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公开(公告)号:US08373122B2
公开(公告)日:2013-02-12
申请号:US12739513
申请日:2008-03-31
IPC分类号: H01J40/00
CPC分类号: H01J49/484
摘要: Charged particle energy analysers enabling simultaneous high transmission and energy resolution are described. The analysers have an electrode structure (11) comprising coaxial inner and outer electrodes (14, 15) having inner and outer electrode surfaces (IS, OS) respectively. The inner and outer electrode surfaces are defined, at least in part, by spheroidal surfaces having meridonal planes of symmetry orthogonal to a longitudinal axis of the electrode structure (11). The inner and outer electrode surfaces are generated by rotation, about the longitudinal axis, of arcs of two non-concentric circles having different radii R2 and R1 respectively, R2 being greater than R1. The distance of the outer electrode surface from the longitudinal axis in the respective meridonal plane is R01 and the distance of the inner electrode surface from the longitudinal axis in the respective plane is R02 and R1, R2, R01 and R02 have a defined relationship.
摘要翻译: 描述了实现同时高传输和能量分辨率的带电粒子能量分析器。 分析仪具有分别具有内外电极表面(IS,OS)的同轴内外电极(14,15)的电极结构(11)。 内电极表面和外电极表面至少部分地由具有与电极结构(11)的纵向轴线正交的对称面对称平面的球形表面限定。 内电极表面和外电极表面分别通过具有不同半径R2和R1的两个非同心圆的圆弧的纵轴旋转产生,R2大于R1。 外电极表面与各个子午线平面中纵轴的距离为R01,内平面与纵轴的距离为R02,R1,R2,R01,R02为关系。
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公开(公告)号:US20110147585A1
公开(公告)日:2011-06-23
申请号:US12739513
申请日:2008-03-31
IPC分类号: H01J37/285
CPC分类号: H01J49/484
摘要: Charged particle energy analysers enabling simultaneous high transmission and energy resolution are described. The analysers have an electrode structure (11) comprising coaxial inner and outer electrodes (14, 15) having inner and outer electrode surfaces (IS, OS) respectively. The inner and outer electrode surfaces are defined, at least in part, by spheroidal surfaces having meridonal planes of symmetry orthogonal to a longitudinal axis of the electrode structure (11). The inner and outer electrode surfaces are generated by rotation, about the longitudinal axis, of arcs of two non-concentric circles having different radii R2 and R1 respectively, R2 being greater than R1. The distance of the outer electrode surface from the longitudinal axis in the respective meridonal plane is R01 and the distance of the inner electrode surface from the longitudinal axis in the respective plane is R02 and R1, R2, R01 and R02 have a defined relationship.
摘要翻译: 描述了实现同时高传输和能量分辨率的带电粒子能量分析器。 分析仪具有分别具有内外电极表面(IS,OS)的同轴内外电极(14,15)的电极结构(11)。 内电极表面和外电极表面至少部分地由具有与电极结构(11)的纵向轴线正交的对称面对称平面的球形表面限定。 内电极表面和外电极表面分别通过具有不同半径R2和R1的两个非同心圆的圆弧的纵轴旋转产生,R2大于R1。 外电极表面与各个子午线平面中纵轴的距离为R01,内平面与纵轴的距离为R02,R1,R2,R01,R02为关系。
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