公开(公告)号：US20140061463A1

公开(公告)日：2014-03-06

申请号：US14015658

申请日：2013-08-30

申请人： Max-Planck-Gesellschaft zur Gorderung der Wissenschaften e.V. ,  FEI Company

发明人： Bart Buijsse ,  Marco Hugo Petrus Moers ,  Radostin Stoyanov Danev

IPC分类号： H01J37/26

CPC分类号： H01J31/283 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/2614

摘要： The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.

摘要翻译： 本发明涉及在配备有相位板的透射电子显微镜中形成样品的图像的方法。 这种相位板的现有技术使用可以以振铃和晕圈的形式引入伪影。 这些伪像是由于衍射平面中相位板的锋利边缘由于傅里叶域的突然变化引起的。 通过在记录图像的同时相对于非衍射光束（衍射图案）移动相位板，将傅立叶域中的突然转变改变为更渐进的转变，导致更少的伪像。