Abstract:
A pressure differential measuring transducer has measuring membranes arranged side by side on one side of a membrane disk and a common fluid space allocated to them. To obtain a measured electric quantity which is proportional to a pressure difference and is independent of changes in static pressure with such a measuring transducer, a part of the membrane disk carrying a first measuring membrane is accommodated from the side in the interior of a tube with a seal, said tube being acted upon by a first pressure at its one end and at its other open end. Another part of the membrane disk having a second measuring membrane extends into an interior space of a container adjacent to the tube to which a second pressure can be applied.
Abstract:
A corpuscular-beam apparatus including a specimen holder having at least two degrees of freedom of translation and at least one degree of freedom of rotation, and control means for correcting the translational coordinates of the specimen holder automatically when the specimen holder is rotated and retaining a predetermined specimen point in its position in the apparatus. The improvement of the invention comprises the control means comprising means for controlling the rotational movement of the specimen holder stepwise in angular increments, the angular increments being chosen small so that the translational movement of the specimen point for each angular increment may be considered linear. The control means further comprises means for correcting the translational coordinates of the specimen holder stepwise in linear increments prior to each stepwise rotation of the specimen holder, each of the linear increments comprising a linear function of the instantaneous values of the translational coordinates and of the angular increments of the rotational movement of the specimen holder.
Abstract:
A corpuscular-beam microscope including a support stand, a columnar housing containing the optical elements of the microscope, electronic control and regulating means for generating and transmitting voltage signals to parts of a beam generator of the microscope which are at high-voltage potential, and at least one high-vacuum pump for evacuating the microscope housing. The improvement of the invention comprises the support stand comprising a horizontal base member and a flexure-resistant vertical support member disposed on the base member. The microscope housing, the control and regulating means, and the pump are mounted on different sides of the support member and are arranged so that the center of gravity of the support stand is disposed between the support member and the optical axis of the microscope near the axis.
Abstract:
A pressure or pressure difference measuring instrument with a central part which has separating seal diaphragms at its end faces and which contains a pressure-sensing device is disclosed. In order to arrange the pressure-sensing device in the central part, the central part is provided in a circumferential area between the end faces with a pot-like recess into which a carrier for the pressure sensing device is inserted. The carrier has a cross hole which changes into a pressure-transmitting canal in the central part in such a position that due to the carrier being welded to the central part, there is produced at the same time a seal in the area of the point of transition from the cross hole to the pressure transmitting canal.
Abstract:
A pressure difference measuring device having a semiconductor pressure sensor in a pressure pickup body which supports at each end face thereof a separating diaphragm with an adjacent supplemental diaphragm. On both sides of the semiconductor pressure sensor, a connecting canal is provided which leads in spur canals to the separating diaphragms and the supplemental diaphragms. In order to equip a pressure difference measuring device of this type with mechancial damping without adverse consequences for the operation of the overload protection, a damping element is arranged in at least one connecting canal. An equalizing diaphragm is associated with the semiconductor pressure sensor, the two sides of which are connected by the connecting canals in the region between the semiconductor pressure sensor and the damping element.
Abstract:
An optical corpuscular-beam apparatus including a rod-shaped specimen holder passing through a wall of the apparatus, which holder is secured in the apparatus wall by a first bearing and engages an adjustable counterbearing in the interior of the apparatus. The improvement of the invention comprises the first bearing comrising a diaphragm disposed circumferentially about the specimen holder and having an outer edge mechanically coupled to the apparatus wall.