-
公开(公告)号：US20140061463A1
公开(公告)日：2014-03-06
申请号：US14015658
申请日：2013-08-30
IPC分类号： H01J37/26
CPC分类号： H01J31/283 , H01J37/26 , H01J37/263 , H01J2237/2614
摘要： The invention relates to a method of forming an image of a sample in a transmission electron microscope equipped with a phase plate. Prior art use of such a phase plate can introduce artifacts in the form of ringing and a halo. These artifacts are caused by the abrupt changes in the Fourier domain due to the sharp edges of the phase plate in the diffraction plane. By moving the phase plate with respect to the non-diffraction beam (the diffraction pattern) while recording an image the sudden transition in the Fourier domain is changed to a more gradual transition, resulting in less artifacts.
摘要翻译： 本发明涉及在配备有相位板的透射电子显微镜中形成样品的图像的方法。 这种相位板的现有技术使用可以以振铃和晕圈的形式引入伪影。 这些伪像是由于衍射平面中相位板的锋利边缘由于傅里叶域的突然变化引起的。 通过在记录图像的同时相对于非衍射光束（衍射图案）移动相位板，将傅立叶域中的突然转变改变为更渐进的转变，导致更少的伪像。
-
公开(公告)号：US11456149B2
公开(公告)日：2022-09-27
申请号：US16835218
申请日：2020-03-30
申请人： FEI Company
发明人： Bart Buijsse , Alexander Henstra , Yuchen Deng
摘要： Diffraction patterns of a sample at various tilt angles are acquired by irradiating a region of interest using a first charged particle beam. Sample images are acquired by irradiating the region of interest using a second charged particle beam. The first and second charged particle beams are formed by splitting charged particles generated by a charged particle source.
-
公开(公告)号：US11004655B2
公开(公告)日：2021-05-11
申请号：US16738992
申请日：2020-01-09
申请人： FEI Company
发明人： Bart Buijsse , Maarten Kuijper
IPC分类号： H01J37/26 , H01J37/22 , H01J37/147 , H01J37/244
摘要： Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.
-
公开(公告)号：US09958403B1
公开(公告)日：2018-05-01
申请号：US15728252
申请日：2017-10-09
申请人： FEI Company
发明人： Pavel Stejskal , Marek Un{hacek over (c)}ovský , Tomá{hacek over (s)} Vystav{hacek over (e)}l , Alan Frank de Jong , Bart Buijsse , Pierre Bleuet
CPC分类号： G01N23/046 , G01N23/2251 , G01N2223/1016 , G01N2223/204 , G01N2223/309 , G01N2223/3306 , G01N2223/401 , G01N2223/417 , G01N2223/419 , G21K7/00 , H01J37/28 , H01J2237/2807
摘要： A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.
-
公开(公告)号：US20140203191A1
公开(公告)日：2014-07-24
申请号：US14160135
申请日：2014-01-21
申请人： FEI Company
IPC分类号： G01N21/64
CPC分类号： G02B21/082 , G01N21/6458 , G02B21/16
摘要： The invention relates to a method of inspecting parts of a sample on a TEM grid with a fluorescence microscope, as arises when performing correlative microscopy, more specifically for samples on a holey carbon grid. A problem occurs when imaging vitrified ice with sample material when the ice is heated by the light used. The invention is based on the insight that the absorption in the carbon support film is responsible for the heating, as ice hardly absorbs light. By localizing the illumination of the fluorescent microscope to the parts of the sample that are above a hole in the carbon, heating of the ice is lowered. The localization can be achieved by, for example, passing the light through a LCD type Spatial Light Modulator.
摘要翻译： 本发明涉及一种利用荧光显微镜在TEM网格上检测样品的部分的方法，如进行相关显微镜时更为具体地用于多孔碳网格上的样品。 当冰被所用的光加热时，用样品材料成像玻璃化冰时会出现问题。 本发明是基于以下认识：碳载体膜中的吸收负责加热，因为冰难以吸收光。 通过将荧光显微镜的照明定位在碳上方的孔的上方的样品部分，冰的加热降低。 定位可以通过例如使光通过LCD型空间光调制器来实现。
-
公开(公告)号：US11183364B1
公开(公告)日：2021-11-23
申请号：US16900749
申请日：2020-06-12
申请人： FEI Company
摘要： Methods for using a dual beam microscope system to simultaneously process a sample and image the processed portions of the sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, splitting the plurality of electrons into two electron beams, and then modifying the focal properties of at least one of the electron beams such that the two electron beams have different focal planes. Once the two beams have different focal planes, the first electron beam is focused such that it acts as a STEM beam. The STEM beam is then used to process a region of the sample to induce a physical change (e.g., perform milling, deposition, charge adjustment, phase change, etc.). The second electron beam is focused to act as a TEM beam to perform imaging of the region of the sample being processed.
-
公开(公告)号：US10651008B2
公开(公告)日：2020-05-12
申请号：US15998757
申请日：2018-08-16
申请人： FEI Company
发明人： Bart Buijsse , Maarten Kuijper
IPC分类号： H01J37/00 , H01J37/22 , H01J37/26 , H01J37/147
摘要： Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.
-
公开(公告)号：US20190057836A1
公开(公告)日：2019-02-21
申请号：US15998757
申请日：2018-08-16
申请人： FEI Company
发明人： Bart Buijsse , Kuijper Kuijper
IPC分类号： H01J37/22 , H01J37/147 , H01J37/26
摘要： Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.
-
公开(公告)号：US20180100815A1
公开(公告)日：2018-04-12
申请号：US15728252
申请日：2017-10-09
申请人： FEI Company
发明人： Pavel Stejskal , Marek Uncovský , Tomás Vystavel , Alan Frank de Jong , Bart Buijsse , Pierre Bleuet
IPC分类号： G01N23/04
CPC分类号： G01N23/046 , G01N23/2251 , G01N2223/1016 , G01N2223/204 , G01N2223/309 , G01N2223/3306 , G01N2223/401 , G01N2223/417 , G01N2223/419 , G21K7/00 , H01J37/28 , H01J2237/2807
摘要： A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.
-
公开(公告)号：US09583303B2
公开(公告)日：2017-02-28
申请号：US14878513
申请日：2015-10-08
申请人： FEI Company
发明人： Bart Buijsse , Gijs van Duinen
IPC分类号： H01J37/26 , H01J37/02 , H01J37/153
CPC分类号： H01J37/023 , H01J37/153 , H01J37/26 , H01J37/261 , H01J2237/024 , H01J2237/1532 , H01J2237/1534 , H01J2237/2602 , H01J2237/2614
摘要： When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.
摘要翻译： 当准备无孔相板（HFPP）时，应该在TEM的衍射平面或与其共轭的平面上以高精度放置优选无特征薄膜。 描述了将薄膜准确地放置在所述平面中的两种方法。 当TEM处于成像模式时，一种方法使用薄膜的Ronchigram，并且调整Ronchigram的放大倍率，使得Ronchigram中间的放大倍率是无穷大的。 第二种方法是在TEM处于衍射模式时使用由薄膜散射的电子。 当薄膜与衍射平面不一致时，由薄膜散射的电子似乎源自与零光束交叉的另一位置。 这被观察为光环。 光晕的不存在证明薄膜与衍射平面重合。
-
-
-
-
-
-
-
-
-
搜索结果
32 条记录 (耗时 0.02 秒)