公开(公告)号：US5328270A

公开(公告)日：1994-07-12

申请号：US38579

申请日：1993-03-25

申请人： Roy P. Crawford ,  Mats Engwall ,  Larry J. Gilliland ,  Karl Gong ,  Michel P. Robert

发明人： Roy P. Crawford ,  Mats Engwall ,  Larry J. Gilliland ,  Karl Gong ,  Michel P. Robert

IPC分类号： F16C32/06 ,  F04D19/04 ,  F16C17/02 ,  F16C33/10 ,  G11B19/20

CPC分类号： F16C33/106 ,  F16C17/026 ,  F16C33/107 ,  G11B19/2009 ,  F16C2370/12

摘要： An integrated bearing and pump assembly is formed by positioning a hydrodynamic pump coaxially with respect to a hydrodynamic bearing. The integrated assembly provides pressurized fluid for use within the device incorporating the bearing. The hydrodynamic pump comprises a secondary hydrodynamic bearing incorporated into the primary bearing assembly. The secondary bearing is optimized for high flow pumping applications rather than the high pressure, zero flow requirements of the primary bearing. When the bearing assembly is rotated, fluid flow is provided.

摘要翻译： 通过相对于流体动力轴承同轴地定位流体动力泵来形成集成的轴承和泵组件。 集成组件提供加压流体，以在包含轴承的装置内使用。 流体动力泵包括结合到主轴承组件中的次级流体动力轴承。 次级轴承针对高流量泵送应用进行了优化，而不是主轴承的高压，零流量要求。 当轴承组件旋转时，提供流体流动。

公开(公告)号：US20050162634A1

公开(公告)日：2005-07-28

申请号：US10766115

申请日：2004-01-27

申请人： Mats Engwall

发明人： Mats Engwall

IPC分类号： G03B27/58 ,  G03F7/20

CPC分类号： G03F7/70716 ,  G03B27/58 ,  G03F7/70991

摘要： A cable tray assembly includes a wafer table placed on a precision drive stage of which motions along specified mutually perpendicular X- and Y-directions are independently controlled. A plurality of conduits such as electrical and/or optical cables and gas- and/or liquid-transporting tubes are attached to the wafer table at one end and are also attached to an end portion of a planar elongated member extending in the X-direction. This elongated member is made of an elastic material and has a naturally arcuate sectional shape in the Y-direction. The other end portion of this elongated member is wound around a shaft extended in the Y-direction. The rotary motion and the axial motion in the Y-direction of the shaft are controlled by the same signals which cause the drive stage to move in the X- and Y-directions by the same distances such that the drive stage and the wafer table will move in synchronism with each other, minimizing the effect of cable drag on the wafer table.

摘要翻译： 电缆桥架组件包括放置在精密驱动台上的晶片台，其中独立地控制沿着特定的相互垂直的X方向和Y方向的运动。 诸如电缆和/或光缆以及气体和/或液体输送管的多个导管在一端附接到晶片台，并且还附接到在X方向上延伸的平面细长构件的端部 。 该细长构件由弹性材料制成，并且在Y方向上具有自然的弧形截面形状。 该细长构件的另一端部围绕在Y方向延伸的轴线缠绕。 轴的Y方向的旋转运动和轴向运动由相同的信号控制，使得驱动级在X和Y方向上移动相同的距离，使得驱动级和晶片台将 彼此同步移动，最大限度地减少电缆拖曳对晶片台的影响。