摘要:
In a method of manufacturing a semiconductor device, an interlayer insulating film is formed along a surface of a semiconductor substrate having a stepped surface. A stopper surface is formed at least at a recess in the interlayer insulating film. The interlayer insulating film and the stopper film are polished until the interlayer insulating film and the stopper film are exposed on the same plane. The stopper film remaining after the polishing is etched and removed. The interlayer insulating film is polished and flattened.
摘要:
An input device includes a print substrate having a plurality of electrostatic electrodes arranged on an upper surface at a periphery of a fit-in hole and a rotation operating body turnably assembled by being fitted to the fit-in hole of the print substrate. A rotation plate of the rotation operating body elastically deforms in a plate thickness direction when the rotation plate is pushed, and returns when pushing is released.
摘要:
A convex portion is formed along the edge of a semiconductor substrate to surround a chip region on the main surface side of the semiconductor substrate. For example, the convex portion is formed part of the semiconductor substrate. The height of the convex portion is set to approximately the same height as the surface of an insulating film attained after the end of the CMP (chemical mechanical polishing) process effected for the insulating film. The width the of the convex portion is set smaller than the width from the edge of the semiconductor substrate to a position in front of the chip region. The semiconductor substrate is attached to a carrier and the CMP process is effected by use of a polishing pad and a slurry. At the time of CMP, since a local heavy load occurring in the edge portion of the semiconductor substrate is applied only to the convex portion, the wafer edge over-polishing will not occur.
摘要:
An input device has a housing having an operation hole formed therein, an operation member supported in a slidably moving manner in multi-directions within the operation hole, and at least two magnetic sensors, arranged at a periphery of the operation member, for detecting change in magnetic property by displacement of the operation member. The operation member includes a holder having a circular ring-shaped magnet incorporated in a fit-in hole and a central push button having a disc plate made of magnetic material integrated at a lower surface. The central push button is fitted in the circular ring-shaped magnet to adsorb, in a separable manner, the disc plate to the circular ring-shaped magnet and position-regulate the central push button.
摘要:
An input device has a housing having an operation hole formed therein, an operation member supported in a slidably moving manner in multi-directions within the operation hole, and at least two magnetic sensors, arranged at a periphery of the operation member, for detecting change in magnetic property by displacement of the operation member. The operation member includes a holder having a circular ring-shaped magnet incorporated in a fit-in hole and a central push button having a disc plate made of magnetic material integrated at a lower surface. The central push button is fitted in the circular ring-shaped magnet to adsorb, in a separable manner, the disc plate to the circular ring-shaped magnet and position-regulate the central push button.