishing) process effected for the insulating film. The width the of the convex portion is set smaller than the width from the edge of the semiconductor substrate to a position in front of the chip region. The semiconductor substrate is attached to a carrier and the CMP process is effected by use of a polishing pad and a slurry. At the time of CMP, since a local heavy load occurring in the edge portion of the semiconductor substrate is applied only to the convex portion, the wafer edge over-polishing will not occur.

    摘要翻译: 沿着半导体衬底的边缘形成凸部,以围绕半导体衬底的主表面侧的芯片区域。 例如,凸部形成半导体基板的一部分。 凸部的高度设定为在对绝缘膜进行CMP(化学机械抛光)处理结束后达到的绝缘膜的表面大致相同的高度。 凸部的宽度被设定为小于从半导体衬底的边缘到芯片区域前方的位置的宽度。 半导体衬底附接到载体上,并且CMP工艺通过使用抛光垫和浆料来实现。 在CMP时,由于仅在半导体基板的边缘部分产生的局部重负荷仅施加到凸部,所以不会发生晶片边缘抛光。

    Input device and electronic apparatus using same
    5.
    发明授权
    Input device and electronic apparatus using same 失效
    输入装置和使用其的电子装置

    公开(公告)号:US08143981B2

    公开(公告)日:2012-03-27

    申请号:US12567144

    申请日:2009-09-25

    IPC分类号: H01H9/00

    摘要: An input device has a housing having an operation hole formed therein, an operation member supported in a slidably moving manner in multi-directions within the operation hole, and at least two magnetic sensors, arranged at a periphery of the operation member, for detecting change in magnetic property by displacement of the operation member. The operation member includes a holder having a circular ring-shaped magnet incorporated in a fit-in hole and a central push button having a disc plate made of magnetic material integrated at a lower surface. The central push button is fitted in the circular ring-shaped magnet to adsorb, in a separable manner, the disc plate to the circular ring-shaped magnet and position-regulate the central push button.

    摘要翻译: 输入装置具有形成有操作孔的壳体,在操作孔内以多个方向以可滑动方式支撑的操作构件,以及设置在操作构件的周围的至少两个磁性传感器,用于检测变化 通过操作构件的位移而具有磁性。 操作构件包括具有结合在嵌合孔中的圆形环形磁体的保持器和具有集成在下表面的磁性材料制成的盘片的中央按钮。 中央按钮安装在圆形环形磁体中,以可分离的方式将盘片吸附到圆形环形磁体上并定位调节中央按钮。

    INPUT DEVICE AND ELECTRONIC APPARATUS USING SAME
    6.
    发明申请
    INPUT DEVICE AND ELECTRONIC APPARATUS USING SAME 失效
    使用相同的输入装置和电子装置

    公开(公告)号:US20100079225A1

    公开(公告)日:2010-04-01

    申请号:US12567144

    申请日:2009-09-25

    IPC分类号: H01H36/00

    摘要: An input device has a housing having an operation hole formed therein, an operation member supported in a slidably moving manner in multi-directions within the operation hole, and at least two magnetic sensors, arranged at a periphery of the operation member, for detecting change in magnetic property by displacement of the operation member. The operation member includes a holder having a circular ring-shaped magnet incorporated in a fit-in hole and a central push button having a disc plate made of magnetic material integrated at a lower surface. The central push button is fitted in the circular ring-shaped magnet to adsorb, in a separable manner, the disc plate to the circular ring-shaped magnet and position-regulate the central push button.

    摘要翻译: 输入装置具有形成有操作孔的壳体,在操作孔内以多个方向以可滑动方式支撑的操作构件,以及设置在操作构件的周围的至少两个磁性传感器,用于检测变化 通过操作构件的位移而具有磁性。 操作构件包括具有结合在嵌合孔中的圆形环形磁体的保持器和具有集成在下表面的磁性材料制成的盘片的中央按钮。 中央按钮安装在圆形环形磁体中,以可分离的方式将盘片吸附到圆形环形磁体上并定位调节中央按钮。